公开(公告)号：US20230112871A1

公开(公告)日：2023-04-13

申请号：US18079976

申请日：2022-12-13

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Jason PAYNTER ,  Julia J. BROWN

IPC: H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, and a plurality of unit areas of an organic light emitting diode (OLED) display disposed on the substrate. The unit areas may be repeating, area-filling subdivisions on the substrate that each have an anode and a cathode. The organic film may be disposed over portions of the device other than the unit areas. The device may include at least one pixel having a plurality of sub-pixels disposed within each of the plurality of unit areas. The cathode of at least one pixel of each of the plurality of unit areas may be a common cathode.

公开(公告)号：US20220333230A1

公开(公告)日：2022-10-20

申请号：US17854232

申请日：2022-06-30

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: C23C14/24 ,  H01L51/56 ,  C23C14/12

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20220143642A1

公开(公告)日：2022-05-12

申请号：US17582071

申请日：2022-01-24

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD ,  Siddharth HARIKRISHNA MOHAN

IPC: B05B12/18 ,  C23C14/22 ,  C23C14/04 ,  C23C14/12

Abstract: Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.

公开(公告)号：US20210054495A1

公开(公告)日：2021-02-25

申请号：US17082169

申请日：2020-10-28

Applicant: Universal Display Corporation

Inventor： Gregory McGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth HARIKRISHNA MOHAN ,  Benjamin SWEDLOVE ,  Gregg KOTTAS

IPC: C23C14/12 ,  C23C14/54 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

公开(公告)号：US20200251655A1

公开(公告)日：2020-08-06

申请号：US16778200

申请日：2020-01-31

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Steven BUSWELL

IPC: H01L51/00 ,  H01L51/56 ,  B05B1/02 ,  C23C14/12 ,  C23C14/22 ,  C23C14/04 ,  C23C16/44 ,  C23C16/455

Abstract: Embodiments of the disclosed subject matter provide a device including a carrier plate, and a die including a mating surface with a patterned thin film of metal or metal oxide surface bonded to the carrier plate using a solder preform with voids that overlay the patterned thin film on the die, where the oxide surface is disposed opposite a moat in a mating surface of the carrier plate, and where the voided regions remain free of solder when the solder is reflowed.

公开(公告)号：US20190386257A1

公开(公告)日：2019-12-19

申请号：US16430486

申请日：2019-06-04

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/56 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a depositor device having a first exhaust aperture and a second exhaust aperture, and a plurality of delivery apertures disposed between the first exhaust aperture and the second exhaust aperture. A first aperture of the plurality of delivery apertures may have a first length, and a second aperture of the plurality of delivery apertures may have a second length. The first length may be longer than the second length. The device may include a third aperture of the plurality of delivery apertures which may have a third length, where the second length may be longer that the third length. The plurality of delivery apertures of the device may include three or more delivery apertures having different lengths.

公开(公告)号：US20190386216A1

公开(公告)日：2019-12-19

申请号：US16400218

申请日：2019-05-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/00 ,  B05B12/18 ,  H01L51/50 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20190217610A1

公开(公告)日：2019-07-18

申请号：US16243393

申请日：2019-01-09

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  Matthew KING ,  William E. QUINN

IPC: B41J2/14 ,  B05B1/16 ,  B41J2/16

CPC classification number: B41J2/1433 ,  B05B1/1609 ,  B41J2/162 ,  B41J2/1623 ,  H01L51/0004

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array formed from monolithic silicon. The micronozzle array may have a plurality of nozzles, where each nozzle of the plurality of nozzles including an integrated plug valve that allows flow from the nozzle to be attenuated separately from each other nozzle of the plurality of nozzles. Each of the plurality of nozzles may include a microchannel, formed from the monolithic silicon, having a first channel portion and a second channel portion, where the first channel portion is narrower than the second channel portion, and where the first channel portion forms an aperture of the nozzle that is configured to eject vapor from the microchannel. Each of the plurality of nozzles may include a stem, formed from the monolithic silicon that includes the integrated plug valve is suspended in the microchannel to attenuate the flow from the nozzle.

公开(公告)号：US20180340253A1

公开(公告)日：2018-11-29

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  Edwin VAN DEN TILLAART ,  William E. QUINN ,  Sven PEKELDER ,  Matthew KING

IPC: C23C14/24 ,  B05D1/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/12

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.

公开(公告)号：US20180331327A9

公开(公告)日：2018-11-15

申请号：US15441331

申请日：2017-02-24

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory McGRAW ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING ,  Elliot H. HARTFORD, Jr.

IPC: H01L51/56 ,  B05B15/02 ,  C23C14/12 ,  C23C14/22

CPC classification number: H01L51/56 ,  B05B12/18 ,  B05B15/555 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14475 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  C23C14/24 ,  H01L51/0004 ,  H01L51/0005 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.