METHODS OF FORMING MAGNETIC MATERIALS AND ARTICLES FORMED THEREBY
    13.
    发明申请
    METHODS OF FORMING MAGNETIC MATERIALS AND ARTICLES FORMED THEREBY 审中-公开
    形成磁性材料的方法和形成的制品

    公开(公告)号:US20140093701A1

    公开(公告)日:2014-04-03

    申请号:US13630036

    申请日:2012-09-28

    Abstract: Methods of forming a layer of magnetic material on a substrate, the method including: configuring a substrate in a chamber; controlling the temperature of the substrate at a substrate temperature, the substrate temperature being at or below about 250° C.; and introducing one or more precursors into the chamber, the one or more precursors including: cobalt (Co), nickel (Ni), iron (Fe), or combinations thereof, wherein the precursors chemically decompose at the substrate temperature, and wherein a layer of magnetic material is formed on the substrate, the magnetic material including at least a portion of the one or more precursors, and the magnetic material having a magnetic flux density of at least about 1 Tesla (T).

    Abstract translation: 在基板上形成磁性材料层的方法,所述方法包括:在室内配置基板; 在衬底温度下控制衬底的温度,衬底温度在或低于约250℃; 并且将一种或多种前体引入所述室中,所述一种或多种前体包括:钴(Co),镍(Ni),铁(Fe)或其组合,其中所述前体在衬底温度下化学分解, 磁性材料形成在衬底上,磁性材料包括一种或多种前体的至少一部分,磁性材料具有至少约1特斯拉(T)的磁通密度。

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