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公开(公告)号：US20090196734A1
公开(公告)日：2009-08-06
申请号：US12365314
申请日：2009-02-04
CPC分类号： F04D19/042 , F04D17/168 , F04D19/046
摘要： A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
摘要翻译： 涡轮真空泵，包括沿轴向吸入气体的吸入部23A; 排出部分50，其排出由抽吸部分23A吸入的气体，排出部分50具有多个旋转叶轮70,80和固定叶轮71，其被布置成与多个旋转叶轮70,80中的每一个相对 ; 以及旋转多个旋转叶轮70,80的旋转轴21，其中多个旋转叶轮70,80包括用于沿着轴向排出吸入气体的第一涡轮机叶轮70的至少一个级，第一涡轮叶轮 70被固定到旋转轴21的吸入部侧端面15，以及固定到旋转轴21上的第二涡轮机叶轮80的至少一个台阶，其延伸穿过第二涡轮机叶轮80，第二涡轮机叶轮80 布置在第一涡轮叶轮70的下游。
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12.发明申请Vacuum evacuation device and method, and substrate processing apparatus and method 审中-公开真空抽气装置及方法，以及基板处理装置及方法公开(公告)号：US20070048145A1
公开(公告)日：2007-03-01
申请号：US11501793
申请日：2006-08-10
申请人： Katsutoshi Ishii , Ken Nakao , Takanobu Asano , Kota Umezawa , Hiroaki Ogamino , Tadashi Urata , Katsuaki Usui , Masafumi Inoue , Shinichi Sekiguchi , Hironobu Yamasaki
发明人： Katsutoshi Ishii , Ken Nakao , Takanobu Asano , Kota Umezawa , Hiroaki Ogamino , Tadashi Urata , Katsuaki Usui , Masafumi Inoue , Shinichi Sekiguchi , Hironobu Yamasaki
IPC分类号： F04B49/06
CPC分类号： F04D19/042 , F04D27/0261
摘要： A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.
摘要翻译： 本发明的真空排气装置2包括：真空泵4,5，用于在处理室21中排出气体G 2，工艺气体G 1引入到该气体G 2中并进行处理反应，以在所述 处理室21; 以及用于执行调节所述真空泵4,5的转速的第一控制的控制装置6，使得所述处理室21中的压力条件达到在所述处理反应期间适用于所述处理反应的压力条件，其中所述控制装置 图6基于与所述处理反应相关的处理信息计算出所述真空泵4,5的指定转速，并且执行使所述真空泵4,5在所述第一控制之前达到所述指定转速的第二控制。 真空排气装置2能够在不使真空泵4,5过载的情况下在短时间内将处理室21内的压力提高到目标压力，而与过程反应条件无关。
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公开(公告)号：US06929027B2
公开(公告)日：2005-08-16
申请号：US10863282
申请日：2004-06-09
申请人： Shinichi Sekiguchi
发明人： Shinichi Sekiguchi
CPC分类号： B01F15/0261 , B01F5/0413 , B01F5/0471 , B01F15/0201 , B01F2003/0896 , Y10T137/87281 , Y10T137/87627 , Y10T137/8766 , Y10T137/87676
摘要： A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages. In this way, by rotatably attaching the cylindrical dial in which the plurality of jets are formed to the first body, it is possible to have a small and simple structure, and also to easily change the dilution factor by merely turning the dial.
