公开(公告)号：US11362162B2

公开(公告)日：2022-06-14

申请号：US16132031

申请日：2018-09-14

Applicant: Samsung Display Co., Ltd.

Inventor： Myung Soo Huh ,  Dong Kyun Ko ,  Sung Chui Kim ,  Woo Jin Kim ,  Cheol Lae Roh ,  Keun Hee Park

IPC: H01L27/32 ,  H01L21/02 ,  H01L49/02 ,  H01L51/52 ,  H01L27/12

Abstract: A method of manufacturing a metal oxide film includes injecting a reaction gas and metal precursors into a chamber, forming a first metal precursor film on a substrate in a plasma OFF state, forming a first sub-metal oxide film by oxidizing the first metal precursor film in a plasma ON state, and forming a second metal precursor film on the first sub-metal oxide film in the plasma OFF state, where the metal oxide film has an amorphous phase, a thickness of about 20 nanometer (nm) to about 130 nm, and a dielectric constant of about 10 to about 50.

公开(公告)号：US12269269B2

公开(公告)日：2025-04-08

申请号：US18353819

申请日：2023-07-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jeong Won Han ,  Myung Soo Huh

IPC: B41J2/17 ,  B05B15/52 ,  B41J2/175 ,  H10K71/13

Abstract: An inkjet printing apparatus includes a surface acoustic wave module including an inner passage and a surface acoustic wave generator around the inner passage; and an outflow passage connected to the surface acoustic wave module to discharge ink, where the outflow passage includes a first outflow passage connected to the inner passage to discharge first ink particles and a second outflow passage connected to the inner passage to discharge second ink particles having an average diameter smaller than that of the first ink particles, and the surface acoustic wave generator is closer to the second outflow passage than the first outflow passage.

公开(公告)号：US11766866B2

公开(公告)日：2023-09-26

申请号：US17557673

申请日：2021-12-21

Applicant: Samsung Display Co., LTD.

Inventor： Jeong Won Han ,  Myung Soo Huh

IPC: B41J2/14 ,  B41J2/145

CPC classification number: B41J2/1433 ,  B41J2/145 ,  B41J2002/14475

Abstract: An inkjet printing apparatus includes a print head including an inkjet head having a nozzle surface; nozzles disposed on the nozzle surface, that spray an ink from the nozzles; and a heater that heats a temperature of the inkjet head to a reference temperature. The nozzles include a first nozzle having a first diameter; and a second nozzle having a second diameter different from the first diameter of the first nozzle, the nozzle surface includes a first area in which the first nozzle is disposed and a second area in which the second nozzle is disposed, the first area has a first temperature in case that the heater heats the inkjet head to the reference temperature, and the second area has a second temperature different from the first temperature in case that the heater heats the inkjet head to the reference temperature.

公开(公告)号：US11707932B2

公开(公告)日：2023-07-25

申请号：US17213076

申请日：2021-03-25

Applicant: Samsung Display Co., Ltd.

Inventor： Jeong Won Han ,  Myung Soo Huh

IPC: B41J2/17 ,  B41J2/175 ,  B05B15/52 ,  H10K71/13

CPC classification number: B41J2/1707 ,  B05B15/52 ,  B41J2/17513 ,  H10K71/13

Abstract: An inkjet printing apparatus includes a surface acoustic wave module including an inner passage and a surface acoustic wave generator around the inner passage; and an outflow passage connected to the surface acoustic wave module to discharge ink, where the outflow passage includes a first outflow passage connected to the inner passage to discharge first ink particles and a second outflow passage connected to the inner passage to discharge second ink particles having an average diameter smaller than that of the first ink particles, and the surface acoustic wave generator is closer to the second outflow passage than the first outflow passage.

公开(公告)号：US11268192B2

公开(公告)日：2022-03-08

申请号：US16434256

申请日：2019-06-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Woo Jin Kim ,  Dong Kyun Ko ,  Keun Hee Park ,  Myung Soo Huh ,  Seon Uk Park

IPC: C23C16/40 ,  C23C16/455 ,  C23C16/50 ,  H01L51/56

Abstract: A thin film processing apparatus includes a susceptor and a showerhead facing the susceptor. The showerhead includes a first plate including an inner tunnel, a first injection hole, and a second injection hole. The inner tunnel extends across the first plate in a thickness direction of the first plate. The first injection hole penetrates a first surface and a second surface of the first plate on opposite sides of the first plate in the thickness direction. The second injection hole penetrates the second surface of the first plate. The second injection is connected with the inner tunnel.

公开(公告)号：US10480076B2

公开(公告)日：2019-11-19

申请号：US15049162

申请日：2016-02-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jai Hyuk Choi ,  Won Woong Park ,  Sung Hun Key ,  Min Soo Kim ,  Byeong Chun Lee ,  Suk Won Jung ,  Hyun Woo Joo ,  Myung Soo Huh

IPC: C23C16/04 ,  C23C16/50 ,  H01L21/02 ,  H01J37/32

Abstract: A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode.