公开(公告)号：US07831528B2

公开(公告)日：2010-11-09

申请号：US12399011

申请日：2009-03-05

申请人： Srinivas Doddi ,  Emmanuel Drege ,  Nickhil Jakatdar ,  Junwei Bao

发明人： Srinivas Doddi ,  Emmanuel Drege ,  Nickhil Jakatdar ,  Junwei Bao

IPC分类号： G06F15/18 ,  G01R31/26 ,  G01R31/303

CPC分类号： G01B11/24 ,  G06N99/005

摘要： A structure formed on a semiconductor wafer is examined by obtaining a first diffraction signal measured using a metrology device. A second diffraction signal is generated using a machine learning system, where the machine learning system receives as an input one or more parameters that characterize a profile of the structure to generate the second diffraction signal. The first and second diffraction signals are compared. When the first and second diffraction signals match within a matching criterion, a feature of the structure is determined based on the one or more parameters or the profile used by the machine learning system to generate the second diffraction signal.

摘要翻译： 通过获得使用测量装置测量的第一衍射信号来检查形成在半导体晶片上的结构。 使用机器学习系统生成第二衍射信号，其中机器学习系统作为输入接收表征结构的轮廓以产生第二衍射信号的一个或多个参数。 比较第一和第二衍射信号。 当第一和第二衍射信号在匹配标准内匹配时，基于机器学习系统用于生成第二衍射信号的一个或多个参数或轮廓来确定该结构的特征。

公开(公告)号：US20090224792A1

公开(公告)日：2009-09-10

申请号：US12041826

申请日：2008-03-04

申请人： Jeanne Paulette Spence Bickford ,  Nazmul Habib ,  Robert McMahon

发明人： Jeanne Paulette Spence Bickford ,  Nazmul Habib ,  Robert McMahon

IPC分类号： G01R31/26 ,  G01R31/303

CPC分类号： G01R31/3008 ,  G01R31/2856

摘要： A method is provided for predicting leakage current in a semiconductor die with a plurality of devices. A limited leakage macro is incorporated on the semiconductor die. The limited leakage macro is initially tested to measure a leakage current before testing devices outside the limited leakage macro. The measured leakage current is compared to a threshold value for the leakage current. If the leakage current exceeds the threshold value, probe testing is terminated. If, however, the leakage current does not exceed the threshold value, testing continues for devices outside of the limited leakage macro.

摘要翻译： 提供一种用于利用多个器件预测半导体管芯中的漏电流的方法。 在半导体管芯上并入有限的泄漏宏。 在有限的泄漏宏之外测试设备之前，初始测试有限的泄漏宏测量泄漏电流。 将测得的漏电流与泄漏电流的阈值进行比较。 如果泄漏电流超过阈值，则探头测试终止。 然而，如果泄漏电流不超过阈值，则对有限泄漏宏之外的设备进行测试。

公开(公告)号：US20090085589A1

公开(公告)日：2009-04-02

申请号：US11865076

申请日：2007-10-01

申请人： PINGFU HSIEH ,  Juili Sun ,  Mingkun Chen

发明人： PINGFU HSIEH ,  Juili Sun ,  Mingkun Chen

IPC分类号： G01R31/303

CPC分类号： G01R31/2822 ,  G01R31/308 ,  G06K19/0722 ,  G06K19/0723 ,  G06K19/07749

摘要： A wafer level testing method for RFID tags is disclosed. The method comprises: providing a semiconductor wafer having a plurality of RFID tag chips, wherein each of the RFID tag chips includes at least one detachable inductance and an embedded capacitance to form a resonant circuit; exposing the RFID tag chips to microwave energy, wherein the RFID tag chips send a plurality of wireless signals after a wireless power conversion; receiving the wireless signals and calculating a power level thereof; and comparing the power level to a predetermined power level to obtain the wafer yield.

摘要翻译： 公开了一种用于RFID标签的晶片级测试方法。 该方法包括：提供具有多个RFID标签芯片的半导体晶片，其中每个RFID标签芯片包括至少一个可拆卸电感和嵌入电容以形成谐振电路; 将RFID标签芯片暴露于微波能量，其中RFID标签芯片在无线电力转换之后发送多个无线信号; 接收无线信号并计算其功率电平; 并且将功率电平与预定功率电平进行比较以获得晶片产量。

公开(公告)号：US20080180588A1

公开(公告)日：2008-07-31

申请号：US12017679

申请日：2008-01-22

申请人： Naoki Ando

发明人： Naoki Ando

IPC分类号： G09G3/36 ,  G01R31/303

CPC分类号： G09G3/006 ,  G09G3/3648 ,  G09G2300/0408 ,  G09G2300/0426

摘要： The present invention provides a driver, including: data lines disposed in parallel with each other; gate lines disposed in parallel with each other and at right angles to the data lines so as to be electrically insulated from the data lines; odd-numbered pixel cell connected to the odd-numbered data line from the head one, and the odd-numbered gate line from the head one; even-numbered pixel cell connected to the even-numbered data line from the head one, and the even-numbered gate line from the head one; driving means for driving the odd-numbered gate lines and the even-numbered gate lines independently of each other; inputting means for inputting a signal having a predetermined potential to each of the odd-numbered gate lines and the even-numbered gate lines; and comparing means for comparing potentials of the each adjacent odd-numbered data line and even-numbered data line with each other, and outputting a comparison result.

