Beam space-charge compensation device and ion implantation system having the same
    11.
    发明申请
    Beam space-charge compensation device and ion implantation system having the same 有权
    光束空间电荷补偿装置及其离子注入系统

    公开(公告)号:US20060113491A1

    公开(公告)日:2006-06-01

    申请号:US11150273

    申请日:2005-06-13

    IPC分类号: H01J37/08

    CPC分类号: H01J37/026 H01J37/3171

    摘要: A beam space-charge compensation device is applied to an angular energy filter provided in an ion beam processing system that performs processing by irradiating onto a wafer with an ion beam. The beam space-charge compensation device comprises a plasma shower provided in a beam-guiding chamber of the angular energy filter. The plasma shower comprises an arc chamber having a filament for generating thermo-electrons for plasma. The arc chamber comprises an extraction hole for extracting the thermo-electrons. The plasma shower is arranged such that the extraction hole is located on lines of magnetic force, perpendicular to an ion beam advancing direction, of the magnetic field and that a center axis of the filament and a center axis of said extraction hole coincide with the lines of magnetic force, perpendicular to the ion beam advancing direction, of the magnetic field.

    摘要翻译: 光束空间电荷补偿装置被应用于通过用离子束照射到晶片上进行处理的离子束处理系统中提供的角能量滤波器。 光束空间电荷补偿装置包括设置在角能量滤波器的光束引导室中的等离子体淋浴。 等离子体喷淋器包括具有用于产生等离子体的热电子的灯丝的电弧室。 电弧室包括用于提取热电子的提取孔。 等离子体淋浴器被布置成使得提取孔位于垂直于离子束行进方向的磁力线上,并且该细丝的中心轴线和所述提取孔的中心轴线与线条重合 的磁力,垂直于离子束前进方向的磁场。

    Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device
    12.
    发明申请
    Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device 失效
    移动器装置的方法,移动装置的协同装置,移动装置的协作方法,半导体制造装置,液晶制造装置和机械扫描离子注入装置

    公开(公告)号:US20050188924A1

    公开(公告)日:2005-09-01

    申请号:US11044632

    申请日:2005-01-28

    摘要: A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.

    摘要翻译: 一种控制动子装置的方法,包括:固定基座; 可移动基座,其相对于所述固定基座在直线方向上移动; 处理基座,其相对于可动基座在直线方向上移动,所述线性方向与所述可动基座的线性移动方向平行; 以及设置在所述处理基座和所述可动基座之间并与所述处理基座和所述可动基座协作形成主移动单元的移动力产生单元,包括以下步骤:从所述移动力产生单元产生移动力 相对于可移动基座移动处理基座,从而由于处理基座相对于可移动基座的移动而相对于固定基座移动处理基座; 通过由从移动力产生单元产生的移动力产生的反作用力使处于移动方向的方向与处理基座的移动方向相反的方向移动到固定基座上,以移动处理基座,使得可移动基座移动 在与固定基座上的处理基座的移动方向相反的方向上; 并且控制处理基座相对于固定基座的移动速度。

    Driving device and optical apparatus having the same
    13.
    发明授权
    Driving device and optical apparatus having the same 失效
    驱动装置和具有该驱动装置的光学装置

    公开(公告)号:US5828503A

    公开(公告)日:1998-10-27

    申请号:US557497

    申请日:1995-11-14

    CPC分类号: G02B7/102

    摘要: A driving device includes a forming part for forming one magnetic circuit, a first coil disposed at a first driven member and a second coil disposed at a second driven member. The first and second coils are provided within the one magnetic circuit and arranged to move by being respectively supplied with currents.

    摘要翻译: 驱动装置包括形成一个磁路的形成部件,设置在第一从动部件上的第一线圈和设置在第二从动部件上的第二线圈。 第一和第二线圈设置在一个磁路内并且被布置成通过分别被供应电流而移动。

    Vibration-type motor controller and optical apparatus
    14.
    发明授权
    Vibration-type motor controller and optical apparatus 有权
    振动式电机控制器及光学仪器

    公开(公告)号:US08558488B2

    公开(公告)日:2013-10-15

    申请号:US12880769

    申请日:2010-09-13

    申请人: Junichi Murakami

    发明人: Junichi Murakami

    IPC分类号: H02K33/00

    CPC分类号: H02N2/008 G02B7/04 H02N2/142

    摘要: A vibration-type motor controller controls a driving speed of a vibration-type motor relatively moving a vibrating body in which a vibration is excited by an electromechanical energy conversion element 20 to which a first frequency signal and a second frequency signal having a phase difference are applied, and a contacting body which contacts the vibrating body. The vibration-type motor controller includes a speed controller 1 configured to alternately switch a frequency control which changes frequencies of the first and second frequency signals while fixing the phase difference and a phase difference control which changes the phase difference while fixing the frequency so that at least one of a plurality of frequency controls or a plurality of phase difference controls are included to increase and decrease the driving speed of the vibration-type motor.

