公开(公告)号：US07311065B2

公开(公告)日：2007-12-25

申请号：US11437920

申请日：2006-05-22

申请人： Yi-Hsiung Lin

发明人： Yi-Hsiung Lin

IPC分类号： F02B45/02 ,  F02B45/08

CPC分类号： F02B45/02 ,  Y02T10/34

摘要： A powder fuel engine includes a battery, a cylinder and a generator. The battery is connected with an air compressor linked with an air tank, and the generator. The air tank is connected with a mixer and two powder tanks respectively via a pressurization tube. The powder tanks are to store different powders and respectively connected with a powder tube connected with the mixer. A powder jetting device connected to the mixer is connected with the cylinder that is provided with a powder combustion chamber, a piston, a spark plug and an outlet. The piston is connected with a connecting rod that is connected with a shaft. The generator is connected with an ignition device that is connected with the spark plug.

摘要翻译： 粉末燃料发动机包括电池，气缸和发电机。 电池与与空气罐连接的空气压缩机和发电机连接。 空气罐分别通过加压管与混合器和两个粉末槽相连。 粉罐储存不同的粉末，分别与与搅拌机连接的粉末管连接。 连接到混合器的粉末喷射装置与设置有粉末燃烧室，活塞，火花塞和出口的气缸连接。 活塞与与轴连接的连杆连接。 发电机与与火花塞连接的点火装置连接。

公开(公告)号：US20070105362A1

公开(公告)日：2007-05-10

申请号：US11270783

申请日：2005-11-09

申请人： Jae Kim ,  Wan Park ,  Yi-Hsiung Lin

发明人： Jae Kim ,  Wan Park ,  Yi-Hsiung Lin

IPC分类号： H01L21/4763

CPC分类号： H01L21/76808 ,  H01L21/31144 ,  H01L21/76811

摘要： A method of forming a via using a dual damascene process can include removing a material from a recess in a low-k material using an ashing process while maintaining a protective spacer on an entire side wall of the recess to cover the low-k material in the recess.

摘要翻译： 使用双镶嵌工艺形成通孔的方法可以包括使用灰化工艺从低k材料的凹陷中去除材料，同时在凹槽的整个侧壁上保持保护性间隔物以覆盖低k材料 凹槽

公开(公告)号：US20080124935A1

公开(公告)日：2008-05-29

申请号：US11641573

申请日：2006-12-19

申请人： Hong-Long Chang ,  Yi-Hsiung Lin ,  Chris Shyu

发明人： Hong-Long Chang ,  Yi-Hsiung Lin ,  Chris Shyu

IPC分类号： H01L21/71

CPC分类号： H01L29/66181 ,  H01L21/3065 ,  H01L21/3081 ,  H01L27/1087

摘要： A two-step process for manufacturing a deep trench in a semiconductor device that prevents shorts and leakages between neighboring capacitors due to over etching is disclosed. The process comprises conducting a first etching step to remove a portion of a substrate to form a trench with a first determined depth therein; conducting a thermal oxidation to form an oxide film on the sidewall of the trench; and conducting a second etching step to remove a portion of the substrate under the trench to form a deep trench with a second determined depth.

摘要翻译： 公开了用于制造半导体器件中的深沟槽的两步法，其防止由于过蚀刻引起的相邻电容器之间的短路和泄漏。 该方法包括进行第一蚀刻步骤以去除衬底的一部分以形成其中具有第一确定深度的沟槽; 进行热氧化以在沟槽的侧壁上形成氧化膜; 以及进行第二蚀刻步骤以去除所述沟槽下方的所述衬底的一部分以形成具有第二确定深度的深沟槽。

公开(公告)号：US20070170147A1

公开(公告)日：2007-07-26

申请号：US11307162

申请日：2006-01-26

申请人： Yi-Hsiung Lin ,  Chuan-Hsien Hsieh ,  Chien-Jung Chen ,  Chao-Shun Chiu

发明人： Yi-Hsiung Lin ,  Chuan-Hsien Hsieh ,  Chien-Jung Chen ,  Chao-Shun Chiu

IPC分类号： C23F1/00 ,  B44C1/22 ,  C03C25/68 ,  H01B13/00

CPC分类号： H01L21/3065 ,  H01L21/31138 ,  H01L21/31144 ,  H01L21/32137

摘要： An etching method is disclosed. First, a patterned photoresist layer is formed on a silicon material. Next, in an etching machine, using the patterned photoresist layer as a mask and using bromine hydride (HBr) as reactive gas, an etching process is performed on the silicon material. Afterwards, a ramp-down mode is used to turn off the RF power supply of the etching machine, a purge gas is injected into the etching machine for purging, and in the meantime, the gas is pumped out from the etching machine.