摘要翻译： 液体稀释装置结构简单，结构简单，能够可靠地密封，简单地改变稀释浓度。 稀释通道形成在第一体中，并且用于引入特殊液体的连接通道连接到这些稀释剂通道。 覆盖连接通道的开口部分的圆柱形表盘可旋转地设置在第一主体的外部部分上，与该圆柱形表盘一起形成从内向外穿过的多个喷嘴，并且多个 的喷气机是不同的。 液体供给通道设置在与连接通道相对的位置处，使得圆筒形表盘夹在液体供应通道和连接通道之间，连接通道和液体供应通道通过直径相匹配的喷嘴连接 稀释因子将特殊液体从液体供应通道引入其中一个稀释剂通道。 以这种方式，通过将形成有多个喷嘴的圆筒形表盘可旋转地附接到第一主体，可以具有小而简单的结构，并且也可以通过仅转动表盘容易地改变稀释系数。
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公开(公告)号：US06789571B2
公开(公告)日：2004-09-14
申请号：US10060681
申请日：2002-01-30
申请人： Shinichi Sekiguchi
发明人： Shinichi Sekiguchi
IPC分类号： G05D1103
CPC分类号： B01F15/0261 , B01F5/0413 , B01F5/0471 , B01F15/0201 , B01F2003/0896 , Y10T137/87281 , Y10T137/87627 , Y10T137/8766 , Y10T137/87676
摘要： A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages. In this way, by rotatably attaching the cylindrical dial in which the plurality of jets are formed to the first body, it is possible to have a small and simple structure, and also to easily change the dilution factor by merely turning the dial.
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公开(公告)号：US06539043B1
公开(公告)日：2003-03-25
申请号：US09856138
申请日：2001-05-29
IPC分类号： H01S322
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life. The discharge-pumped excimer laser device according to the present invention has a laser chamber (1) filled with a laserigas and housing at least a pair of main discharge electrodes (2, 2) for producing an electric discharge to be able to oscillate a laser beam, housings (6, 7) joined to opposite sides of the laser chamber (1), a cross flow fan (3) having opposite ends rotatably supported by magnetic bearings (8, 9, 10, 11) accommodated in the housings (6, 7), for producing a high-speed laser gas flow between the main discharge electrodes (2, 2), a motor (12) accommodated in the housing (7) for rotating the cross flow fan (3), laser gas flow passages (61, 62) extending through gaps between rotor side and stator side of the magnetic bearings (8, 9, 10, 11) and the motor (12) over an axial entire length of the housings (6, 7), and communicating with an interior of the laser chamber (1), a laser gas introduction passage (60) extending from the interior of the laser chamber (1) and communicating with the laser gas flow passages (61, 62), and filters (20, 20) disposed in the laser gas introduction passage (60).
摘要翻译： 本发明提供了一种排出泵浦的准分子激光装置，其包括填充有少量劣化的激光气体的激光室，磁性轴承和抵抗灰尘颗粒进入的电动机以及保持在 与激光气体接触，损伤小，使用寿命长。本发明的排出泵浦准分子激光装置具有填充有激光的激光室（1），并容纳至少一对主放电电极 （2,2），用于产生能够振荡激光束的放电，与激光室（1）的相对侧接合的壳体（6,7），具有相对端部的交叉流动风扇（3），其可旋转地支撑在 容纳在壳体（6,7）中的磁性轴承（8,9,10,11），用于在主放电电极（2,2）之间产生高速激光气流，容纳在壳体 （7），用于旋转横流风扇（3），激光气体 在所述壳体（6,7）的轴向整个长度上延伸穿过所述磁性轴承（8,9,10,11）和所述电动机（12）的转子侧和定子侧之间的间隙的流动通道（61,62），以及 与所述激光室（1）的内部连通，从所述激光室（1）的内部延伸并与所述激光气体流路（61,62）连通的激光气体导入通路（60） 20）设置在激光气体导入通路（60）中。
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公开(公告)号：US08172515B2
公开(公告)日：2012-05-08
申请号：US12365314
申请日：2009-02-04
CPC分类号： F04D19/042 , F04D17/168 , F04D19/046
摘要： A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
摘要翻译： 涡轮真空泵，包括沿轴向吸入气体的吸入部23A; 排出部分50，其排出由抽吸部分23A吸入的气体，排出部分50具有多个旋转叶轮70,80和固定叶轮71，其被布置成与多个旋转叶轮70,80中的每一个相对 ; 以及使多个旋转叶轮70,80旋转的旋转轴21，其中，多个旋转叶轮70,80包括用于沿着轴向排出吸入气体的第一涡轮机叶轮70的至少一级，第一涡轮叶轮 70被固定到旋转轴21的吸入部侧端面15，以及固定到旋转轴21上的第二涡轮机叶轮80的至少一个台阶，其延伸穿过第二涡轮机叶轮80，第二涡轮机叶轮80 布置在第一涡轮叶轮70的下游。
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17.发明授权公开(公告)号：US07717684B2
公开(公告)日：2010-05-18
申请号：US10921197
申请日：2004-08-19
IPC分类号： F04B35/04
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译： 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。
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公开(公告)号：US07108014B2
公开(公告)日：2006-09-19
申请号：US10511764
申请日：2003-03-17
申请人： Shinichi Sekiguchi
发明人： Shinichi Sekiguchi
IPC分类号： F16K11/00
CPC分类号： B01F5/0413 , B01F3/0865 , B01F5/0428 , B01F15/00019 , B01F15/0261 , B01F2003/0896 , B01F2215/0077 , Y10T137/87603 , Y10T137/87627 , Y10T137/8766
摘要： A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.
