Abstract:
A method of forming an actuator and a relay using a micro-electromechanical (MEMS)-based process is disclosed. The method first forms the lower sections of a square copper coil, and then forms a magnetic core member. The magnetic core member, which lies directly over the lower coil sections, is electrically isolated from the lower coil sections. The method next forms the side and upper sections of the coil, followed by the formation of an overlying cantilevered magnetic flexible member. Switch electrodes, which are separated by a switch gap, can be formed on the magnetic core member and the magnetic flexible member, and closed and opened in response to the electromagnetic field that arises in response to a current in the coil.
Abstract:
A switch structure substantially reduces the effect of contact resistance by placing two mechanical switches in parallel between a source and a load, and sequentially closing and opening the mechanical switches so that one switch closes before the other switch, and opens after the other switch. The switch structure with the two mechanical switches can be realized with standard micro machined switches or as a micro-electromechanical system (MEMS) cantilever switch.
Abstract:
An electromechanical memory cell utilizes a cantilever and a laterally positioned electrode. The cantilever is spaced apart from the electrode by a distance that is greater than the elastic limit of the cantilever. The memory cell is programmed by applying voltages to the cantilever and the electrode which causes the cantilever to move into a region of plastic deformation without ever touching the electrode.
Abstract:
An optical switch is implemented with one or more cantilevered optical channels, which are formed in a flexible waveguide structure, and an actuator which is connected to the cantilevered optical channels, to position the cantilevered optical channels to direct an optical signal along one of a number of optical pathways.
Abstract:
A strain sensing apparatus including a deformable substrate is presented. The deformable substrate is configured to detect a strain of the body that can be coupled to the deformable substrate. Sometimes, the deformable substrate is a flexible substrate having an upper surface and an opposite lower surface. The lower can be coupled to the body. There are sensing elements fabricated within the flexible substrate and proximate to the upper surface to detect properties of the body. The strain sensing apparatus is able to detect different strain modes, such as whether the strain is the result of bending of a body or a uniaxial elongation. Furthermore, the apparatus is small and less fragile than most conventional sensors, making it easy to use.