公开(公告)号：US20040265493A1

公开(公告)日：2004-12-30

申请号：US10875075

申请日：2004-06-23

Inventor： Tsuyoshi Mizuno ,  Yuuichi Mikata ,  Kimihide Saito

IPC: C23C014/06 ,  B05C005/00 ,  B05C011/00

CPC classification number: H01L21/6715

Abstract: Film coating unit has a substrate holder for holding a wafer, a coating solution discharge nozzle, and anti-drying boards opposed to a surface of the wafer. The coating solution is applied to the surface of the wafer in a direction from a front end toward a rear end of the wafer while relatively moving the substrate holder with respect to the coating solution discharge nozzle. During that time, the anti-drying boards are disposed at height of maximum 2 mm from the surface of the wafer so as to form dense atmosphere of a solvent between the surface of the wafer and the anti-drying board. Thereby the coating solution on or over the surface of the wafer is restrained from being dried and a coating film is formed with even thickness on or over the surface of the wafer.

Abstract translation: 薄膜涂布单元具有用于保持晶片的基板保持器，涂布液排出喷嘴和与晶片的表面相对的防干燥板。 在将基板保持件相对于涂布液排出喷嘴相对移动的同时，将涂布液从晶片的前端朝向后端的方向施加到晶片的表面。 在此期间，防干燥板设置在与晶片表面最大2mm的高度处，以在晶片表面和防干燥板之间形成致密的溶剂气氛。 由此，抑制晶片表面上或上方的涂层溶液的干燥，并且在晶片的表面上或上方形成均匀厚度的涂膜。

公开(公告)号：US20040255852A1

公开(公告)日：2004-12-23

申请号：US10624778

申请日：2003-07-22

Applicant: Glass Equipment Development, Inc.

Inventor： William A. Briese ,  Timothy Bryan McGlinchy

IPC: B05D005/00 ,  B05D005/06 ,  B05C011/00

CPC classification number: E06B3/67321 ,  B05C5/0216 ,  E04F21/28 ,  E06B3/24 ,  E06B3/64 ,  E06B3/66361 ,  E06B2003/6638 ,  E06B2003/67378 ,  Y10T156/1798

Abstract: A system for controlled dispensing of a material onto an elongated window component. A nozzle dispenses the material into contact with a surface of the elongated window component at a delivery site located along a path of travel of the elongated window component. A conveyer moves the elongated window component along the path of travel relative to the nozzle at a controlled speed. A metering pump delivers controlled amounts of the material to the nozzle. A pressurized bulk supply delivers the material to an inlet to the metering pump. A controller regulates the speed of the metering pump to control the flow rate of the material dispensed by the nozzle.

Abstract translation: 用于将材料受控地分配到细长的窗口部件上的系统。 喷嘴在沿着细长窗部件的行进路径定位的输送位置处将材料分配成与细长窗部件的表面接触。 输送机以可控速度相对于喷嘴沿着行进路径移动细长的窗口部件。 计量泵将受控量的材料输送到喷嘴。 加压散装料将材料输送到计量泵的入口。 控制器调节计量泵的速度以控制由喷嘴分配的材料的流速。

公开(公告)号：US20040255848A1

公开(公告)日：2004-12-23

申请号：US10816894

申请日：2004-04-05

Applicant: Seiko Epson Corporation

Inventor： Ichio Yudasaka

IPC: B05C011/00

CPC classification number: H01L21/67173 ,  H01L21/02532 ,  H01L21/02628 ,  H01L21/6715 ,  H01L21/67207 ,  H01L27/1292 ,  H01L29/66757 ,  Y10T29/41

Abstract: A coating apparatus coats a liquid material on a substrate in a coating chamber. A first liquid supply system that supplies the liquid material is provided in the coating chamber. A second liquid supply system is provided in the first liquid supply system that supplies a liquid that cleans or that deactivates the liquid material remaining in the coating chamber and/or in the first liquid supply system. A coating apparatus, a thin film forming method, a thin film forming apparatus, a semiconductor device manufacturing method, an electro-optic device, and an electronic instrument are provided that enable a high performance thin film with few defects and with a high degree of reproducibility to be obtained, that allow maintenance of the apparatus to be performed efficiently and safely, and that enable a thin film to be formed at low cost.

