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1.发明申请公开(公告)号：US20090169766A1
公开(公告)日：2009-07-02
申请号：US12225416
申请日：2007-03-28
CPC分类号： C23C14/32 , C23C14/0031 , C23C14/0042 , C23C14/221 , C23C14/54 , C23C14/564 , C23C16/30 , G02B1/11 , H01J27/02 , H01J37/08 , H01J37/302 , H01J37/317 , H01J37/3178 , H01J2237/006 , H01J2237/022
摘要： An ion gun system includes an ion gun for irradiating an ion beam; an electric power supply unit for supplying electric power to the ion gun; two mass flow regulators for introducing each of two types of gas in the ion gun; a control unit connected to the electric power supply unit for working as ion gun control means for controlling electric power supplied to the ion gun from the electric power supply unit; and a control unit connected to the mass flow regulators for working as mass flow control means for controlling the flow rate of gas introduced from the mass flow regulators in the ion gun. The control unit as mass flow control means is provided with a function of changing the set value for the flow rate of each of the two types of gas to another set value by changing it stepwise within a range where the ion gun is working stably. Accordingly, shortening of film formation time can be attained.
摘要翻译： 离子枪系统包括用于照射离子束的离子枪; 用于向离子枪提供电力的电力供应单元; 两个质量流量调节器，用于将两种类型的气体引入离子枪中; 连接到电力供应单元的控制单元，用于作为离子枪控制装置工作，用于控制从电力供应单元提供给离子枪的电力; 以及控制单元，连接到质量流量调节器，用作质量流量控制装置，用于控制从离子枪中的质量流量调节器引入的气体的流量。 作为质量流量控制装置的控制单元具有通过在离子枪稳定工作的范围内逐步变化而将两种气体中的每一种的流量的设定值变更为另一设定值的功能。 因此，可以缩短成膜时间。
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公开(公告)号：US06693747B2
公开(公告)日：2004-02-17
申请号：US10370091
申请日：2003-02-21
申请人： Takeshi Mitsuishi , Kenichi Shinde
发明人： Takeshi Mitsuishi , Kenichi Shinde
IPC分类号： G02B110
CPC分类号： G02B1/115
摘要： An optical element having a plastic substrate and an antireflection film provided on the plastic substrate, characterized in that the optical element has a basic layer comprising Nb between the plastic substrate and the antireflection film. The optical element has high adhesiveness between the plastic substrate and the antireflection film and is characterized by excellent resistance to heat, impact, alkali, and abrasion.
摘要翻译： 一种光学元件，其具有设置在塑料基板上的塑料基板和抗反射膜，其特征在于，所述光学元件在所述塑料基板与所述防反射膜之间具有包含Nb的基本层。 光学元件在塑料基板和抗反射膜之间具有高粘合性，其特征在于耐热，耐冲击，耐碱和耐磨性优异。
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公开(公告)号：US06481369B1
公开(公告)日：2002-11-19
申请号：US09686763
申请日：2000-10-12
申请人： Yukihiro Takahashi , Kenichi Shinde
发明人： Yukihiro Takahashi , Kenichi Shinde
IPC分类号： C23C1600
CPC分类号： C23C14/547
摘要： To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility. Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3. The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing device.
摘要翻译： 提供能够以高再现性自动形成具有恒定光学特性的薄膜的薄膜形成方法和装置。 通过使用电子枪3蒸发蒸发材料4，将防反射膜沉积在通过涂覆圆顶2保持的透镜2a上。施加到电子枪3的功率被控制为使得透射或反射光量值 通过光学薄膜厚度计10在每个时间点测量变得等于或近似等于存储在标准光量值数据存储装置中的标准光量值。
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4.发明授权公开(公告)号：US09074283B2
公开(公告)日：2015-07-07
申请号：US12225416
申请日：2007-03-28
IPC分类号： C23C14/54 , C23C14/22 , C23C14/32 , C23C14/06 , C23C16/02 , H01J27/02 , G02B1/11 , C23C14/56 , C23C14/00 , C23C16/30 , H01J37/302 , H01J37/08 , H01J37/317
CPC分类号： C23C14/32 , C23C14/0031 , C23C14/0042 , C23C14/221 , C23C14/54 , C23C14/564 , C23C16/30 , G02B1/11 , H01J27/02 , H01J37/08 , H01J37/302 , H01J37/317 , H01J37/3178 , H01J2237/006 , H01J2237/022
摘要： An ion gun system includes an ion gun for irradiating an ion beam; an electric power supply unit for supplying electric power to the ion gun; two mass flow regulators for introducing each of two types of gas in the ion gun; a control unit connected to the electric power supply unit for working as ion gun control means for controlling electric power supplied to the ion gun from the electric power supply unit; and a control unit connected to the mass flow regulators for working as mass flow control means for controlling the flow rate of gas introduced from the mass flow regulators in the ion gun. The control unit as mass flow control means is provided with a function of changing the set value for the flow rate of each of the two types of gas to another set value by changing it stepwise within a range where the ion gun is working stably. Accordingly, shortening of film formation time can be attained.