摘要翻译： 本发明提供一种驱动器，包括：彼此平行设置的数据线; 栅极线彼此平行设置并与数据线成直角，从而与数据线电绝缘; 从头一连接到奇数编号数据线的奇数像素单元，以及来自头一的奇数编号的栅极线; 从头一连接到偶数数据线的偶数像素单元和来自头​​一的偶数编号的栅极线; 驱动装置，用于彼此独立地驱动奇数编号的栅极线和偶数栅极线; 输入装置，用于向每个奇数编号的栅极线和偶数的栅极线输入具有预定电位的信号; 以及比较装置，用于将每个相邻的奇数数据线和偶数数据线的电位相互比较，并输出比较结果。

公开(公告)号：US20080079448A1

公开(公告)日：2008-04-03

申请号：US11949325

申请日：2007-12-03

申请人： Chandler McDowell ,  Stanislav Polonsky ,  Peilin Song ,  Franco Stellari ,  Alan Weger

发明人： Chandler McDowell ,  Stanislav Polonsky ,  Peilin Song ,  Franco Stellari ,  Alan Weger

IPC分类号： G01R31/303

CPC分类号： G01R31/311

摘要： Methods and arrangements to enhance photon emissions responsive to a signal within an integrated circuit (IC) for observability of signal states utilizing, e.g., picosecond imaging circuit analysis (PICA), are disclosed. Embodiments attach a beacon to the signal of interest and apply a voltage across the beacon to enhance photon emissions responsive to the signal of interest. The voltage is greater than the operable circuit voltage, Vd, the enhance photon emissions with respect to intensity and energy. Thus, the photon emissions are more distinguishable from noise. In many embodiments, the beacon includes a transistor and, in several embodiments, the beacon includes an enablement device to enable and disable photon emissions from the beacon. Further, a PICA detector may capture photon emissions from the beacon and process the photons to generate time traces.

摘要翻译： 公开了利用例如皮秒成像电路分析（PICA）来增强响应于集成电路（IC）内的信号的信号状态的可观察性的光子发射的方法和装置。 实施例将信标连接到感兴趣的信号，并在信标之间施加电压以增强响应于感兴趣的信号的光子发射。 电压大于可操作电路电压Vd，相对于强度和能量增强光子发射。 因此，光子发射与噪声更为区别。 在许多实施例中，信标包括晶体管，并且在几个实施例中，信标包括启用和禁用来自信标的光子发射的启用装置。 此外，PICA检测器可以捕获来自信标的光子发射并处理光子以产生时间迹线。

公开(公告)号：US06970004B2

公开(公告)日：2005-11-29

申请号：US10803932

申请日：2004-03-19

申请人： Tohru Ishitani ,  Hidemi Koike ,  Aritoshi Sugimoto ,  Isamu Sekihara ,  Kaoru Umemura ,  Satoshi Tomimatsu ,  Junzo Azuma

发明人： Tohru Ishitani ,  Hidemi Koike ,  Aritoshi Sugimoto ,  Isamu Sekihara ,  Kaoru Umemura ,  Satoshi Tomimatsu ,  Junzo Azuma

IPC分类号： G01R31/265 ,  G01R31/28 ,  G01R31/302 ,  G01R31/303 ,  G01R31/305 ,  G01R31/307 ,  G01R31/311 ,  H01J37/20 ,  H01J37/28 ,  G01R31/00 ,  G01R31/26 ,  H01L27/00

CPC分类号： G01R31/311 ,  G01R31/2851 ,  G01R31/303

摘要： Disconnection defects, short-circuit defects and the like in wiring patterns of submicron sizes within TEGs (a square of 1 to 2.5 mm for each) numerously arranged in a large chip (a square of 20 to 25 mm) can be inspected with respect to all the TEGs, with good operability, high reliability and high efficiency. A conductor probe for applying voltage to the wiring patterns by mechanical contact is composed of synchronous type conductor probe that synchronizes with movement of a sample stage (16), and fixed type conductor probe means (21) that is relatively fixed to an FIB generator (10). Positions of probe tips are superimposed to an SIM image and displayed on a display unit (19).

摘要翻译： 可以在大芯片（20〜25mm的正方形）内大量排列的TEG（每个为1〜2.5mm的方形）内的亚微米尺寸的布线图案中的断路缺陷，短路缺陷等相对于 所有的TEG，具有良好的可操作性，高可靠性和高效率。 用于通过机械接触对布线图案施加电压的导体探针由与样品台（16）的移动同步的同步型导体探针和相对固定于FIB发生器的固定型导体探针装置（21）组成， 10）。 探针尖端的位置叠加到SIM图像上并显示在显示单元上（19）。

公开(公告)号：US20050068051A1

公开(公告)日：2005-03-31

申请号：US10672804

申请日：2003-09-27

申请人： Curtis Tesdahl ,  Ronald Peiffer

发明人： Curtis Tesdahl ,  Ronald Peiffer

IPC分类号： G01R31/303 ,  G01R31/312 ,  G01R31/302

CPC分类号： G01R31/312

摘要： Disclosed is a novel method and apparatus for acquiring multiple capacitively sensed measurements from a circuit under test. Multiple digital sources are respectively connected to stimulate multiple respective first ends of multiple respective nets of interest. Respective second ends of the multiple respective nets of interest are capacitively sensed. The respective capacitively coupled signals are digitally sampled and shift correlated with respective expected digital signatures. If a high level of correlation is found for a given net, the net is electrically intact; otherwise, the net is characterized by either an open or some other fault that prevents it from meeting specification.