Abstract translation: 涂布装置在涂布室中的基材上涂布液体材料。 供给液体材料的第一液体供给系统设置在涂布室中。 第二液体供应系统设置在第一液体供应系统中，该系统提供清洗或者使残留在涂覆室和/或第一液体供应系统中的液体物质失活的液体。 提供一种涂布装置，薄膜​​形成方法，薄膜形成装置，半导体装置制造方法，电光装置和电子仪器，其能够实现具有少量缺陷和高度的高性能薄膜 可再现性，使得能够有效且安全地进行设备的维护，并且能够以低成本形成薄膜。

公开(公告)号：US20040247775A1

公开(公告)日：2004-12-09

申请号：US10455315

申请日：2003-06-06

Inventor： Dennis R. Boulais ,  Samuel J. Epstein ,  Wendy Naimark ,  Praveen Kulkarni

IPC: A61L002/00 ,  B05D003/00 ,  B05C011/00

CPC classification number: B05C5/0216 ,  B05C17/0103

Abstract: The present invention provides an apparatus and method that uses positive displacement of coating material using a computer controlled, motorized dispensing device. The flow rate of the dispensing device is controlled, and the positive displacement apparatus and method result in a precise amount of coating that is dispensed. The positive displacement coating apparatus and method allow for much more accurate and consistent coating from part to part. Because the positive displacement coating apparatus precisely controls the flow rate of the coating, differences in viscosity of the coating do not adversely affect the amount of the coating that is dispensed. In addition, the fluid flow path or pressure differential do not adversely affect the amount of the coating that is dispensed.

Abstract translation: 本发明提供使用计算机控制的电动分配装置使用涂层材料的正位移的装置和方法。 控制分配装置的流量，并且正位移装置和方法导致分配的精确的涂层量。 正位移涂布装置和方法允许从一部分到另一部分更加精确和一致的涂层。 因为正位移涂布装置精确地控制涂层的流速，所以涂层的粘度差不会对被分配的涂层的量产生不利影响。 此外，流体流动路径或压差不会对所分配的涂层的量产生不利影响。

公开(公告)号：US20040191415A1

公开(公告)日：2004-09-30

申请号：US10684739

申请日：2003-10-14

Applicant: Nordson Corporation

Inventor： Gary J. Brewer

IPC: B05D005/00 ,  B05C011/00

CPC classification number: B05B9/03 ,  B05B1/04 ,  B05B12/00 ,  H05K3/0091 ,  H05K2201/0989 ,  H05K2203/1366 ,  H05K2203/1509

Abstract: A system and method for dispensing liquid coating patterns of varying width. The system uses a film coater, a liquid supply coupled in fluid communication with the film coater and configured to supply liquid to the film coater under pressure, and a liquid pressure regulator operatively connected to the coater. The liquid pressure regulator selectively adjusts the pressure of the liquid supplied to the film coater and is operated by pressurized air. A selector valve is coupled to the liquid pressure regulator. First and second air pressure regulators are coupled to the selector valve and can selectively deliver air at first and second pressures to the selector valve. The selector valve is moved between first and second positions for selectively delivering air under either the first pressure or the second pressure to the liquid pressure regulator to thereby cause the liquid to be delivered to the film coater at different pressures to change the width of the dispensed pattern.

