公开(公告)号：US11459657B2

公开(公告)日：2022-10-04

申请号：US16791003

申请日：2020-02-14

Applicant: CKD CORPORATION

Inventor： Takeya Inagaki

IPC: C23C16/455 ,  H01L23/34 ,  B05D3/04 ,  C23C16/44

Abstract: A gas supply unit is configured such that when a first gas whose temperature has been controlled at a first temperature is supplied to a chamber through an upper device and then a second gas which starts a chemical reaction at a reaction start temperature lower than the first temperature is supplied to the chamber through the upper device, before cleaning gas is supplied to the chamber through the defined between a base plate and the upper device to cool the upper device down to the reaction start temperature or lower.

公开(公告)号：US20220283098A1

公开(公告)日：2022-09-08

申请号：US17825419

申请日：2022-05-26

Applicant: CKD CORPORATION

Inventor： Takamasa Ohtani ,  Eiji Ohta ,  Yukihiro Taguchi

IPC: G01N21/90

Abstract: An inspection device includes: an irradiator that radiates, before content is placed into the pocket, ultraviolet light toward one face of the container film; imaging devices that take images of the container film from another face side of the container film; and a processor that determines, based on the images, whether the pocket includes a pinhole, at least two of the imaging devices being each disposed on respective sides of the container film in a width direction such that the pocket is placed between the two imaging devices, and while the container film is being conveyed along a conveyance path, the two imaging devices take images of the pocket at a timing when the pocket is located at an upstream-side position, a middle-side position, and a downstream-side position of the conveyance path.

公开(公告)号：US20220268369A1

公开(公告)日：2022-08-25

申请号：US17672579

申请日：2022-02-15

Applicant: CKD CORPORATION

Inventor： Shinji ITOH ,  Shotaro HATANAKA ,  Yasunari AZUMA ,  Yasunari ISHIHARA

IPC: F16K27/06 ,  F16K31/06

Abstract: A solenoid unit of an electromagnetic valve includes a coil, a bobbin, a fixed iron core, a movable iron core, an urging spring, a magnetic frame, and a molded plastic part. The magnetic frame includes a frame end wall, two frame arms, and an internal thread hole, to which the fixed iron core is threaded. A tubular projection protrudes from an end face of the frame end wall that is on a side opposite to the bobbin. The projection forms part of the internal thread hole. The molded plastic part includes a molded end wall, which covers the frame end wall, and a molded peripheral wall. The molded end wall includes a connecting hole that is continuous with the internal thread hole. The connecting hole includes a groove in an inner circumferential surface. The groove extends along an outer circumferential surface of the projection.

公开(公告)号：US11384864B2

公开(公告)日：2022-07-12

申请号：US16747711

申请日：2020-01-21

Applicant: CKD CORPORATION

Inventor： Yoshiyuki Yamada ,  Shunsuke Umezawa

IPC: F16K31/122 ,  F16K51/02 ,  F04C14/18 ,  F16K27/07 ,  F16K27/00 ,  F04C13/00 ,  F16K99/00

Abstract: A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.

公开(公告)号：US20220187027A1

公开(公告)日：2022-06-16

申请号：US17440812

申请日：2020-03-19

Applicant: CKD CORPORATION

Inventor： Akihiro ITO ,  Takahiro MINATANI ,  Shinichi NITTA

IPC: F28D20/02

Abstract: A heat exchange system is arranged between a chiller device and a temperature control member, and is provided with: supply line for supplying a refrigerant from the chiller device to the temperature control member; a return line for returning the refrigerant from the temperature control member to the chiller device; a bypass line for bypassing the supply line and the return line; a latent heat storage member arranged closer to the chiller device relative to a first connection point connecting the return line and the bypass line; and a flow distribution unit that is arranged at a second connection point connecting the outgoing line and the bypass line, and that is for adjusting a ratio for distributing refrigerant to the temperature control member and the bypass line.