摘要翻译： 公开了蚀刻方法。 首先，在硅材料上形成图案化的光致抗蚀剂层。 接下来，在蚀刻机中，使用图案化的光致抗蚀剂层作为掩模并使用溴化氢（HBr）作为反应气体，对硅材料进行蚀刻处理。 然后，使用斜坡下降模式来关闭蚀刻机的RF电源，将清洗气体注入到蚀刻机中进行清洗，同时从蚀刻机中抽出气体。

公开(公告)号：US20050101128A1

公开(公告)日：2005-05-12

申请号：US10704022

申请日：2003-11-07

申请人： Frederick Gibb ,  Chih-Chao Yang ,  Yi-Hsiung Lin

发明人： Frederick Gibb ,  Chih-Chao Yang ,  Yi-Hsiung Lin

IPC分类号： H01L21/302 ,  H01L21/311 ,  H01L21/461 ,  H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/76808 ,  H01L21/31144 ,  H01L21/76831

摘要： Disclosed is a method that deposits an aqueous material having a pH between approximately 10 and 11 in a first opening and on an oxide hard mask, deposits an organic material on the aqueous material, and patterns a photoresist over the organic material. The invention then etches the organic material and the aqueous material through the photoresist to form a second opening above the first opening and forms a polymer along sidewalls of the second opening. The invention can then perform a wet cleaning process using an alkali solution having a pH between approximately 10 and 11 to remove the aqueous material from the first opening. By utilizing an alkali aqueous (water-based) material having a pH of approximately 10-11, the invention can use a fairly low pH wet etch (pH of approximately 10-11) to completely remove the aqueous solution from the via, thereby eliminating the conventional problem of having residual organic material left within the via.

摘要翻译： 公开了一种在第一开口和氧化物硬掩模上沉积具有大约10和11之间的pH的水性材料的方法，将有机材料沉积在水性材料上，并在有机材料上形成光致抗蚀剂。 然后，本发明通过光致抗蚀剂蚀刻有机材料和水性材料，以在第一开口上方形成第二开口，并沿着第二开口的侧壁形成聚合物。 然后，本发明可以使用pH在约10和11之间的碱溶液进行湿式清洗，以从第一开口去除含水材料。 通过使用pH为约10-11的碱性水性（水性）材料，本发明可以使用相当低的pH湿法蚀刻（约10-11的pH）从通孔中完全除去水溶液，从而消除 在残留有机材料留在通孔内的常规问题。

公开(公告)号：US07815173B2

公开(公告)日：2010-10-19

申请号：US12108534

申请日：2008-04-24

申请人： Yi-Hsiung Lin

发明人： Yi-Hsiung Lin

IPC分类号： B01F3/04

CPC分类号： F28D3/02 ,  Y10S261/11

摘要： A cooler includes a body, a water tank installed in the body for storing cooling water, a pump fixed in the water tank, a water pipe connected to the pump and extending upward, a spray pipe connected to the water pipe, at least one gas cooling device located above the spray pipe, at least one fan fixed on top of the body, at least one wind hole formed in a side of the body, at least one cooling pipe uprightly installed in the body and having an upper portion passing through heat-dispersing chips of the gas cooling device and a lower portion passing through heat-dispersing chips of the water cooling device, and at least one water-heat exchanger below the spray pipe and having a heat-dispersing element. The cooler has two stages of cooling by air and water, having a high effect of swift cooling high temperature to low temperature.