摘要翻译： 公开了一种用于从被测电路获取多个电容感测测量的新颖方法和装置。 多个数字源分别连接以刺激多个相关感兴趣的网络的多个相应的第一端。 感兴趣的多个相应的网络的相应的第二端被电容性地感测。 相应的电容耦合信号被数字采样并与相应的预期数字签名相关。 如果给定网络发现高水平的相关性，网络是电气完整的; 否则，网络的特征在于打开或其他一些故障，阻止其满足规范。

公开(公告)号：US20050001608A1

公开(公告)日：2005-01-06

申请号：US10656006

申请日：2003-09-04

申请人： Brian Peng ,  Michael Tsai

发明人： Brian Peng ,  Michael Tsai

IPC分类号： G01R23/165 ,  G01R31/28 ,  G01R31/303 ,  G01R31/3167

CPC分类号： G01R31/3167 ,  G01R31/2817

摘要： A board for testing DVD (Digital Versatile Disc) ROM (Read Only Memory) chip-set and associated circuit for generating radio frequency signals with phase difference are provided. The circuit includes signal potential dividers, high pass filters, and a phase shifter. The circuit receives a digital input signal, which has a predetermined frequency, generated by a chip test device. The radio frequency signals with phase difference for testing the analog circuit block of DVD ROM chipset are generated according to the received digital input signal. Therefor, the high temperature operating life test for optical disc drive chips can be achieved.

摘要翻译： 提供了用于测试具有相位差的射频信号的DVD（数字通用盘）ROM（只读存储器）芯片组和相关电路的板。 该电路包括信号电位分配器，高通滤波器和移相器。 电路接收由芯片测试装置产生的具有预定频率的数字输入信号。 根据接收的数字输入信号产生具有用于测试DVD ROM芯片组的模拟电路块的相位差的射频信号。 因此，可以实现光盘驱动器芯片的高温工作寿命测试。

公开(公告)号：US6161205A

公开(公告)日：2000-12-12

申请号：US193002

申请日：1998-11-16

申请人： Mark E. Tuttle

发明人： Mark E. Tuttle

IPC分类号： G01R31/01 ,  G01R31/28 ,  G01R31/303

CPC分类号： G01R31/303 ,  G01R31/01 ,  G01R31/2822 ,  G01R31/3025 ,  G06K7/0095 ,  G06K19/0701

摘要： A testing system evaluates one or more integrated circuit chips using RF communication. The system includes an interrogator unit with a radio communication range, and an IC chip adapted with RF circuitry positioned remotely from the interrogator unit, but within the radio communication range. The interrogator unit transmits a power signal to energize the IC chip during test procedures, and interrogating information for evaluating the operation of the IC chip. Test results are transmitted by the IC chip back to the interrogator unit for examination to determine whether the IC chip has a defect. In this manner, one or more IC chips can be evaluated simultaneously without physically contacting each individual chip.

摘要翻译： 测试系统使用RF通信来评估一个或多个集成电路芯片。 该系统包括具有无线电通信范围的询问器单元，以及适于远离询问器单元但在无线电通信范围内的RF电路的IC芯片。 询问器单元在测试过程期间发送功率信号以激励IC芯片，以及询问用于评估IC芯片的操作的信息。 测试结果由IC芯片发送回询问单元进行检查，以确定IC芯片是否有缺陷。 以这种方式，可以同时评估一个或多个IC芯片，而不物理地接触每个单独的芯片。

公开(公告)号：US6058497A

公开(公告)日：2000-05-02

申请号：US979607

申请日：1992-11-20

申请人： Mark E. Tuttle

发明人： Mark E. Tuttle

IPC分类号： G01R31/01 ,  G01R31/28 ,  G01R31/303 ,  G06F11/00

CPC分类号： G01R31/303 ,  G01R31/01 ,  G01R31/2822 ,  G01R31/3025 ,  G06K19/0701 ,  G06K7/0095

摘要： A testing system evaluates one or more integrated circuit chips using RF communication. The system includes an interrogator unit with a radio communication range, and an IC chip adapted with RF circuitry positioned remotely from the interrogator unit, but within the radio communication range. The interrogator unit transmits a power signal to energize the IC chip during test procedures, and interrogating information for evaluating the operation of the IC chip. Test results are transmitted by the IC chip back to the interrogator unit for examination to determine whether the IC chip has a defect. In this manner, one or more IC chips can be evaluated simultaneously without physically contacting each individual chip.