摘要翻译： 离子枪系统包括用于照射离子束的离子枪; 用于向离子枪提供电力的电力供应单元; 两个质量流量调节器，用于将两种类型的气体引入离子枪中; 连接到电力供应单元的控制单元，用于作为离子枪控制装置工作，用于控制从电力供应单元供应给离子枪的电力; 以及控制单元，连接到质量流量调节器，用作质量流量控制装置，用于控制从离子枪中的质量流量调节器引入的气体的流量。 作为质量流量控制装置的控制单元具有通过在离子枪稳定工作的范围内逐步变化而将两种气体中的每一种的流量的设定值变更为另一设定值的功能。 因此，可以缩短成膜时间。
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5.发明申请Hybrid film, antireflection film comprising it, optical product, and method for restoring the defogging property of hybrid film 失效混合膜，包含它的抗反射膜，光学产品和用于恢复混合膜的除雾性能的方法公开(公告)号：US20050221079A1
公开(公告)日：2005-10-06
申请号：US10981749
申请日：2004-11-05
IPC分类号： C08G65/329 , C08J7/04 , C08K3/20 , C08K3/36 , C09D171/02 , C23C14/06 , G02B1/11 , B32B27/36 , B32B15/00
CPC分类号： C08J7/047 , C08G65/329 , C08J2471/00 , C08K3/20 , C08K3/36 , C09D171/02 , C23C14/06 , G02B1/111 , Y10T428/26 , Y10T428/31507 , Y10T428/31663
摘要： Hybrid films, such as those having good abrasion-resistance and defogging properties, antireflection films including it, optical products, and methods for restoring the defogging property of the hybrid films are disclosed. The hybrid films having a defogging property may be obtained through vapor deposition of an organic compound having a hydrophilic group and a reactive group along with silicon dioxide or with silicon dioxide and aluminum oxide. The antireflection film may be formed on a substrate having the hybrid film as the outermost layer opposite to the substrate. The optical product may comprise a plastic substrate and the antireflection film having the hybrid film. A method for restoring the defogging property of the hybrid film of the optical product may include washing the hybrid film.
摘要翻译： 公开了具有良好耐磨性和除雾性的混合膜，包括它的防反射膜，光学产品和用于恢复混合膜的除雾性能的方法。 具有除雾性的混合膜可以通过具有亲水基团和反应性基团的有机化合物以及二氧化硅或二氧化硅和氧化铝气相沉积来获得。 抗反射膜可以形成在具有混合膜作为与基板相对的最外层的基板上。 光学产品可以包括塑料基板和具有混合膜的抗反射膜。 用于恢复光学产品的混合膜的除雾性能的方法可以包括洗涤混合膜。
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公开(公告)号：US06919134B2
公开(公告)日：2005-07-19
申请号：US10279931
申请日：2002-10-25
CPC分类号： G02B1/111 , Y10T428/161 , Y10T428/31663
摘要： The present invention is directed to an optical element having an antireflection film formed on a plastic substrate, wherein the reflectance of the antireflection film is low while the transmittance thereof is high. The impact resistance, the adhesiveness, the heat resistance, the abrasion resistance and the alkali resistance of the antireflection film on the plastic substrate are superior.The optical element having an antireflection film has at least one layer of the antireflection film that is a hybrid layer made of an inorganic substance and an organic substance.
