OPTICAL MEMBER, LIGHT ROUTING UNIT, AND EXPOSURE APPARATUS
    2.
    发明申请
    OPTICAL MEMBER, LIGHT ROUTING UNIT, AND EXPOSURE APPARATUS 审中-公开
    光学会员,光线路单元和曝光装置

    公开(公告)号:US20090244507A1

    公开(公告)日:2009-10-01

    申请号:US12392722

    申请日:2009-02-25

    IPC分类号: G03B27/54 G02B5/04 G03F7/20

    摘要: Embodiment of the present invention is to provide an optical member composed of calcium fluoride (fluorite) and being capable of preventing deterioration and demonstrating a long life even in use under severe conditions. An optical member of a preferred embodiment has a base material having an entrance face into which light is incident, a total reflection face totally reflecting the incident light, and an exit face from which the totally reflected light emerges to the outside, and made of a calcium fluoride crystal; and a protecting layer to control deterioration of the total reflection face by the light, which is provided on a surface outside the total reflection face in this base material.

    摘要翻译: 本发明的实施方式是提供一种由氟化钙(萤石)构成的光学部件,能够防止劣化,即使在恶劣条件下使用也能够使用寿命长。 优选实施方式的光学构件具有基材,所述基材具有入射面,光入射入射面,全反射面全反射入射光,出射面从全反射光向外突出,由 氟化钙晶体; 以及保护层,以控制设置在该基材的全反射面的外侧的面上的全反射面的劣化。

    OPTICAL MULTI-LAYER THIN FILM, OPTICAL ELEMENT, AND METHOD FOR PRODUCING THE OPTICAL MULTI-LAYER THIN FILM
    3.
    发明申请
    OPTICAL MULTI-LAYER THIN FILM, OPTICAL ELEMENT, AND METHOD FOR PRODUCING THE OPTICAL MULTI-LAYER THIN FILM 有权
    光学多层薄膜,光学元件和用于制造光学薄膜薄膜的方法

    公开(公告)号:US20090161219A1

    公开(公告)日:2009-06-25

    申请号:US12342200

    申请日:2008-12-23

    IPC分类号: G02B1/11 B05D5/06 G02B1/10

    摘要: An optical multi-layer thin film comprises: an outermost layer (13) which is stacked above an optical surface (11) of an optical substrate (10), and which has a lower refractive index than that of the optical substrate (10); and at least certain refractive index layer (14) which is disposed between the optical substrate (10) and the outermost layer (13), and which has a refractive index adjustable in a predetermined range higher than that of the outermost layer (13), wherein the outermost layer (13) is formed by a wet film-formation method using: low-refractive-index fine particles (15) made of a low-refractive-index material having a lower refractive index than that of the optical substrate (10); and a first binder (16), and the certain refractive index layer (14) is formed by a wet film-formation method using: high-refractive-index fine particles (18) made of a high-refractive-index material having a higher refractive index than that of the low-refractive-index material; and a second binder (19) which has a refractive index different from that of the high-refractive-index material.

    摘要翻译: 光学多层薄膜包括:层叠在光学基板(10)的光学表面(11)上方并且具有比光学基板(10)低的折射率的最外层(13)。 以及设置在所述光学基板(10)和所述最外层(13)之间的折射率可以在比最外层(13)高的预定范围内的折射率的至少一定的折射率层(14) 其特征在于,所述最外层(13)通过湿式成膜法形成,所述方法为:由折射率低于所述光学基板(10)折射率的低折射率材料构成的低折射率微粒(15) ); 和第一粘合剂(16),并且通过湿法成膜方法形成所述特定折射率层(14),所述方法为:使用由高折射率材料制成的高折射率微粒(18) 折射率低于低折射率材料; 和具有与高折射率材料的折射率不同的折射率的第二粘合剂(19)。

    Optical multi-layer thin film, optical element, and method for producing the optical multi-layer thin film
    4.
    发明授权
    Optical multi-layer thin film, optical element, and method for producing the optical multi-layer thin film 有权
    光学多层薄膜,光学元件以及光学多层薄膜的制造方法

    公开(公告)号:US08098432B2

    公开(公告)日:2012-01-17

    申请号:US12342200

    申请日:2008-12-23

    IPC分类号: G02B1/10

    摘要: Optical multi-layer thin film comprises: an outermost layer stacked above an optical surface of an optical substrate having a lower refractive index than the optical substrate; and at least a certain refractive index layer disposed between the optical substrate and the outermost layer, and having a refractive index adjustable in a predetermined range higher than that of the outermost layer. The outermost layer is formed by a wet film-formation method using: low-refractive-index fine particles made of a low-refractive-index material; and a first binder, and the certain refractive index layer is formed by a wet film-formation method using: high-refractive-index fine particles made of a high-refractive-index material; and a second binder which has a refractive index different from that of the high-refractive-index material.

    摘要翻译: 光学多层薄膜包括:在光学基板的光学表面上方堆叠的折射率低于光学基板的最外层; 以及至少一个设置在光学基板和最外层之间的折射率层,并且具有可比在最外层更高的预定范围内调节的折射率。 最外层通过湿式成膜法形成,该方法使用由低折射率材料制成的低折射率微粒; 和第一粘合剂,并且通过湿法成膜方法形成所述特定折射率层:使用由高折射率材料制成的高折射率微粒; 和具有与高折射率材料的折射率不同的折射率的第二粘合剂。