公开(公告)号：US06466303B1

公开(公告)日：2002-10-15

申请号：US09330442

申请日：1999-06-11

Applicant: Yasuhiro Omura ,  Toshihiko Ozawa ,  Takashi Mori ,  Hideki Komatsuda

Inventor： Yasuhiro Omura ,  Toshihiko Ozawa ,  Takashi Mori ,  Hideki Komatsuda

IPC: G03B2754

CPC classification number: G02B17/0892 ,  G02B13/143 ,  G02B17/08 ,  G03F7/70108 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70566

Abstract: A projection exposure apparatus (10) for forming an image of a pattern present on a first object such as a reticle (R) onto a second object, such as a wafer (W). The apparatus comprises along three optical axes (AZ1, AX, AZ2), an illumination optical system capable of illuminating the reticle with partially polarized light, and a catadioptric projection optical system (40-70) arranged adjacent the reticle and opposite the illumination optical system. The catadioptric projection optical system comprises one or more substantially spherical mirrors (48), a plurality of refractive members (42, 48, 72, 74), and one or more plane mirrors (60, 66). The plane mirrors are designed and arranged so as to allow a substantially unpolarized image of the reticle pattern, which is illuminated with partially polarized light, to be formed on the wafer.

Abstract translation: 一种投影曝光装置（10），用于将存在于诸如光罩（R）的第一物体上的图案的图像形成在诸如晶片（W）的第二物体上。 该装置包括沿着三个光轴（AZ1，AX，AZ2），能够以部分偏振光照射掩模版的照明光学系统，以及布置在掩模版附近并与照明光学系统相对的反射折射投射光学系统（40-70） 。 反折射投影光学系统包括一个或多个基本上为球面的反射镜（48），多个折射构件（42,48,72,74）和一个或多个平面镜（60,66）。 平面镜被设计和布置为允许在晶片上形成用部分偏振光照射的标线图案的基本非偏振图像。

公开(公告)号：US07061671B2

公开(公告)日：2006-06-13

申请号：US10921138

申请日：2004-08-19

Applicant: Toshihiko Ozawa

Inventor： Toshihiko Ozawa

IPC: G02B9/00 ,  G02B5/30

CPC classification number: G03F7/70591 ,  G02B7/36 ,  G02B27/0012 ,  G02B27/0043 ,  G03F7/706 ,  G03F7/70966

Abstract: The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of image formation performance of an optical system obtained is a pupil transmittance distribution (a distribution of light transmittance on an exit pupil surface) of a light beam that enters an image point to be evaluated of the optical system. At least one of a rotational symmetrical component, an odd symmetrical component, and an even symmetrical component is extracted from the obtained pupil transmittance distribution as an evaluation index.

Abstract translation: 本发明实现了涂层的影响被精确地反映的图像形成性能的评价。 根据本发明，对于所获得的光学系统的图像形成性能的评价是进入要被评估的图像点的光束的光瞳透射率分布（出射光瞳表面上的透光率的分布） 系统。 从获得的瞳孔透射率分布中提取旋转对称分量，奇对称分量和均匀对称分量中的至少一个作为评价指标。

公开(公告)号：US06831731B2

公开(公告)日：2004-12-14

申请号：US10183612

申请日：2002-06-28

Applicant: Yasuhiro Omura ,  Naomasa Shiraishi ,  Issey Tanaka ,  Soichi Owa ,  Toshihiko Ozawa ,  Shunsuke Niisaka

Inventor： Yasuhiro Omura ,  Naomasa Shiraishi ,  Issey Tanaka ,  Soichi Owa ,  Toshihiko Ozawa ,  Shunsuke Niisaka

IPC: G03B2754

CPC classification number: G02B17/0892 ,  G02B13/24 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70233 ,  G03F7/70358 ,  G03F7/70566 ,  G03F7/70966

Abstract: A projection optical system, which forms a reduced image of a first surface onto a second surface, has excellent optical performance without substantially being affected by birefringence despite the use of optical material having intrinsic birefringence. This is done by suitably arranging certain crystal axes of radiation transmissive members that make up the projection optical system relative to the optical axis of the projection optical system, and by suitably arranging the certain crystal axes of the radiation transmissive members relative to the crystal axes of other radiation transmissive members in the projection optical system.

Abstract translation: 将第一表面的缩小图像形成到第二表面上的投影光学系统虽然使用具有固有双折射的光学材料，但是基本上不受双折射的影响，具有优异的光学性能。 这通过适当地布置构成投影光学系统的相对于投影光学系统的光轴的辐射透射构件的某些晶轴，并且通过将辐射透射构件的某些晶轴相对于晶体轴适当地布置 投影光学系统中的其他辐射透射构件。

公开(公告)号：US06788389B2

公开(公告)日：2004-09-07

申请号：US10191428

申请日：2002-07-10

Applicant: Youhei Fujishima ,  Hironori Ikezawa ,  Toshihiko Ozawa ,  Yasuhiro Omura ,  Takeshi Suzuki

Inventor： Youhei Fujishima ,  Hironori Ikezawa ,  Toshihiko Ozawa ,  Yasuhiro Omura ,  Takeshi Suzuki

IPC: G03B2754

CPC classification number: G03F7/70241 ,  C30B11/00 ,  C30B29/12 ,  G03F7/705 ,  G03F7/706 ,  G03F7/70966 ,  G03F7/70975

Abstract: A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength. The projection optical system having at least one isometric system refractive member made of an isometric system crystal material. The isometric system crystal material transmits a light beam having the predetermined wavelength. The projection optical system also has an amorphous refractive member made of an amorphous material for compensating deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member.

