公开(公告)号：US20040197675A1

公开(公告)日：2004-10-07

申请号：US10743522

申请日：2003-12-23

Inventor： Takeshi Shibata ,  Kyoichi Suguro

IPC: G03F009/00 ,  B32B009/06 ,  G03C005/00 ,  G21K005/00 ,  B32B009/00 ,  B05C011/11

CPC classification number: G03F1/20 ,  G03F1/40

Abstract: In a stencil mask, a conductive thin film has first openings in it. An insulating film is formed in the region of the conductive thin film excluding the first openings. A conductive support is formed on the insulating film. A second opening goes through the conductive support and insulating film and reaches the surface of the conductive thin film. A conducting member is formed in the second opening. The conducting member connects the conductive support and conductive thin film electrically.

Abstract translation: 在模板掩模中，导电薄膜在其中具有第一开口。 在除了第一开口之外的导电薄膜的区域中形成绝缘膜。 在绝缘膜上形成导电支撑。 第二个开口穿过导电支撑和绝缘膜并到达导电薄膜的表面。 导电构件形成在第二开口中。 导电构件电连接导电支撑件和导电薄膜。

公开(公告)号：US20040107902A1

公开(公告)日：2004-06-10

申请号：US10643567

申请日：2003-08-19

Applicant: Micron Technology, Inc.

Inventor： Tongbi Jiang ,  Chad A. Cobbley ,  John VanNortwick

IPC: B05C005/00 ,  B05C011/11

CPC classification number: B41C1/14 ,  B41N1/242 ,  H01L2224/4826 ,  H05K3/1225 ,  Y10S438/945

Abstract: A method and apparatus for improved stencil/screen print quality is disclosed. The stencil or screen assists in application of a printable material onto a substrate, such as an adhesive to a semiconductor die of a semiconductor wafer during a lead-on-chip (LOC) packaging process. In one embodiment, the stencil includes a coating applied to at least one surface of a pattern of the stencil or screen to retard running of the printable material onto the surface. In another embodiment, the stencil or screen includes a second coating applied to at least one other surface of the pattern to promote spreading of the printable material onto the substrate.

Abstract translation: 公开了一种用于改进模板/丝网印刷质量的方法和装置。 在片上（LOC）包装过程中，模板或屏幕有助于将可印刷材料施加到基底上，例如对半导体晶片的半导体管芯的粘合剂。 在一个实施例中，模板包括施加到模板或筛网的图案的至少一个表面上的涂层，以阻止可印刷材料在表面上的运行。 在另一个实施例中，模板或丝网包括施加到图案的至少一个其他表面的第二涂层，以促进可印刷材料在基底上的铺展。

公开(公告)号：US20030196604A1

公开(公告)日：2003-10-23

申请号：US10131455

申请日：2002-04-22

Applicant: STMICROELECTRONICS, INC.

Inventor： Ardeshir Jehangir Sidhwa

IPC: C23F001/00 ,  C23C016/00 ,  H01L021/306 ,  B05C011/11

CPC classification number: H01L21/68721 ,  C23C14/50 ,  C23C16/4585 ,  H01L21/68735

Abstract: A substrate clamp ring has an edge exclusion lip with a variable bottom surface. At least a portion of that bottom surface has a height above the substrate contact level selected to minimize accumulation over time of deposited aluminum-copper alloy across lower portions of the bottom surface, and to allow the aluminum-copper alloy to be deposited to a thickness of at least 2 microns on each of a predetermined number of substrates without bridging. The height of the bottom surface at an innermost edge of the lip is preferably about 17 mils, while a height of the bottom surface over the substrate edge is preferably about 8.5 mils.

