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11.发明申请公开(公告)号：US20090169766A1
公开(公告)日：2009-07-02
申请号：US12225416
申请日：2007-03-28
CPC分类号： C23C14/32 , C23C14/0031 , C23C14/0042 , C23C14/221 , C23C14/54 , C23C14/564 , C23C16/30 , G02B1/11 , H01J27/02 , H01J37/08 , H01J37/302 , H01J37/317 , H01J37/3178 , H01J2237/006 , H01J2237/022
摘要： An ion gun system includes an ion gun for irradiating an ion beam; an electric power supply unit for supplying electric power to the ion gun; two mass flow regulators for introducing each of two types of gas in the ion gun; a control unit connected to the electric power supply unit for working as ion gun control means for controlling electric power supplied to the ion gun from the electric power supply unit; and a control unit connected to the mass flow regulators for working as mass flow control means for controlling the flow rate of gas introduced from the mass flow regulators in the ion gun. The control unit as mass flow control means is provided with a function of changing the set value for the flow rate of each of the two types of gas to another set value by changing it stepwise within a range where the ion gun is working stably. Accordingly, shortening of film formation time can be attained.
摘要翻译： 离子枪系统包括用于照射离子束的离子枪; 用于向离子枪提供电力的电力供应单元; 两个质量流量调节器，用于将两种类型的气体引入离子枪中; 连接到电力供应单元的控制单元，用于作为离子枪控制装置工作，用于控制从电力供应单元提供给离子枪的电力; 以及控制单元，连接到质量流量调节器，用作质量流量控制装置，用于控制从离子枪中的质量流量调节器引入的气体的流量。 作为质量流量控制装置的控制单元具有通过在离子枪稳定工作的范围内逐步变化而将两种气体中的每一种的流量的设定值变更为另一设定值的功能。 因此，可以缩短成膜时间。
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公开(公告)号：US06481369B1
公开(公告)日：2002-11-19
申请号：US09686763
申请日：2000-10-12
申请人： Yukihiro Takahashi , Kenichi Shinde
发明人： Yukihiro Takahashi , Kenichi Shinde
IPC分类号： C23C1600
CPC分类号： C23C14/547
摘要： To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility. Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3. The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing device.
摘要翻译： 提供能够以高再现性自动形成具有恒定光学特性的薄膜的薄膜形成方法和装置。 通过使用电子枪3蒸发蒸发材料4，将防反射膜沉积在通过涂覆圆顶2保持的透镜2a上。施加到电子枪3的功率被控制为使得透射或反射光量值 通过光学薄膜厚度计10在每个时间点测量变得等于或近似等于存储在标准光量值数据存储装置中的标准光量值。
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公开(公告)号：US08293330B2
公开(公告)日：2012-10-23
申请号：US12086826
申请日：2006-12-22
IPC分类号： B05D3/00
CPC分类号： B29D11/00865 , B05B13/0228 , B05B16/20 , B05D1/002
摘要： While one side of a lens L is held by a suction-holding member 17 and the suction-holding member 17 is moved by the moving mechanism, a coating process, a drying process, and a curing process are sequentially performed in respective receptacles disposed independently of each other. A suction force applied to the lens L by the suction-holding member 17 is controlled by a control section 22 in accordance with each of the receptacles in which the suction-holding member 17 is positioned.
摘要翻译： 当透镜L的一侧由吸持保持构件17保持并且吸持保持构件17被移动机构移动时，在独立设置的各个容器中顺序地进行涂布处理，干燥处理和固化处理 的对方 通过吸引保持部件17施加到透镜L的吸引力根据吸引保持部件17所定位的各容器的控制部22进行控制。
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公开(公告)号：US20090029061A1
公开(公告)日：2009-01-29
申请号：US12086826
申请日：2006-12-22
CPC分类号： B29D11/00865 , B05B13/0228 , B05B16/20 , B05D1/002
摘要： While one side of a lens L is held by a suction-holding member 17 and the suction-holding member 17 is moved by the moving mechanism, a coating process, a drying process, and a curing process are sequentially performed in respective receptacles disposed independently of each other. A suction force applied to the lens L by the suction-holding member 17 is controlled by a control section 22 in accordance with each of the receptacles in which the suction-holding member 17 is positioned.