    摘要翻译: 振动式电动机控制器控制振动型电动机的驱动速度,其相对移动振动体,其中振动被机电能量转换元件20激励,第一频率信号和具有相位差的第二频率信号 以及与振动体接触的接触体。 振动型电动机控制器包括速度控制器1,其被配置为交替地切换在固定相位差的同时改变第一和第二频率信号的频率的频率控制;以及相位差控制,其在固定频率的同时改变相位差, 包括多个频率控制或多个相位差控制中的至少一个以增加和减少振动型电动机的驱动速度。

    Image forming apparatus and method of image forming
    15.
    发明授权
    Image forming apparatus and method of image forming 有权
    图像形成装置及成像方法

    公开(公告)号:US08457538B2

    公开(公告)日:2013-06-04

    申请号:US12906603

    申请日:2010-10-18

    IPC分类号: G03G15/01

    摘要: An image forming apparatus includes an image carrier that is rotatable; a transfer member that is rotatably disposed so as to face the image carrier, the transfer member transferring an image carried by the image carrier to a sheet; a leading end gripping member that is attached to the transfer member, the leading end gripping member gripping a leading end of the sheet in the transport direction on an outer peripheral surface of the transfer member; a trailing end holding member that holds a trailing end of the sheet in the transport direction between the trailing end holding member and the outer peripheral surface of the transfer member; and a controller that changes a distance between the leading end gripping member and the trailing end holding member when holding the sheet on the basis of a length of the sheet in the transport direction.

    摘要翻译: 图像形成装置包括可旋转的图像载体; 转印构件,其被可旋转地设置成面对图像载体,所述转印构件将由所述图像载体承载的图像转印到片材上; 前端夹持构件,其安装在所述转印构件上,所述前端夹持构件在所述转印构件的外周面上沿所述输送方向夹持所述纸的前端; 后端保持构件,其在所述后端保持构件和所述转印构件的外周面之间沿所述输送方向保持所述片材的后端; 以及控制器,当基于输送方向上的片材的长度来保持片材时,改变前端夹持构件和后端保持构件之间的距离。

    Image forming apparatus including transport unit
    16.
    发明授权
    Image forming apparatus including transport unit 有权
    图像形成装置包括传送单元

    公开(公告)号:US08213847B2

    公开(公告)日:2012-07-03

    申请号:US12538988

    申请日:2009-08-11

    IPC分类号: G03G15/16

    摘要: An image forming apparatus includes: an image carrier; a development unit that develops an electrostatic latent image present on the image carrier with a developer; a transfer member that transfers a developer image developed by the development unit from the image carrier to a recording medium by transporting while nipping the recording medium in a transfer position in contact with the image carrier; a corrective guide member that contacts the recording medium which is simultaneously caught by the transfer member for a period and that corrects placement of the recording medium with respect to the transfer member, thus guiding the recording medium toward the transport position; and a transport unit that transports the recording medium toward the transfer position while exerting a force on the recording medium in a direction causing a side edge of the recording medium along a transport direction to abut the corrective guide member.

    摘要翻译: 图像形成装置包括:图像载体; 显影单元,其利用显影剂显影存在于图像载体上的静电潜像; 传送构件,其将由显影单元显影的显影剂图像从图像载体传送到记录介质,通过在将记录介质夹在与图像载体接触的转印位置的同时传送; 校正引导构件,其与记录介质接触,同时被传送构件捕获一段时间,并且校正记录介质相对于传送构件的放置,从而将记录介质导向传送位置; 以及传送单元,其将记录介质朝向传送位置传送,同时沿着传送方向沿记录介质的侧边缘沿着记录介质施加力抵靠校正引导构件。

    IMAGE FORMING APPARATUS
    17.
    发明申请
    IMAGE FORMING APPARATUS 有权
    图像形成装置

    公开(公告)号:US20100247197A1

    公开(公告)日:2010-09-30

    申请号:US12567976

    申请日:2009-09-28

    IPC分类号: G03G15/00

    摘要: An image forming apparatus includes: an image forming apparatus main body, an image forming unit that is provided in the image forming apparatus main body and forms an image on a recording medium, and a transport unit transporting the recording medium, wherein the image forming apparatus main body has a forward port for forwarding the recording medium having the image thereon by the image forming unit to outside of the image forming apparatus main body, and further has a guide unit by which the recording medium forwarded to the outside of the image forming apparatus main body is guided to be retrieved into the image forming apparatus main body, and to be led to the transport unit.