Abstract translation: 衬底夹环具有具有可变底表面的边缘排除唇。 该底表面的至少一部分具有高于所选择的衬底接触面高度的高度，以最小化沉积的铝 - 铜合金在底表面的下部上随时间的积累，并且允许铝 - 铜合金沉积到厚度 在预定数量的基板上的每一个上不具有桥接的至少2微米。 在唇缘的最内边缘处的底表面的高度优选为约17密耳，而衬底边缘上的底表面的高度优选为约8.5密耳。

公开(公告)号：US20030000466A1

公开(公告)日：2003-01-02

申请号：US10230662

申请日：2002-08-28

Inventor： Charles R. DeWent

IPC: B05C011/11

CPC classification number: B05B5/082 ,  Y10T428/1397

Abstract: The invention relates to an intermediate component for protecting hangers associated with electrostatic coating processes. The component is an electrically conductive, pliable, tubular member, and inexpensive relative to the hanger which it serves to protect. The component lessens the cost associated with traditional hanger cleaning and preserves hanger life and integrity. The tubular member may have a longitudinal slit for installing the member over a cross bar of a hanger.

公开(公告)号：US20020108567A1

公开(公告)日：2002-08-15

申请号：US10006224

申请日：2001-12-10

Applicant: Mosel Vitelic Inc.

Inventor： Wen-Ken Hu ,  Hsiao-Ping Hsieh ,  Zhi-Zhao Tai ,  Mark Wang

IPC: B05C011/11

CPC classification number: H01J37/3447 ,  C23C14/34 ,  C23C14/564 ,  Y10T29/53 ,  Y10T29/53961

Abstract: An assembly station for a sputter shield assembly provides a work bench for assembling and disassembling the sputter shield assembly. The shield assembly has a clamp shield facing downwards to hold the shield assembly which is turned over by 180 degrees, and includes at least three bottom rim support arms for supporting the clamp shield and bearing the weight of the shield assembly, and at least three inner rim retaining arms for contacting the inner rim formed by the shield and the clamp shield. The invention provides a changed support means for holding the shield assembly on the assembly station so that one person is enough to do the assembly and disassembly of the shield assembly, and thus save manpower and operation time.

Abstract translation: 用于溅射屏蔽组件的装配站提供用于组装和拆卸溅射屏蔽组件的工作台。 屏蔽组件具有面向下的夹持屏蔽件，以将屏蔽组件保持180度，并且包括至少三个底部边缘支撑臂，用于支撑夹具屏蔽并承载屏蔽组件的重量，并且至少三个内部 用于接触由护罩和夹具护罩形成的内缘的轮辋保持臂。 本发明提供了一种用于将屏蔽组件保持在组装工位上的改变的支撑装置，使得一个人足以进行屏蔽组件的组装和拆卸，从而节省人力和操作时间。

公开(公告)号：US20010029886A1

公开(公告)日：2001-10-18

申请号：US09815611

申请日：2001-03-23

Inventor： Silvano Keller

IPC: B05C011/11

CPC classification number: C23C4/16 ,  C23C4/01 ,  F02B77/02

Abstract: Disclosed is an apparatus for protecting the walls of a row of cylinders of an engine block from contamination when the walls of the other row of cylinders of the engine block are thermally coated. For this purpose, the apparatus comprises a plurality of inflatable hollow body members that can be moved into the interior of the cylinders whose walls are to be protected and inflated once they are in position in the interior of the particular cylinders. The hollow body members comprise a dimensionally stable inner sleeve member that is enclosed by an inflatable elastic envelope member. The inflatable hollow body members are arranged in two groups located opposite to each other.

Abstract translation: 公开了一种用于当发动机缸体的另一排气缸的壁被热涂覆时，用于保护发动机缸体的一排汽缸的壁免受污染的装置。 为此目的，该装置包括多个可充气的中空主体构件，其可以移动到其壁被保护并且一旦位于特定气缸内部的位置就被充气的气缸的内部。 中空本体构件包括尺寸稳定的内部套筒构件，该内部套筒构件由可充气的弹性包络构件包围。 可膨胀的中空体部件被布置成彼此相对的两组。

