公开(公告)号：US20200251655A1

公开(公告)日：2020-08-06

申请号：US16778200

申请日：2020-01-31

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Steven BUSWELL

IPC: H01L51/00 ,  H01L51/56 ,  B05B1/02 ,  C23C14/12 ,  C23C14/22 ,  C23C14/04 ,  C23C16/44 ,  C23C16/455

Abstract: Embodiments of the disclosed subject matter provide a device including a carrier plate, and a die including a mating surface with a patterned thin film of metal or metal oxide surface bonded to the carrier plate using a solder preform with voids that overlay the patterned thin film on the die, where the oxide surface is disposed opposite a moat in a mating surface of the carrier plate, and where the voided regions remain free of solder when the solder is reflowed.

公开(公告)号：US20190386257A1

公开(公告)日：2019-12-19

申请号：US16430486

申请日：2019-06-04

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/56 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a depositor device having a first exhaust aperture and a second exhaust aperture, and a plurality of delivery apertures disposed between the first exhaust aperture and the second exhaust aperture. A first aperture of the plurality of delivery apertures may have a first length, and a second aperture of the plurality of delivery apertures may have a second length. The first length may be longer than the second length. The device may include a third aperture of the plurality of delivery apertures which may have a third length, where the second length may be longer that the third length. The plurality of delivery apertures of the device may include three or more delivery apertures having different lengths.

公开(公告)号：US20190386216A1

公开(公告)日：2019-12-19

申请号：US16400218

申请日：2019-05-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/00 ,  B05B12/18 ,  H01L51/50 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20190217610A1

公开(公告)日：2019-07-18

申请号：US16243393

申请日：2019-01-09

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  Matthew KING ,  William E. QUINN

IPC: B41J2/14 ,  B05B1/16 ,  B41J2/16

CPC classification number: B41J2/1433 ,  B05B1/1609 ,  B41J2/162 ,  B41J2/1623 ,  H01L51/0004

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array formed from monolithic silicon. The micronozzle array may have a plurality of nozzles, where each nozzle of the plurality of nozzles including an integrated plug valve that allows flow from the nozzle to be attenuated separately from each other nozzle of the plurality of nozzles. Each of the plurality of nozzles may include a microchannel, formed from the monolithic silicon, having a first channel portion and a second channel portion, where the first channel portion is narrower than the second channel portion, and where the first channel portion forms an aperture of the nozzle that is configured to eject vapor from the microchannel. Each of the plurality of nozzles may include a stem, formed from the monolithic silicon that includes the integrated plug valve is suspended in the microchannel to attenuate the flow from the nozzle.

公开(公告)号：US20180340253A1

公开(公告)日：2018-11-29

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  Edwin VAN DEN TILLAART ,  William E. QUINN ,  Sven PEKELDER ,  Matthew KING

IPC: C23C14/24 ,  B05D1/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/12

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.

公开(公告)号：US20150340410A1

公开(公告)日：2015-11-26

申请号：US14698352

申请日：2015-04-28

Applicant: Universal Display Corporation

Inventor： Michael HACK ,  Michael Stuart WEAVER ,  Ruiqing MA ,  William E. QUINN ,  Gregory MCGRAW

IPC: H01L27/32 ,  H01L51/56

CPC classification number: H01L27/3218 ,  H01L27/3213 ,  H01L27/322 ,  H01L51/5265 ,  H01L51/56 ,  H01L2251/5315

Abstract: Full-color pixel arrangements for use in devices such as OLED displays are provided, in which multiple sub-pixels are configured to emit different colors of light, with each sub-pixel having a different optical path length than some or all of the other sub-pixels within the pixel.

Abstract translation: 提供了用于诸如OLED显示器的设备中的全色像素布置，其中多个子像素被配置为发射不同颜色的光，其中每个子像素具有不同于其他子像素的部分或全部的光程长度 像素内的像素。

公开(公告)号：US20230269994A1

公开(公告)日：2023-08-24

申请号：US18104353

申请日：2023-02-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Roman KOROTKOV ,  Craig Anthony OUTTEN

IPC: H10K71/13 ,  H01L21/02 ,  H01L21/302

CPC classification number: H10K71/13 ,  H01L21/02123 ,  H01L21/0223 ,  H01L21/302 ,  H10K2102/00

Abstract: Implementations of the disclosed subject matter provide an organic vapor jet print die including a linear array of depositors, with each of the depositors having a cluster of apertures. The organic vapor jet print die may include at least one first aperture in each cluster of apertures is a delivery aperture that is in fluid communication with a carrier gas source and an evaporation oven. At least one second aperture in each cluster of apertures may be an exhaust aperture in fluid communication with a vacuum reservoir with a static pressure lower than that at the apertures. The delivery apertures and exhaust apertures may have a uniformity that is less than 0.4%.

公开(公告)号：US20230151491A1

公开(公告)日：2023-05-18

申请号：US18099339

申请日：2023-01-20

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  C23C14/12 ,  C23C14/24 ,  B41J2/00 ,  H10K71/13

CPC classification number: C23C16/45563 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  B41J2/00 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20220352467A1

公开(公告)日：2022-11-03

申请号：US17729465

申请日：2022-04-26

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony OUTTEN ,  Gregory MCGRAW ,  Matthew KING ,  Xin XU

IPC: H01L51/00 ,  C23C14/12 ,  C23C14/22 ,  C23C16/44

Abstract: Organic vapor jet printing (OVJP) devices and techniques are provided that use a solid materials sublimation source to provide material for deposition on a substrate. Carrier gas from a carrier gas source entrains vapor from the solid material within each sublimation source for transport to a print head within a deposition chamber. The sublimation source includes a sufficiently long internal flow path to achieve an acceptable level of material saturation of the carrier gas.

公开(公告)号：US20220020972A1

公开(公告)日：2022-01-20

申请号：US17361469

申请日：2021-06-29

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Igor KOZIN ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  B05B12/12 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.