    摘要翻译: 一种成像设备包括:图像形成设备主体,设置在图像形成设备主体中并在记录介质上形成图像的图像形成单元和传送记录介质的传送单元,其中图像形成设备 主体具有用于将具有图像的记录介质由图像形成单元转发到图像形成装置主体外部的前进端口,并且还具有引导单元,通过该引导单元将记录介质转发到图像形成装置的外部 主体被引导回到图像形成装置主体中,并被引导到传送单元。

    IMAGE FORMING APPARATUS
    18.
    发明申请
    IMAGE FORMING APPARATUS 有权
    图像形成装置

    公开(公告)号:US20100209135A1

    公开(公告)日:2010-08-19

    申请号:US12510308

    申请日:2009-07-28

    IPC分类号: G03G15/00

    摘要: An image forming apparatus includes: a first unit including at least a development unit that develops an electrostatic latent image and a first developer container containing a developer; an image carrier that holds an electrostatic latent image to be developed by the development unit; a transfer unit that transfers a developer image developed by the development unit onto a recording medium; a fixing device that fixes a developer image transferred to the recording medium by the transfer unit onto a recording medium; and an image forming apparatus main body in which the first unit is installed, the image forming apparatus main body being configured such that a second unit including at least plural second developer containers respectively containing developers of different colors and development units for respective colors is installable instead of the first unit and, when the second unit is installed, a loop transport path is provided to allow the recording medium having the developer image fixed thereon by the fixing device to be transported around the second unit and toward the transfer unit.

    摘要翻译: 图像形成装置包括:第一单元,至少包括显影静电潜像的显影单元和包含显影剂的第一显影剂容器; 保持由显影单元显影的静电潜像的图像载体; 传送单元,其将由显影单元显影的显影剂图像转印到记录介质上; 固定装置,其将通过所述转印单元传送到所述记录介质的显影剂图像固定到记录介质上; 以及图像形成装置主体,其中安装有第一单元,图像形成装置主体被构造成使得包括分别包含不同颜色的显影剂的至少多个第二显影剂容器和用于各种颜色的显影单元的第二单元可以安装 并且当安装第二单元时,提供环路传送路径,以允许具有通过定影装置固定在其上的显影剂图像的记录介质被传送到第二单元周围并朝向传送单元传送。

    IMAGE FORMING APPARATUS
    19.
    发明申请
    IMAGE FORMING APPARATUS 有权
    图像形成装置

    公开(公告)号:US20100183339A1

    公开(公告)日:2010-07-22

    申请号:US12506500

    申请日:2009-07-21

    IPC分类号: G03G15/01

    摘要: An image forming apparatus includes: an image carrier that carries an electrostatic latent image; plural developing devices that store respective developers of different colors and visualize the electrostatic latent image with the developers; a developing device switching mechanism that switches among the developing devices to allow one of the developing devices to visualize the electrostatic latent image carried by the image carrier; a transfer unit that transfers a developer image visualized by the one of the developing devices to a recording medium; a fixing device that fixes the developer image transferred by the transfer unit onto the recording medium; a first transporter that transports in a first direction the recording medium with the developer image fixed thereon by the fixing device; a second transporter that transports in a second direction the recording medium with the developer image fixed thereon by the fixing device; and a transporter switching mechanism that switches between the first transporter and the second transporter in conjunction with an operation of the developing device switching mechanism for switching among the developing devices.

    摘要翻译: 图像形成装置包括:承载静电潜像的图像载体; 多个显影装置,其存储不同颜色的各个显影剂并且与显影剂可视化静电潜像; 显影装置切换机构,其在所述显影装置之间切换以允许所述显影装置中的一个显影所述图像载体携带的静电潜像; 传送单元,其将由所述显影设备中的一个显像的显影剂图像传送到记录介质; 固定装置,其将由所述转印单元传送的显影剂图像固定到所述记录介质上; 第一传送器,其通过所述定影装置在所述第一方向上传送所述显影剂图像的所述记录介质; 第二传送器,其在第二方向上传送具有通过定影装置固定在其上的显影剂图像的记录介质; 以及结合显影装置切换机构在显影装置之间切换的操作,在第一运送器和第二运送器之间切换的运送器切换机构。