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    SOLENOID VALVE
    11.
    发明申请
    SOLENOID VALVE 有权
    电磁阀

    公开(公告)号：US20110121217A1

    公开(公告)日：2011-05-26

    申请号：US12935119

    申请日：2009-03-26

    申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Tsuyoshi Tanigawa ,  Michio Yamaji ,  Nobukazu Ikeda ,  Ryousuke Dohi

    发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Tsuyoshi Tanigawa ,  Michio Yamaji ,  Nobukazu Ikeda ,  Ryousuke Dohi

    IPC分类号： F16K31/02

    CPC分类号： F16K31/0658 ,  F16K31/0675 ,  H01F7/1816 ,  H01F2007/1822

    摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.

    摘要翻译： 提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。 提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。 双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

    Gas supply system equipped with pressure-type flow rate control unit
    13.
    发明授权
    Gas supply system equipped with pressure-type flow rate control unit 有权
    供气系统配有压力式流量控制单元

    公开(公告)号：US06289923B1

    公开(公告)日：2001-09-18

    申请号：US09463514

    申请日：2000-06-02

    申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Eiji Ideta ,  Ryousuke Dohi ,  Tomio Uno ,  Michio Yamaji

    发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Eiji Ideta ,  Ryousuke Dohi ,  Tomio Uno ,  Michio Yamaji

    IPC分类号： G05D706

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, and to raise the flow rate control accuracy and reliability of facilities. That eliminates non-uniformity of products or semiconductors and raises the production efficiency. The gas supply system equipped with a pressure-type flow rate control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream side pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc=KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.

    摘要翻译： 公开了一种改进的，尺寸较小的低成本的气体供应系统，其配备有例如半导体制造设备中使用的压力式流量控制单元。 提高瞬态流量特性，防止气体开始时气体过冲，提高设备的流量控制精度和可靠性。 这消除了产品或半导体的不均匀性并提高了生产效率。 配置有压力式流量控制单元的气体供给系统被配置为使得在孔口的上游侧的压力保持为比下游侧压力高大约两倍或更多的气体，气体流量被控制以供应气体 通过孔口相关阀进行气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置在控制阀之间的压力检测器 所述控制阀和所述节流孔相关阀，设置在所述节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中，基于由所述压力检测器检测到的压力P1，流量Qc 用公式Qc = KP1（K：常数）计算，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制信号Qy i n是用于控制阀的驱动器，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

    Fluid control valve and fluid supply/exhaust system
    14.
    发明授权
    Fluid control valve and fluid supply/exhaust system 有权
    流体控制阀和流体供应/排气系统

    公开(公告)号：US06394415B1

    公开(公告)日：2002-05-28

    申请号：US09627784

    申请日：2000-07-27

    申请人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

    发明人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

    IPC分类号： F16K3102

    CPC分类号： F16K31/082 ,  F16K7/14 ,  F16K31/0655 ,  F16K31/0672 ,  Y10T137/8242

    摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

    摘要翻译： 可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成，并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

    Fluid control valve and fluid supply/exhaust system
    15.
    发明授权
    Fluid control valve and fluid supply/exhaust system 有权
    流体控制阀和流体供应/排气系统

    公开(公告)号：US06193212B1

    公开(公告)日：2001-02-27

    申请号：US09308922

    申请日：1999-07-23

    申请人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

    发明人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

    IPC分类号： F16K3102

    CPC分类号： F16K31/082 ,  F16K7/14 ,  F16K31/0655 ,  F16K31/0672 ,  Y10T137/8242

    摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

    摘要翻译： 可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成，并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

    Vacuum thermal insulating valve
    16.
    发明授权
    Vacuum thermal insulating valve 失效
    真空保温阀

    公开(公告)号：US07673649B2

    公开(公告)日：2010-03-09

    申请号：US10597303

    申请日：2005-01-13

    申请人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

    发明人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

    IPC分类号： B65D81/20

    CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

    摘要： The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

    摘要翻译： 本发明提供一种真空绝热阀，其可以在气体供给系统或排气系统中在高温下使用，并且由于其绝热性能优异，也可以制成大小小型的真空绝热阀。 使用包括阀体和致动器的阀的真空隔热阀和容纳阀的真空保温箱，上述真空保温箱S由方形的下部真空夹套S5形成， 圆筒形真空绝热管接收部分J的侧面并且其上表面打开，方形的上部真空夹套S4气密地装配到下部真空套筒S5上并且其下表面打开。

    VACUUM THERMAL INSULATING VALVE
    20.
    发明申请
    VACUUM THERMAL INSULATING VALVE 失效
    真空绝热阀

    公开(公告)号：US20090032115A1

    公开(公告)日：2009-02-05

    申请号：US10597303

    申请日：2005-01-13

    申请人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

    发明人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

    IPC分类号： F16K51/02 ,  F16K27/00

    CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

    摘要： The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

    摘要翻译： 本发明提供一种真空绝热阀，其可以在气体供给系统或排气系统中在高温下使用，并且由于其绝热性能优异，也可以制成大小小型的真空绝热阀。 使用包括阀体和致动器的阀的真空隔热阀和容纳阀的真空保温箱，上述真空保温箱S由方形的下部真空夹套S5形成， 圆筒形真空绝热管接收部分J的侧面并且其上表面打开，方形的上部真空夹套S4气密地装配到下部真空套筒S5上并且其下表面打开。