摘要翻译： 冷却器包括主体，安装在主体中用于存储冷却水的水箱，固定在水箱中的泵，连接到泵并向上延伸的水管，连接到水管的喷管，至少一个气体 冷却装置，位于喷管上方，固定在主体顶部的至少一个风扇，形成在主体一侧的至少一个风洞，至少一个直立安装在主体中的冷却管，并具有通过热量的上部 - 气体冷却装置的分散芯片和通过水冷装置的散热片的下部，以及喷管下方的至少一个水热交换器，并具有散热元件。 冷却器有两个阶段的空气和水冷却，具有很高的快速冷却高温到低温的效果。

公开(公告)号：US20070266963A1

公开(公告)日：2007-11-22

申请号：US11437920

申请日：2006-05-22

申请人： Yi-Hsiung Lin

发明人： Yi-Hsiung Lin

IPC分类号： F02B45/00

CPC分类号： F02B45/02 ,  Y02T10/34

摘要： A powder fuel engine includes a battery, a cylinder and a generator. The battery is connected with an air compressor linked with an air tank, and the generator. The air tank is connected with a mixer and two powder tanks respectively via a pressurization tube. The powder tanks are to store different powders and respectively connected with a powder tube connected with the mixer. A powder jetting device connected to the mixer is connected with the cylinder that is provided with a powder combustion chamber, a piston, a spark plug and an outlet. The piston is connected with a connecting rod that is connected with a shaft. The generator is connected with an ignition device that is connected with the spark plug.

摘要翻译： 粉末燃料发动机包括电池，气缸和发电机。 电池与与空气罐连接的空气压缩机和发电机连接。 空气罐分别通过加压管与混合器和两个粉末槽相连。 粉罐储存不同的粉末，分别与与搅拌机连接的粉末管连接。 连接到混合器的粉末喷射装置与设置有粉末燃烧室，活塞，火花塞和出口的气缸连接。 活塞与与轴连接的连杆连接。 发电机与与火花塞连接的点火装置连接。

公开(公告)号：US20070052386A1

公开(公告)日：2007-03-08

申请号：US11220533

申请日：2005-09-08

申请人： Yi-Hsiung Lin

发明人： Yi-Hsiung Lin

IPC分类号： H02J7/00

CPC分类号： B60L7/10 ,  H02K53/00 ,  Y02T10/641

摘要： An automatic changeable electromotive vehicle has a driving device. The driving device of the electromotive vehicle is connected to a battery and a generator to form an electric loop. A switch is connected between the battery and the driving device. Therefore, when the switch of the electromotive vehicle is turned on, the battery provides power to the driving device so as to drive the electromotive vehicle. While the driving device also drives the generator to operate, the generator precedes battery to charge. The electromotive vehicle is chargeable automatically during driving. Thus, not only the battery of the electromotive vehicle is charged in driving, but also the traveling distance of the electromotive vehicle is increased.

摘要翻译： 一种自动可变电动车辆具有驱动装置。 电动车辆的驱动装置与电池和发电机连接形成电动回路。 开关连接在电池和驱动装置之间。 因此，当电动车辆的开关被接通时，电池向驱动装置供电以驱动电动车辆。 当驱动装置也驱动发电机运行时，发电机先于电池充电。 电动车辆在行驶过程中可自动充电。 因此，不仅电动车辆的电池在驱动中被充电，而且电动车辆的行驶距离增加。

公开(公告)号：US20050077628A1

公开(公告)日：2005-04-14

申请号：US10684952

申请日：2003-10-14

申请人： Kaushik Kumar ,  Timothy Dalton ,  Larry Clevenger ,  Andy Cowley ,  Douglas La Tulipe ,  Mark Hoinkis ,  Chih-Chao Yang ,  Yi-Hsiung Lin ,  Erdem Kaltalioglu ,  Markus Naujok ,  Jochen Schacht

发明人： Kaushik Kumar ,  Timothy Dalton ,  Larry Clevenger ,  Andy Cowley ,  Douglas La Tulipe ,  Mark Hoinkis ,  Chih-Chao Yang ,  Yi-Hsiung Lin ,  Erdem Kaltalioglu ,  Markus Naujok ,  Jochen Schacht

IPC分类号： H01L21/768 ,  H01L23/532 ,  H01L23/48

CPC分类号： H01L21/76835 ,  H01L21/76811 ,  H01L21/76813 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

摘要： A dual damascene structure and method of fabrication thereof. An insulating layer comprises a first dielectric material and a second dielectric material, the second dielectric material being different from the first dielectric material. First conductive regions having a first pattern are formed in the first dielectric material, and second conductive regions having a second pattern are formed in the second dielectric material, the second pattern being different from the first pattern. One of the first dielectric material and the second dielectric material comprises an organic material, and the other dielectric material comprises an inorganic material. One of the first and second dielectric materials is etchable selective to the other dielectric material. A method of cleaning a semiconductor wafer processing chamber while a wafer remains residing within the chamber is also disclosed.