摘要翻译： 当透镜L的一侧由吸持保持构件17保持并且吸持保持构件17被移动机构移动时，在独立设置的各个容器中顺序地进行涂布处理，干燥处理和固化处理 的对方 通过吸引保持部件17施加到透镜L的吸引力根据吸引保持部件17所定位的各容器的控制部22进行控制。
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公开(公告)号：US08971164B2
公开(公告)日：2015-03-03
申请号：US13595159
申请日：2012-08-27
申请人： Kenichi Shinde , Akira Komori , Kazuya Arakawa
发明人： Kenichi Shinde , Akira Komori , Kazuya Arakawa
IPC分类号： G11B7/1372 , G11B7/1392
CPC分类号： G02B1/115 , G11B7/1372 , G11B7/13922
摘要： An optical component for an optical pick-up for converging a laser beam having a particular wavelength onto a recording layer of an optical disc. The optical component comprises a base material formed of a resin composition, an undercoating which is formed of three layers of thin films having a same main constituent and is formed on a top surface of the base material, and a functional thin film formed on a top surface of the undercoating. In this configuration, each of a first layer and a third layer of the undercoating is a thin film formed without introducing oxygen, and a second layer is a thin film formed while introducing oxygen. A film thickness of the undercoating falls within a range of 160 nm to 270 nm, and film thicknesses of the thin films constituting the undercoating are substantially equal to each other.
摘要翻译： 一种用于将具有特定波长的激光束会聚在光盘的记录层上的用于光学拾取器的光学部件。 光学部件包括由树脂组合物形成的基材，底涂层，其由具有相同主要成分的三层薄膜形成，并形成在基材的顶表面上，以及形成在顶部的功能性薄膜 表面的底漆。 在该结构中，底涂层的第一层和第三层中的每一层都是不引入氧而形成的薄膜，第二层是在引入氧的同时形成的薄膜。 底涂层的膜厚在160nm〜270nm的范围内，构成底涂层的薄膜的膜厚基本相等。
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公开(公告)号：US06656518B2
公开(公告)日：2003-12-02
申请号：US10259635
申请日：2002-09-30
申请人： Yukihiro Takahashi , Kenichi Shinde
发明人： Yukihiro Takahashi , Kenichi Shinde
IPC分类号： B05D100
CPC分类号： C23C14/547
摘要： To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3 The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing means
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17.发明授权公开(公告)号：US09074283B2
公开(公告)日：2015-07-07
申请号：US12225416
申请日：2007-03-28
IPC分类号： C23C14/54 , C23C14/22 , C23C14/32 , C23C14/06 , C23C16/02 , H01J27/02 , G02B1/11 , C23C14/56 , C23C14/00 , C23C16/30 , H01J37/302 , H01J37/08 , H01J37/317
CPC分类号： C23C14/32 , C23C14/0031 , C23C14/0042 , C23C14/221 , C23C14/54 , C23C14/564 , C23C16/30 , G02B1/11 , H01J27/02 , H01J37/08 , H01J37/302 , H01J37/317 , H01J37/3178 , H01J2237/006 , H01J2237/022
摘要： An ion gun system includes an ion gun for irradiating an ion beam; an electric power supply unit for supplying electric power to the ion gun; two mass flow regulators for introducing each of two types of gas in the ion gun; a control unit connected to the electric power supply unit for working as ion gun control means for controlling electric power supplied to the ion gun from the electric power supply unit; and a control unit connected to the mass flow regulators for working as mass flow control means for controlling the flow rate of gas introduced from the mass flow regulators in the ion gun. The control unit as mass flow control means is provided with a function of changing the set value for the flow rate of each of the two types of gas to another set value by changing it stepwise within a range where the ion gun is working stably. Accordingly, shortening of film formation time can be attained.
摘要翻译： 离子枪系统包括用于照射离子束的离子枪; 用于向离子枪提供电力的电力供应单元; 两个质量流量调节器，用于将两种类型的气体引入离子枪中; 连接到电力供应单元的控制单元，用于作为离子枪控制装置工作，用于控制从电力供应单元供应给离子枪的电力; 以及控制单元，连接到质量流量调节器，用作质量流量控制装置，用于控制从离子枪中的质量流量调节器引入的气体的流量。 作为质量流量控制装置的控制单元具有通过在离子枪稳定工作的范围内逐步变化而将两种气体中的每一种的流量的设定值变更为另一设定值的功能。 因此，可以缩短成膜时间。
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