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公开(公告)号：US20180331327A9
公开(公告)日：2018-11-15
申请号：US15441331
申请日：2017-02-24
Applicant: Universal Display Corporation
Inventor： William E. QUINN , Gregory McGRAW , Siddharth HARIKRISHNA MOHAN , Matthew KING , Elliot H. HARTFORD, Jr.
CPC classification number: H01L51/56 , B05B12/18 , B05B15/555 , B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2002/14475 , C23C14/12 , C23C14/22 , C23C14/228 , C23C14/24 , H01L51/0004 , H01L51/0005 , H01L51/50
Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.
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公开(公告)号：US20170162835A1
公开(公告)日：2017-06-08
申请号：US15441331
申请日：2017-02-24
Applicant: Universal Display Corporation
Inventor： William E. QUINN , Gregory McGRAW , Siddharth HARIKRISHNA MOHAN , Matthew KING , Elliot H. HARTFORD, Jr.
CPC classification number: H01L51/56 , B05B12/18 , B05B15/555 , B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2002/14475 , C23C14/12 , C23C14/22 , C23C14/228 , C23C14/24 , H01L51/0004 , H01L51/0005 , H01L51/50
Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.
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3.发明申请公开(公告)号：US20170104159A1
公开(公告)日：2017-04-13
申请号：US15291756
申请日：2016-10-12
Applicant: Universal Display Corporation
Inventor： Matthew KING , William E. QUINN , Gregory MCGRAW , Siddharth HARIKRISHNA MOHAN , Elliot H. HARTFORD, Jr. , Benjamin SWEDLOVE , Gregg KOTTAS , Tomasz TROJACKI , Julia J. BROWN
CPC classification number: H01L51/0013 , C23C14/12 , C23C14/228 , C23C14/243 , H01L51/008 , H01L51/5012 , H01L51/5056 , H01L51/5072 , H01L51/5088 , H01L51/5092 , H01L51/5096 , H01L51/5206 , H01L51/5221 , H01L51/5253 , H01L51/56 , H01L2251/5353
Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.
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