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公开(公告)号：US20250007492A1
公开(公告)日：2025-01-02
申请号：US18412732
申请日：2024-01-15
Applicant: SiTime Corporation
Inventor： Joseph C. Doll , Nicholas Miller , Charles I. Grosjean , Paul M. Hagelin , Ginel C. Hill
Abstract: A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.
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公开(公告)号：US11975965B2
公开(公告)日：2024-05-07
申请号：US18340815
申请日：2023-06-23
Applicant: SiTime Corporation
Inventor： Charles I. Grosjean , Nicholas Miller , Paul M. Hagelin , Ginel C. Hill , Joseph C. Doll
CPC classification number: B81C1/00698 , H03H3/0073 , H03H9/1057 , H10N30/05 , H10N39/00 , B81C1/00158 , B81C2201/0171
Abstract: Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
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公开(公告)号：US11724934B2
公开(公告)日：2023-08-15
申请号：US18072506
申请日：2022-11-30
Applicant: SiTime Corporation
Inventor： Charles I. Grosjean , Nicholas Miller , Paul M. Hagelin , Ginel C. Hill , Joseph C. Doll
CPC classification number: B81C1/00698 , H03H3/0073 , H03H9/1057 , H10N30/05 , H10N39/00 , B81C1/00158 , B81C2201/0171
Abstract: Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
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