摘要翻译： 本发明涉及一种具有形成在塑料基板上的抗反射膜的光学元件，其中抗反射膜的反射率低，而其透射率高。 塑料基板上的抗反射膜的耐冲击性，粘合性，耐热性，耐磨性和耐碱性优异。 具有抗反射膜的光学元件具有作为由无机物质和有机物质构成的混合层的至少一层的防反射膜。
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公开(公告)号：US06627320B2
公开(公告)日：2003-09-30
申请号：US09995827
申请日：2001-11-29
申请人： Takeshi Mitsuishi , Hitoshi Kamura , Kenichi Shinde , Hiroki Takei , Akinori Kobayashi , Yukihiro Takahashi , Yuko Watanabe
发明人： Takeshi Mitsuishi , Hitoshi Kamura , Kenichi Shinde , Hiroki Takei , Akinori Kobayashi , Yukihiro Takahashi , Yuko Watanabe
IPC分类号： B32B904
CPC分类号： G02B1/11 , C03C17/2456 , C03C2217/212 , C03C2217/218 , C03C2217/23 , C03C2218/152 , C23C14/083
摘要： A method for producing a composition for vapor deposition comprising sintering a vapor source mixture prepared by mixing vapor sources that contain titanium dioxide and niobium pentoxide. The method is capable of forming a high-refraction layer even in low-temperature vapor deposition on a substrate. An antireflection film is formed having good scratch resistance, good chemical resistance and good heat resistance, of which the heat resistance decreases little with time, that is useful in a variety of optical elements.
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公开(公告)号：US08293330B2
公开(公告)日：2012-10-23
申请号：US12086826
申请日：2006-12-22
IPC分类号： B05D3/00
CPC分类号： B29D11/00865 , B05B13/0228 , B05B16/20 , B05D1/002
摘要： While one side of a lens L is held by a suction-holding member 17 and the suction-holding member 17 is moved by the moving mechanism, a coating process, a drying process, and a curing process are sequentially performed in respective receptacles disposed independently of each other. A suction force applied to the lens L by the suction-holding member 17 is controlled by a control section 22 in accordance with each of the receptacles in which the suction-holding member 17 is positioned.
摘要翻译： 当透镜L的一侧由吸持保持构件17保持并且吸持保持构件17被移动机构移动时，在独立设置的各个容器中顺序地进行涂布处理，干燥处理和固化处理 的对方 通过吸引保持部件17施加到透镜L的吸引力根据吸引保持部件17所定位的各容器的控制部22进行控制。
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公开(公告)号：US20090029061A1
公开(公告)日：2009-01-29
申请号：US12086826
申请日：2006-12-22
CPC分类号： B29D11/00865 , B05B13/0228 , B05B16/20 , B05D1/002
摘要： While one side of a lens L is held by a suction-holding member 17 and the suction-holding member 17 is moved by the moving mechanism, a coating process, a drying process, and a curing process are sequentially performed in respective receptacles disposed independently of each other. A suction force applied to the lens L by the suction-holding member 17 is controlled by a control section 22 in accordance with each of the receptacles in which the suction-holding member 17 is positioned.
摘要翻译： 当透镜L的一侧由吸持保持构件17保持并且吸持保持构件17被移动机构移动时，在独立设置的各个容器中顺序地进行涂布处理，干燥处理和固化处理 的对方 通过吸引保持部件17施加到透镜L的吸引力根据吸引保持部件17所定位的各容器的控制部22进行控制。
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10.发明授权公开(公告)号：US07106515B2
公开(公告)日：2006-09-12
申请号：US09986907
申请日：2001-11-13
申请人： Takeshi Mitsuishi , Hitoshi Kamura , Kenichi Shinde , Hiroki Takei , Akinori Kobayashi , Yukihiro Takahashi , Yuko Watanabe
发明人： Takeshi Mitsuishi , Hitoshi Kamura , Kenichi Shinde , Hiroki Takei , Akinori Kobayashi , Yukihiro Takahashi , Yuko Watanabe
IPC分类号： G01B1/10
CPC分类号： G02B1/115 , C23C14/08 , C23C14/083
摘要： A method for producing an optical element having a multi-layered antireflection film formed on a synthetic resin substrate, in which the antireflection film formed has good heat resistance, and its heat resistance lowers little with time. At least one high-refraction layer of the multi-layered anti-reflection film contains niobium oxide, zirconium oxide, yttrium oxide, and optionally aluminum oxide. High-refraction layers can be formed within a shorter period of time while not detracting from the good physical properties intrinsic to the layers.
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