公开(公告)号：US11339876B2

公开(公告)日：2022-05-24

申请号：US17144334

申请日：2021-01-08

Applicant: CKD CORPORATION

Inventor： Yasunori Nishimura

IPC: F16K1/226 ,  F16K51/02

Abstract: A butterfly valve includes a drive unit and a valve unit that are coupled to each other. The drive unit includes a hollow part in which a rod is inserted between a DD motor and an end portion of the drive unit on a coupling side to the valve unit. In the hollow part, a cylindrical magnetic member is placed coaxially with the rod to cover the outer peripheral surface of the rod. A magnetic fluid is filled in a void between the outer peripheral surface of the magnetic member and the inner peripheral surface of the hollow part. The rod is made of a non-magnetic corrosion-resistant alloy.

公开(公告)号：US20220099192A1

公开(公告)日：2022-03-31

申请号：US17430175

申请日：2020-02-21

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA

IPC: F16K1/22 ,  F16K31/04 ,  F16K37/00

Abstract: A butterfly valve has a rod connected to a DD motor and disposed along a direction orthogonal to a flow path, and a butterfly valve body that is linked to the rod and that opens and closes the flow path due to the rod being rotated by the DD motor, wherein a linking body center of gravity, which is the center of gravity of a rotating liking body having at least the rod and the butterfly valve body as constituent members, is positioned on an axial line of a rotating shaft of the DD motor.

公开(公告)号：US20220082374A1

公开(公告)日：2022-03-17

申请号：US17534539

申请日：2021-11-24

Applicant: CKD CORPORATION

Inventor： Manabu Okuda ,  Tsuyoshi Ohyama ,  Norihiko Sakaida

IPC: G01B11/25

Abstract: A three-dimensional measurement device performs three-dimensional measurement of a measured object using a phase shift method. The three-dimensional measurement device includes: an irradiator that irradiates the measured object with a predetermined light pattern having a light intensity distribution in a fringe shape; a control device that shifts a phase of the light pattern radiated from the irradiator in N different ways, where N is a natural number of not less than 3; and an imaging device that takes an image of the measured object irradiated with the light pattern. The control device executes three-dimensional measurement of the measured object by the phase shift method based on N different image data taken under the light pattern having the phase shifted in the N different ways.

公开(公告)号：US11268628B2

公开(公告)日：2022-03-08

申请号：US16905632

申请日：2020-06-18

Applicant: CKD Corporation

Inventor： Akihiro Ito ,  Masayuki Kouketsu ,  Masaya Yamauchi ,  Toshikazu Tsuruga

IPC: F16K31/06 ,  F16K3/02 ,  F16K3/26 ,  F16K17/04 ,  F16K47/02

Abstract: A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.

公开(公告)号：US11161229B2

公开(公告)日：2021-11-02

申请号：US16286959

申请日：2019-02-27

Applicant: YODOGAWA HU-TECH CO., LTD. ,  CKD CORPORATION

Inventor： Akihiro Yamamoto ,  Naoyuki Oba ,  Katsumi Ogawa ,  Hiroki Iwata

IPC: B25B5/00 ,  B25B27/10 ,  F16L23/036 ,  B25B5/04 ,  B25B5/16 ,  B29C65/78 ,  B25B5/12 ,  B25B27/16 ,  B25B5/08

Abstract: The present invention provides a clamping jig for tube connection with which it is possible to clamp tubes even in a small and narrow space. A clamping jig for tube connection 10 according to the present invention is a clamping jig for tube connection that clamps joint-equipped tubes 60, each tube including a protruding collar portion 63 at a position rearward of its leading end. The clamping jig for tube connection includes: a first member 20 that includes a first clamping portion 21 that is provided at a leading end thereof and to which one of the tubes is fitted, and a first gripping portion 23 formed at a base end thereof, a second member 30 that includes a second clamping portion 31 that is provided at a leading end thereof and to which the other tube is fitted, and a base end thereof being pivotally supported at the base end of the first member by a pivoting portion 27; a support rod 25 that extends from the first member through the second member; and a lever member 40 in which a leading end thereof is pivotally supported by a support portion 26 provided in the support rod, and a lever gripping portion 41 is formed at a base end thereof, the lever member 40 enabling swinging of the lever gripping portion in a direction of the base end of the second member, and the lever member 40 including a pressing portion 42 that presses the second member on the base end side relative to the support portion.