公开(公告)号：US06425559B1

公开(公告)日：2002-07-30

申请号：US09675492

申请日：2000-09-29

申请人： I. Roger Oliver ,  Alex P. Ivaschenko ,  William N. Partlo ,  Palash P. Das

发明人： I. Roger Oliver ,  Alex P. Ivaschenko ,  William N. Partlo ,  Palash P. Das

IPC分类号： F16M1100

CPC分类号： H01S3/03 ,  H01S3/02

摘要： A chamber/optics support structure for a laser having a laser chamber with a vibration source. The chamber and the laser resonance cavity optical elements are supported on a platform. The chamber is supported by a plurality of wheels which in turn rests on two tracks on track supports mounted on the platform. A vertical vibration isolator isolates vertical vibrations originating in the chamber from the laser optics. A flexible clamp flexibly clamps the chamber in a horizontal position to align it with the resonance cavity optical elements and to substantially decouple vibration between the chamber vibration source to the optical elements in a frequency range of concern. The invention is especially useful for positioning the heavy laser chamber of a narrow band excimer laser and for decoupling vibrations resulting from its blower from the lasers line narrowing module and output coupler. In a preferred embodiment the plurality of wheels is three wheels, two of which rest in a V-groove track and one of which rests on a flat track. This preferred embodiment uses two flexible clamps each having an adjustment bolt and four symmetrically spaced silicon rubber vibration isolators. Precise horizontal alignment of the chamber is accomplished using the adjustment bolt which is then held in position with a lock nut and a clamping bolt. Silicon rubber dampers in the isolators decouple horizontal chamber vibrations from the optical elements. In specific embodiments, the vertical vibration isolator may be a flexible liner in the wheels or in the rails or alternatively a pad on which the chamber rests.

摘要翻译： 一种用于具有具有振动源的激光室的激光器的腔室/光学器件支撑结构。 腔室和激光共振腔光学元件支撑在平台上。 该室由多个轮支撑，多个轮依次放置在安装在平台上的轨道支架上的两个轨道上。 垂直隔振器将起始于室内的垂直振动与激光光学器件隔离。 柔性夹具可灵活地将腔室夹紧在水平位置，以将其与共振腔光学元件对准，并使其在腔室振动源与光学元件之间的振动基本上在关注的频率范围内分离。本发明特别适用于定位重物 激光腔的窄带准分子激光器，并将其鼓风机的振动与激光线变窄模块和输出耦合器分离。 在优选实施例中，多个车轮是三个车轮，其中两个车轮搁置在V形槽轨道中，其中一个车轮搁置在平坦轨道上。 该优选实施例使用两个柔性夹具，每个柔性夹具具有调节螺栓和四个对称间隔的硅橡胶隔振器。 使用调节螺栓实现腔室的精确水平对准，调节螺栓然后通过锁紧螺母和夹紧螺栓保持在适当的位置。 隔离器中的硅橡胶阻尼器将水平室振动与光学元件分离。在具体实施例中，垂直隔振器可以是轮子中或轨道中的柔性衬垫，或者替代地，腔室搁置在其上。

公开(公告)号：US06477193B2

公开(公告)日：2002-11-05

申请号：US09748316

申请日：2000-12-22

申请人： I. Roger Oliver ,  William N. Partlo

发明人： I. Roger Oliver ,  William N. Partlo

IPC分类号： H01S322

CPC分类号： H01S3/225 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H03K3/57 ,  H03K17/80

摘要： A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. Important improvements over prior art designs include: (1) a squirrel cage type fan for producing gas velocities through the discharge region of more than 67 m/s and capable of continuous trouble-free operation for several months, (2) a liquid cooled drive motor having a low loss sealing member separating the motor rotor from the motor starter and protecting the motor from the laser gas and a breach detection device for detecting any breach of the sealing member, (3) a heat exchanger system capable of removing in excess of 16 kw of heat energy from the laser gas and (4) a pulse power system capable of providing precisely controlled electrical pulses to the electrodes needed to produce laser pulses at the desired pulse energies in the range of 5 mJ to 10 mJ or greater at pulse repetition rates in the range of 4,000 Hz to 6,000 Hz or greater.

摘要翻译： 一种气体放电激光器，能够以5mJ至10mJ或更大的脉冲能量在4000Hz至6,000Hz的脉冲频率下工作。 与现有技术设计相比，重要的改进包括：（1）用于通过超过67m / s的排放区域产生气体速度并能够连续无故障运行数月的鼠笼式风扇，（2）液冷驱动 电动机具有低损耗密封构件，其将电动机转子与电动机起动器分离并保护电动机免受激光气体的影响;以及用于检测任何泄漏密封构件的泄漏检测装置，（3）能够超过 来自激光气体的16kw的热能和（4）脉冲电力系统，其能够在脉冲处产生在5mJ至10mJ或更大的范围内的期望脉冲能量处产生激光脉冲所需的精确控制的电脉冲 重复率在4000Hz至6000Hz或更大的范围内。