Abstract translation: 一种用于分配不同宽度的液体涂层图案的系统和方法。 该系统使用薄膜涂布机，液体供应源与薄膜涂布机流体连通并且被配置为在压力下将液体供应到薄膜涂布机，以及可操作地连接到涂布机的液体压力调节器。 液体压力调节器选择性地调节供应到薄膜涂布机的液体的压力并由加压空气操作。 选择阀连接到液压调节器。 第一和第二空气压力调节器联接到选择阀，并且可以选择性地将第一和第二压力的空气输送到选择阀。 选择阀在第一和第二位置之间移动，用于在第一压力或第二压力下选择性地将空气输送到液压调节器，从而使液体以不同的压力输送到膜涂布机，以改变分配的 模式。

公开(公告)号：US20040173148A1

公开(公告)日：2004-09-09

申请号：US10790081

申请日：2004-03-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seong-Bong Kim ,  Dong-Uk Choi

IPC: B05C005/00 ,  B05C011/00

CPC classification number: G03C1/74 ,  B05C5/0208 ,  B05C5/0254 ,  B05C5/027 ,  B05C11/1015

Abstract: A coating apparatus includes support for supporting a mother substrate including unit substrates, a coater for coating the unit substrate with photosensitive materials, a detector for detecting foreign matters, a remover for removing the foreign matters from the unit substrate, and a controller for controlling the coater, detector, and remover. The coater includes a body containing the photosensitive materials, and inlet and outlet portions for inputting and outputting the photosensitive materials to/from the body. A width of the outlet portion is the same as that of the unit substrate. The detector is positioned at front of the coater to detect the foreign matters before the coating process. The remover removes the foreign matters. The coater discharges the photosensitive material only onto the unit substrate. Discharging of the photosensitive material is interrupted when the foreign matters are found. The coating apparatus requires less photosensitive material, and can be more efficient

Abstract translation: 涂布装置包括用于支撑包括单元基板的母基板的支撑体，用感光材料涂覆单元基板的涂布机，用于检测异物的检测器，用于从单元基板除去异物的去除器，以及控制器 涂布机，检测器和去除器。 涂布机包括含有感光材料的主体，以及用于向/从身体输入和输出感光材料的入口和出口部分。 出口部分的宽度与单元基板的宽度相同。 检测器位于涂布机前面，以便在涂布过程之前检测异物。 去除剂除去异物。 涂布机仅将感光材料排放到单元基板上。 当发现异物时，感光材料的放电中断。 涂布设备需要较少的感光材料，并且可以更有效率

公开(公告)号：US20040131778A1

公开(公告)日：2004-07-08

申请号：US10732072

申请日：2003-12-10

Inventor： Bart Verhoest ,  Bart Verlinden ,  Eddi Daems ,  Luc Leenders ,  Kris Vangeel ,  Wim Helsen

IPC: B05D001/36 ,  B05D003/06 ,  B05C011/00 ,  B05D005/00 ,  B05B007/00

CPC classification number: B41C1/003

Abstract: Upon a substrate subsequent layers of elastic ink are jetted using an ink jet printing system. Each layer is immobilised by a immobilisation step before jetting the following layer. A printing relief is gradually formed to obtain a flexographic printing plate allowing accurate control over the relief and slopes of the printing plates. Use can be made of different inks or immobilisation step to obtain different layer characteristics. Inks can be immobilised using UV curing. The recorded relief of the layers can be measured and corrections can be applied using a feed-back loop. A rejuvenation process for printing plates can be constructed using the described method. An elastic base layer can be provided on the substrate to provide better plate characteristics.