摘要翻译： 在主体10中形成有用于引入特殊液体的稀释剂通道12和与稀释液通道12分离的冲洗液体供给通道13，多个喷嘴设置在圆筒形表盘18上。 形成水输送通道，以将冲洗液体供应通道13的两个位置连接到其间的压力差与其它喷嘴19b，19c之间的位置，除了引入特殊液体的喷嘴19a之外。 当水在冲洗液供给通道13中流动时，由于冲洗液供给通道13的压力差，水被导入水输送通道。 除了引入特殊液体的喷嘴19a之外，水冲洗其它喷嘴19b，19c。 因此，可以防止调整未被使用了相当长的时间的喷嘴19b，19c的变化或阻塞。
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公开(公告)号：US20050217744A1
公开(公告)日：2005-10-06
申请号：US10511764
申请日：2003-03-17
申请人： Shinichi Sekiguchi
发明人： Shinichi Sekiguchi
CPC分类号： B01F5/0413 , B01F3/0865 , B01F5/0428 , B01F15/00019 , B01F15/0261 , B01F2003/0896 , B01F2215/0077 , Y10T137/87603 , Y10T137/87627 , Y10T137/8766
摘要： A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.
摘要翻译： 在主体10中形成有用于引入特殊液体的稀释剂通道12和与稀释液通道12分离的冲洗液体供给通道13，多个喷嘴设置在圆筒形表盘18上。 形成水输送通道，以将冲洗液体供应通道13的两个位置连接到其间的压力差与其它喷嘴19b，19c之间的位置，除了引入特殊液体的喷嘴19a之外。 当水在冲洗液供给通道13中流动时，由于冲洗液供给通道13的压力差，水被导入水输送通道。 除了引入特殊液体的喷嘴19a之外，水冲洗其它喷嘴19b，19c。 因此，可以防止调整未被使用了相当长的时间的喷嘴19b，19c的变化或阻塞。
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公开(公告)号：US06603787B1
公开(公告)日：2003-08-05
申请号：US09576208
申请日：2000-05-23
IPC分类号： H01S3225
CPC分类号： F16C32/047 , H01S3/03 , H01S3/036 , H01S3/225
摘要： A discharge-pumped excimer laser device has a casing, a pair main discharge electrodes, a cross-flow fan for producing a high-speed laser gas flow between the main discharge electrodes, the cross-flow fan having a rotatable shaft projecting from opposite ends thereof, magnetic bearings, the rotatable shaft being rotatably supported by the bearings, protective bearings for supporting the rotatable shaft when the magnetic bearings are not in operation, and a motor for actuating the cross-flow fan. The magnetic bearings include radial magnetic bearings disposed on the opposite ends of the rotatable shaft. One of the radial magnetic bearings which is disposed closely to the motor has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.
摘要翻译： 排出泵浦准分子激光装置具有壳体，一对主放电电极，用于在主放电电极之间产生高速激光气流的横流风扇，所述横流风扇具有从相对端突出的可旋转轴 磁轴承，可旋转轴由轴承可旋转地支撑，当磁轴承不运行时用于支撑可旋转轴的保护轴承，以及用于致动横流风扇的电动机。 磁性轴承包括设置在可旋转轴的相对端上的径向磁轴承。 靠近电机设置的径向磁轴承之一具有大于远离电动机的磁性轴承的轴承刚性的轴承刚度。
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