摘要:
A beam space-charge compensation device is applied to an angular energy filter provided in an ion beam processing system that performs processing by irradiating onto a wafer with an ion beam. The beam space-charge compensation device comprises a plasma shower provided in a beam-guiding chamber of the angular energy filter. The plasma shower comprises an arc chamber having a filament for generating thermo-electrons for plasma. The arc chamber comprises an extraction hole for extracting the thermo-electrons. The plasma shower is arranged such that the extraction hole is located on lines of magnetic force, perpendicular to an ion beam advancing direction, of the magnetic field and that a center axis of the filament and a center axis of said extraction hole coincide with the lines of magnetic force, perpendicular to the ion beam advancing direction, of the magnetic field.
摘要:
A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.
摘要:
A driving device includes a forming part for forming one magnetic circuit, a first coil disposed at a first driven member and a second coil disposed at a second driven member. The first and second coils are provided within the one magnetic circuit and arranged to move by being respectively supplied with currents.
摘要:
A vibration-type motor controller controls a driving speed of a vibration-type motor relatively moving a vibrating body in which a vibration is excited by an electromechanical energy conversion element 20 to which a first frequency signal and a second frequency signal having a phase difference are applied, and a contacting body which contacts the vibrating body. The vibration-type motor controller includes a speed controller 1 configured to alternately switch a frequency control which changes frequencies of the first and second frequency signals while fixing the phase difference and a phase difference control which changes the phase difference while fixing the frequency so that at least one of a plurality of frequency controls or a plurality of phase difference controls are included to increase and decrease the driving speed of the vibration-type motor.
摘要:
An image forming apparatus includes an image carrier that is rotatable; a transfer member that is rotatably disposed so as to face the image carrier, the transfer member transferring an image carried by the image carrier to a sheet; a leading end gripping member that is attached to the transfer member, the leading end gripping member gripping a leading end of the sheet in the transport direction on an outer peripheral surface of the transfer member; a trailing end holding member that holds a trailing end of the sheet in the transport direction between the trailing end holding member and the outer peripheral surface of the transfer member; and a controller that changes a distance between the leading end gripping member and the trailing end holding member when holding the sheet on the basis of a length of the sheet in the transport direction.
摘要:
An image forming apparatus includes: an image carrier; a development unit that develops an electrostatic latent image present on the image carrier with a developer; a transfer member that transfers a developer image developed by the development unit from the image carrier to a recording medium by transporting while nipping the recording medium in a transfer position in contact with the image carrier; a corrective guide member that contacts the recording medium which is simultaneously caught by the transfer member for a period and that corrects placement of the recording medium with respect to the transfer member, thus guiding the recording medium toward the transport position; and a transport unit that transports the recording medium toward the transfer position while exerting a force on the recording medium in a direction causing a side edge of the recording medium along a transport direction to abut the corrective guide member.
摘要:
An image forming apparatus includes: an image forming apparatus main body, an image forming unit that is provided in the image forming apparatus main body and forms an image on a recording medium, and a transport unit transporting the recording medium, wherein the image forming apparatus main body has a forward port for forwarding the recording medium having the image thereon by the image forming unit to outside of the image forming apparatus main body, and further has a guide unit by which the recording medium forwarded to the outside of the image forming apparatus main body is guided to be retrieved into the image forming apparatus main body, and to be led to the transport unit.
摘要:
An image forming apparatus includes: a first unit including at least a development unit that develops an electrostatic latent image and a first developer container containing a developer; an image carrier that holds an electrostatic latent image to be developed by the development unit; a transfer unit that transfers a developer image developed by the development unit onto a recording medium; a fixing device that fixes a developer image transferred to the recording medium by the transfer unit onto a recording medium; and an image forming apparatus main body in which the first unit is installed, the image forming apparatus main body being configured such that a second unit including at least plural second developer containers respectively containing developers of different colors and development units for respective colors is installable instead of the first unit and, when the second unit is installed, a loop transport path is provided to allow the recording medium having the developer image fixed thereon by the fixing device to be transported around the second unit and toward the transfer unit.
摘要:
An image forming apparatus includes: an image carrier that carries an electrostatic latent image; plural developing devices that store respective developers of different colors and visualize the electrostatic latent image with the developers; a developing device switching mechanism that switches among the developing devices to allow one of the developing devices to visualize the electrostatic latent image carried by the image carrier; a transfer unit that transfers a developer image visualized by the one of the developing devices to a recording medium; a fixing device that fixes the developer image transferred by the transfer unit onto the recording medium; a first transporter that transports in a first direction the recording medium with the developer image fixed thereon by the fixing device; a second transporter that transports in a second direction the recording medium with the developer image fixed thereon by the fixing device; and a transporter switching mechanism that switches between the first transporter and the second transporter in conjunction with an operation of the developing device switching mechanism for switching among the developing devices.
摘要:
A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.