公开(公告)号：US20150355219A1

公开(公告)日：2015-12-10

申请号：US14589206

申请日：2015-01-05

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Pil Joong KANG ,  Jung Won LEE ,  Hyun Kee LEE ,  Jong Hyeong SONG

IPC: G01P15/12 ,  G01P15/093 ,  G01P15/125

CPC classification number: G01P15/123 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0292 ,  B81B2207/012 ,  B81C2201/019 ,  G01C19/5783 ,  G01P15/0802 ,  G01P15/093 ,  G01P15/125 ,  G01P2015/0842

Abstract: Embodiments of the invention provide a multi-axis sensor, including a first sensor embedded in an embedded substrate to sense a position, and a second sensor formed on a lower cap substrate bonded on the embedded substrate by a wafer level package scheme to sense an inertial force.

Abstract translation: 本发明的实施例提供一种多轴传感器，其包括嵌入在嵌入式基板中以感测位置的第一传感器，以及通过晶片级封装方案形成在嵌入式基板上的下盖基板上的第二传感器，以感测惯性 力。

公开(公告)号：US20150135497A1

公开(公告)日：2015-05-21

申请号：US14610919

申请日：2015-01-30

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Seung Mo LIM ,  Yun Sung KANG ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Kyo Yeol LEE

IPC: H01L41/25 ,  H01L41/35 ,  H01L41/29 ,  G01P15/09

CPC classification number: H01L41/25 ,  G01P15/0802 ,  G01P15/09 ,  H01L41/0475 ,  H01L41/0825 ,  H01L41/1138 ,  H01L41/257 ,  H01L41/29 ,  H01L41/35 ,  Y10T29/42

Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention may include a membrane 110, a piezoelectric body 130 formed over the membrane 110, an electrode 140 formed on the piezoelectric body 130, a first pad 150 electrically connected with the electrode 140, a second pad 160 electrically connected with an integrated circuit 170, and a connection member 180 electrically connecting the first pad 150 with the second pad 160.

Abstract translation: 这里公开了惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100可包括膜110，形成在膜110上的压电体130，形成在压电体130上的电极140，与电极140电连接的第一焊盘150， 与集成电路170电连接的第二焊盘160以及将第一焊盘150与第二焊盘160电连接的连接部件180。