Abstract translation: 一种投影光学系统，其中基于具有预定波长的光束将第一表面的图像投影到第二表面上。 投影光学系统具有至少一个等距系统折射构件，其由等轴系统晶体材料制成。 等轴系统晶体材料透射具有预定波长的光束。 投影光学系统还具有由非晶材料制成的非晶折射构件，用于补偿等距系统折射构件的固有双折射引起的光学性能劣化。

公开(公告)号：US06719270B2

公开(公告)日：2004-04-13

申请号：US09969729

申请日：2001-10-04

Applicant: Toshihiko Ozawa

Inventor： Toshihiko Ozawa

IPC: F16L3732

CPC classification number: F16L37/40 ,  F16L41/16 ,  F16L2201/20 ,  Y10T137/87957

Abstract: There is provided a plug 13 for a fluid pipe connector 11 for connecting fluid pipes to each other or for connecting a fluid pipe to a storage tank or a processing unit. The plug 13 includes a plug portion 6, a fixing portion 78 for sandwiching a flange 87 of a pipe between itself and the end face of the plug portion 61 to fix and support the flange 87, a cylindrical support 80 which is integrally formed with the fixing portion 78 for supporting the pipe 60, and a fixing nut for covering and fixing the plug portion 61 and the fixing portion 78. Between the fixing portion 78 and the remainder of the cylindrical support 80 is provided an engagement surface 79 for a lock lever 52. On the distal end of the plug portion 61, is provided a valve 62 for engaging a valve 20 of a member which is to be connected to the plug 13, to establish a fluid communication. On the outer peripheral surface of the fixing nut 64, a long groove 83 is provided for properly aligning the plug 13. Thus, it is possible to reduce the size and weight of a plug for a fluid pipe connector, and to improve safety.

Abstract translation: 设置有用于将流体管彼此连接或用于将流体管连接到储罐或处理单元的流体管连接器11的塞子13。 插塞13包括插头部分6，固定部分78，用于将管子的凸缘87夹在其自身与插头部分61的端面之间以固定和支撑凸缘87;圆柱形支撑件80，其与 用于支撑管60的固定部分78以及用于覆盖和固定插头部分61和固定部分78的固定螺母。在固定部分78和圆柱形支撑件80的其余部分之间设置有用于锁定杆的接合表面79 在插塞部分61的远端设置有阀62，用于接合要连接到插头13的构件的阀20，以形成流体连通。 在固定螺母64的外周面上设置有长槽83以适当地对准插头13.因此，可以减小用于流体管连接器的插头的尺寸和重量，并且提高安全性。

公开(公告)号：US06634396B2

公开(公告)日：2003-10-21

申请号：US09975595

申请日：2001-10-10

Applicant: Toshihiko Ozawa

Inventor： Toshihiko Ozawa

IPC: B65B104

CPC classification number: B67D1/0835 ,  B67D7/0288 ,  Y10T137/86324 ,  Y10T137/86332 ,  Y10T137/8634 ,  Y10T137/86348

Abstract: The object of this invention is to improve safety by preventing the leakage of liquid caused by the internal pressure of a container. A liquid path plug in which a pipe is provided in the lid section of the plug, and a gas path plug which does not have a pipe are attached to openings of the container. The engaging groove section is formed on the end surface of the liquid path cap which closes the through hole provided in the liquid path plug section of the liquid path plug. The engaging protrusion section and the engaging hole section are formed on the end surface of the gas path cap which is provided in the gas path plug section of the gas path plug and closes the through hole. The gas path cap is detached by engaging the engaging pin of the detaching fixture on the engaging hole section of the gas path cap and by turning the gas path cap. The liquid path cap is detached by engaging the engaging protrusion section of the detached gas path cap on the engaging groove section of the liquid path cap and by turning the gas path cap.

公开(公告)号：US06463957B2

公开(公告)日：2002-10-15

申请号：US09863677

申请日：2001-05-22

Applicant: Toshihiko Ozawa

Inventor： Toshihiko Ozawa

IPC: F16L3732

CPC classification number: F16L37/36 ,  Y10T137/87925 ,  Y10T137/87957

Abstract: A connector 20 comprises a plug 21 fitted to an opening 2 formed in a container 1, and a socket 22 which is connected to the plug 21. The plug 21 comprises a bracket section 3 which is fitted into the opening 2 of the container 1, and a plug section 23 which is screwed into a threaded aperture 4 formed in the bracket section 3. An annular locking ring 63 formed with lugs 66 on the outer periphery is integrally but removably fitted to the plug section 23 which is threadedly attached to the threaded aperture 4. A plurality of engaging ribs 67 are formed on the inner peripheral face of the bracket section 3 for preventing rotation of the plug section 23 by engaging with the lugs 66 of the locking ring 63 which is fitted to the plug section 23. As a result, loosening from the threaded aperture 4 of the reusable plug section 23 which is removable by threading into the threaded aperture 4 of the bracket section 3, is prevented so that leaking of the liquid inside the container 1 from a loosened part is prevented.

Abstract translation: 连接器20包括安装到形成在容器1中的开口2的插头21和与插头21连接的插座22.插头21包括嵌入容器1的开口2中的托架部3， 以及插入到形成在支架部分3中的螺纹孔4中的塞子部分23.在外周上形成有凸耳66的环形锁定环63一体地但可拆卸地装配到螺纹连接到螺纹 多个接合肋67形成在支架部分3的内周面上，用于通过与装配到插塞部分23的锁定环63的凸耳66接合来防止插头部分23的旋转。 结果，从可再利用的插塞部分23的螺纹孔4松开，其可通过穿入支架部分3的螺纹孔4而被移除，从而使容器1内的液体从松散的 防止了部件。