公开(公告)号：US20040123799A1

公开(公告)日：2004-07-01

申请号：US10334956

申请日：2002-12-31

Applicant: Eastman Kodak Company

Inventor： Thomas K. Clark

IPC: B05C011/11

CPC classification number: C23C14/12 ,  C23C14/042 ,  H01L51/0011 ,  H05K3/143

Abstract: A method of mounting a deposition mask onto a flexible frame for use in vacuum deposition of material through a pealable deposition mask in forming an OLED, including the steps of providing a plate with the pealable deposition mask formed thereon; providing the flexible frame having border portions, such border portions defining a frame opening which corresponds to border portions on the pealable deposition mask; aligning and then securing the border portions of the flexible frame to the border portions of the pealable deposition mask and removing the flexible frame and secured pealable deposition mask from the plate; and mounting the flexible frame with the pealable deposition mask in a carrier which maintains planarity of the pealable deposition mask during subsequent vacuum deposition of material.

Abstract translation: 一种将沉积掩模安装到柔性框架上的方法，用于在形成OLED时通过可分散沉积掩模真空沉积材料，包括以下步骤：在其上形成可喷射沉积掩模; 提供具有边界部分的柔性框架，这种边界部分限定对应于可剥离沉积掩模上的边界部分的框架开口; 对准然后将柔性框架的边界部分固定到可剥离沉积掩模的边界部分，并从该板上移除柔性框架和固定的可分散沉积掩模; 以及将具有可扩散沉积掩模的柔性框架安装在载体中，其在随后的材料真空沉积期间保持可扩散沉积掩模的平面性。

公开(公告)号：US20040083956A1

公开(公告)日：2004-05-06

申请号：US10287729

申请日：2002-11-04

Inventor： Thomas Christopher Demitry

IPC: B05C011/11 ,  B05C021/00 ,  B65D001/34

CPC classification number: B44D3/128 ,  B05C21/00

Abstract: This invention relates to a device, such as a paint mat, removably attachable to the base of a paint can, for collecting spills and drips from the paint can during use. The paint mat includes an attachment means, such as a magnet, in the central portion thereof, for attachment to the base of the paint can. When attached, the paint mat extends beyond the perimeter of the paint can. The paint mat may include an aperture distal to the central portion but not extending past the perimeter of the base. The semi-rigid board also includes an advertisement on at least one side thereof and an extension therefrom so as to allow a brush to rest.

Abstract translation: 本发明涉及一种可拆卸地连接到油漆罐底部的装置，例如油漆垫，用于在使用期间从油漆罐收集溢出物和滴落物。 油漆垫在其中心部分包​​括附着装置，例如磁体，用于附着到油漆罐的底部。 当附着时，油漆垫延伸超过油漆罐的周边。 油漆垫可以包括远离中心部分但不延伸穿过基部的周边的孔。 半刚性板还包括在其至少一侧上的广告和从其延伸以允许刷子休息。

公开(公告)号：US20030155234A1

公开(公告)日：2003-08-21

申请号：US10082480

申请日：2002-02-20

Applicant: Applied Materials, Inc.

Inventor： Michael Feltsman ,  Allen Lau ,  Michael Rosenstein ,  Marc O. Schweitzer

IPC: C23C014/00 ,  B05C011/00 ,  C23C016/00 ,  B05C011/11

CPC classification number: C23C14/566

Abstract: The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.

公开(公告)号：US20030101932A1

公开(公告)日：2003-06-05

申请号：US10223471

申请日：2002-08-20

Applicant: Samsung NEC Mobile Display Co., Ltd.

Inventor： Chang Ho Kang

IPC: B05C011/11

CPC classification number: H01L51/56 ,  C23C14/042 ,  H01L51/001

Abstract: A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.

Abstract translation: 用于真空沉积有机电致发光器件的薄膜的掩模框架组件。 面罩框架组件包括具有开口的框架和至少两个单元掩模，每个单元掩模在单元掩模的方向上具有至少一个单元掩模图案部分和在张力下固定到框架的两个边缘。