Smart susceptor radiant heater
    18.
    发明授权

    公开(公告)号:US09635715B1

    公开(公告)日:2017-04-25

    申请号:US13889657

    申请日:2013-05-08

    CPC classification number: H05B6/105 H05B2206/023

    Abstract: A radiant heater having a ferromagnetic element includes a high emissivity surface and an induction coil operatively coupled with the ferromagnetic element. The induction coil may be energized to create eddy currents heating the ferromagnetic element until the element reaches its Curie temperature. At the Curie temperature the ferromagnetic element becomes substantially nonmagnetic and the temperature of the element remains relatively constant. The high emissivity surface of the heater provides a substantially uniform radiant heat to an object in close proximity to the high emissivity surface. The object may be thermally coupled with the high emissivity surface of the radiant heater. The radiant heater having a high emissivity surface may be used to heat temperature sensitive objects such as thin films. Multiple radiant heaters having different Curie temperatures may be used to ramp up a temperature, ramp down a temperature, or provide different temperatures required during a process.

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