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    Gas laser chamber with vertical vibration isolator
    4.
    发明授权
    Gas laser chamber with vertical vibration isolator 有权
    带垂直隔振器的气体激光室

    公开(公告)号：US06425559B1

    公开(公告)日：2002-07-30

    申请号：US09675492

    申请日：2000-09-29

    Applicant: I. Roger Oliver ,  Alex P. Ivaschenko ,  William N. Partlo ,  Palash P. Das

    Inventor： I. Roger Oliver ,  Alex P. Ivaschenko ,  William N. Partlo ,  Palash P. Das

    IPC: F16M1100

    CPC classification number: H01S3/03 ,  H01S3/02

    Abstract: A chamber/optics support structure for a laser having a laser chamber with a vibration source. The chamber and the laser resonance cavity optical elements are supported on a platform. The chamber is supported by a plurality of wheels which in turn rests on two tracks on track supports mounted on the platform. A vertical vibration isolator isolates vertical vibrations originating in the chamber from the laser optics. A flexible clamp flexibly clamps the chamber in a horizontal position to align it with the resonance cavity optical elements and to substantially decouple vibration between the chamber vibration source to the optical elements in a frequency range of concern. The invention is especially useful for positioning the heavy laser chamber of a narrow band excimer laser and for decoupling vibrations resulting from its blower from the lasers line narrowing module and output coupler. In a preferred embodiment the plurality of wheels is three wheels, two of which rest in a V-groove track and one of which rests on a flat track. This preferred embodiment uses two flexible clamps each having an adjustment bolt and four symmetrically spaced silicon rubber vibration isolators. Precise horizontal alignment of the chamber is accomplished using the adjustment bolt which is then held in position with a lock nut and a clamping bolt. Silicon rubber dampers in the isolators decouple horizontal chamber vibrations from the optical elements. In specific embodiments, the vertical vibration isolator may be a flexible liner in the wheels or in the rails or alternatively a pad on which the chamber rests.

    Abstract translation: 一种用于具有具有振动源的激光室的激光器的腔室/光学器件支撑结构。 腔室和激光共振腔光学元件支撑在平台上。 该室由多个轮支撑，多个轮依次放置在安装在平台上的轨道支架上的两个轨道上。 垂直隔振器将起始于室内的垂直振动与激光光学器件隔离。 柔性夹具可灵活地将腔室夹紧在水平位置，以将其与共振腔光学元件对准，并使其在腔室振动源与光学元件之间的振动基本上在关注的频率范围内分离。本发明特别适用于定位重物 激光腔的窄带准分子激光器，并将其鼓风机的振动与激光线变窄模块和输出耦合器分离。 在优选实施例中，多个车轮是三个车轮，其中两个车轮搁置在V形槽轨道中，其中一个车轮搁置在平坦轨道上。 该优选实施例使用两个柔性夹具，每个柔性夹具具有调节螺栓和四个对称间隔的硅橡胶隔振器。 使用调节螺栓实现腔室的精确水平对准，调节螺栓然后通过锁紧螺母和夹紧螺栓保持在适当的位置。 隔离器中的硅橡胶阻尼器将水平室振动与光学元件分离。在具体实施例中，垂直隔振器可以是轮子中或轨道中的柔性衬垫，或者替代地，腔室搁置在其上。

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