Abstract translation: 在使用喷墨打印系统喷射随后的弹性墨水层的基板上。 每个层通过固定步骤固定，然后喷射下一层。 逐渐形成印刷浮雕以获得柔性版印版，从而可以精确地控制印版的浮雕和斜面。 可以使用不同的油墨或固定步骤来获得不同的层特征。 油墨可以使用UV固化固定。 可以测量层的记录浮雕，并且可以使用反馈回路来进行校正。 可以使用所描述的方法构建印版的复原过程。 可以在基板上设置弹性基层以提供更好的板特性。

公开(公告)号：US20040131757A1

公开(公告)日：2004-07-08

申请号：US10717717

申请日：2003-11-21

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Sung-Su Jung ,  Yong-Keun Kwak

IPC: B05D001/02 ,  B05D001/00 ,  B05C011/00

CPC classification number: B05B12/122

Abstract: An apparatus for aligning a dispenser includes: a table that can move horizontally in forward/backward and left/right directions for receiving a substrate of at least one liquid crystal display panel; first and second dummy aligning plates on the table with a certain space therebetween; a syringe for supplying a sealant onto the first and second dummy aligning plates to form first and second alignment patterns; a first image camera for detecting an image of the first alignment pattern; a second image camera for detecting an image of the second alignment pattern; and an alignment controller for aligning the image of the first image camera with a first reference position and the image of the second image camera with a second reference position.

Abstract translation: 用于对准分配器的装置包括：能够在前后/左右方向上水平移动的台，用于接收至少一个液晶显示面板的基板; 第一和第二虚拟对准板在桌子上具有一定的间隔; 用于将密封剂供应到第一和第二虚拟对准板上以形成第一和第二对准图案的注射器; 用于检测第一对准图案的图像的第一图像摄像机; 用于检测第二对准图案的图像的第二图像相机; 以及对准控制器，用于将第一图像相机的图像与第一参考位置对准，并且具有第二参考位置的第二图像相机的图像。

公开(公告)号：US20040114988A1

公开(公告)日：2004-06-17

申请号：US10728435

申请日：2003-12-05

Applicant: 3M Innovative Properties Company

Inventor： Nicholas R. Baumann ,  Matthew T. Scholz ,  Robert P. Zaspel ,  Kent E. Lageson ,  Claude E. Cybulski

IPC: B05C011/00 ,  B43K005/00

CPC classification number: A61M35/006 ,  A61B17/20 ,  A61M35/003 ,  B65D35/36 ,  B65D35/56 ,  B65D47/42

Abstract: Systems and methods for applying or dispensing surgical prep solution are disclosed. The applicator system includes a spreader element and a container of surgical prep solution. The spreader element includes a body with an orifice covered by a pad. The orifice is in fluid communication with a passage through an elongated stem connected to the body. The container may be collapsible with only limited recovery. The spreader element may include a receptacle for receiving the container.

Abstract translation: 公开了用于施加或分配外科手术制剂溶液的系统和方法。 涂抹器系统包括扩张器元件和手术准备溶液的容器。 吊具元件包括具有由垫覆盖的孔口的主体。 孔与通过连接到身体的细长杆的通道流体连通。 容器可能只有有限的回收可折叠。 吊具元件可以包括用于容纳容器的容器。

公开(公告)号：US20040108213A1

公开(公告)日：2004-06-10

申请号：US10314776

申请日：2002-12-09

Inventor： Robert T. Talasek ,  Marc Van den Berg ,  William F. Ryann

IPC: C25D005/00 ,  B05C011/00

CPC classification number: C25D7/12 ,  C23C18/1617 ,  C23C18/1683 ,  C23C18/38 ,  C25D17/001 ,  C25D21/12

Abstract: A method of plating bath composition control. The method may include analysis of a plating bath to determine byproduct concentrations and changing the composition of the plating bath as a result thereof. Additionally, plating bath solution may be circulated between reservoirs before, during, or after the analysis and the changing of the composition. Methods may be carried out with use of a system having separate reservoirs, an analyzer, and a dosing controller for the changing of the composition.

Abstract translation: 镀浴组合物控制方法。 该方法可以包括电镀浴的分析，以确定副产物浓度并改变其镀液的组成。 此外，电镀液溶液可以在分析之前，期间或之后在组合物变化之间在储存器之间循环。 方法可以使用具有单独储存器的系统，分析器和用于改变组成的计量控制器来进行。