公开(公告)号：US20040007943A1

公开(公告)日：2004-01-15

申请号：US10395674

申请日：2003-03-24

发明人： Akihiro Iino ,  Koji Nitadori ,  Masao Kasuga

IPC分类号： H02N002/00 ,  H01L041/04 ,  H01L041/06

CPC分类号： H02N2/0075

摘要： To provide a control system provided with a positioning mechanism including plural ultrasonic motors in the device, which can keep good operational stability as compared with a conventional system with a servo mechanism, is of an energy saving type suppressing power consumption and is compact in structure including the motor and a control circuit therefor. A control circuit in a control system of the present invention uses a common drive control circuit for a plurality of ultrasonic motors among the positioning mechanisms in which when the drive control circuit inputs a signal that specifies any ultrasonic motor and a desired-position designation signal, the drive control circuit conducts control operation that transmits an on signal to a driver of the subject motor to start the driving, and stops the driving when the motor reaches a desired position while receiving a position detection signal. Thus, the control system has a function of transmitting a signal indicating that the positioning operation is being conducted from a time point when commands are received to a time point when the positioning operation is completed. Then, an error signal is outputted when the motor is out of the desired position.

摘要翻译： 为了提供一种具有定位机构的控制系统，与具有伺服机构的传统系统相比，该装置中包括多个超声波马达的定位机构能够保持良好的运行稳定性，是节能型的抑制功率消耗，结构紧凑，包括 电机及其控制电路。 本发明的控制系统中的控制电路在定位机构中使用用于多个超声波马达的公共驱动控制电路，其中当驱动控制电路输入指定任何超声波马达的信号和期望位置指定信号时， 驱动控制电路进行向目标马达的驾驶员发送接通信号的控制动作，开始驱动，在接收到位置检测信号时电动机达到期望位置时停止驱动。 因此，控制系统具有从指令接收的时刻到定位动作完成的时刻发送表示进行定位动作的信号的功能。 然后，当电机超出所需位置时，输出错误信号。

公开(公告)号：US20030200823A1

公开(公告)日：2003-10-30

申请号：US10324685

申请日：2002-12-19

发明人： Brian T. Cunningham ,  John R. Williams

IPC分类号： G01P015/09 ,  H04R017/00 ,  H01L041/22 ,  H01L041/04 ,  H01L041/18

CPC分类号： G01N29/022 ,  G01N29/22 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0427 ,  G01N2291/106 ,  Y10T29/42 ,  Y10T29/49007

摘要： A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer and forming a second transducer on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity through the substrate, the cavity having substantially parallel interior walls, removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.

公开(公告)号：US20030178914A1

公开(公告)日：2003-09-25

申请号：US10246400

申请日：2002-09-19

申请人： ,  KAWATETSU MINING CO., LTD.

发明人： Toshio Ogawa ,  Mitsuyoshi Matsushita ,  Yoshihito Tachi

IPC分类号： H02N002/00 ,  H01L041/04

CPC分类号： H01L41/257 ,  H01L41/1875

摘要： A domain controlled piezoelectric single crystal is disclosed which uses a lateral vibration mode for an electromechanical coupling factor k31 not less than 70% and a piezoelectric constant nulld31 not less than 1200 pC/N, with an electromechanical coupling factor k33 in the longitudinal vibration mode not less than 80% and a piezoelectric constant d33 not less than 800 pC/N. Also, a piezoelectric single crystal is disclosed which uses a high-performance longitudinal vibration mode with k31 not more than 30%. A fabrication method applies a DC electric field of 400 V/mm to 1500 V/mm for a maximum of two hours in a temperature range of 20null C. to 200null C. as polarization conditions in the thickness direction of the piezoelectric single crystal. The method can include cooling, or heating and cooling between temperature boundaries of rhombohedral and tetragonal crystals or between tetragonal and cubic crystals or within a cubic crystal temperature range.

摘要翻译： 公开了一种域控压电单晶，其使用侧向振动模式用于机电耦合系数k31不小于70％，压电常数-d31不小于1200pC / N，而机械耦合系数k33在纵向振动模式 不小于80％，压电常数d33不低于800pC / N。 此外，公开了使用k31不高于30％的高性能纵向振动模式的压电单晶。 制造方法在20℃至200℃的温度范围内将400V / mm至1500V / mm的DC电场最大化为2小时，作为压电单晶的厚度方向的极化条件 。 该方法可以包括在菱方体晶体和四方晶体的温度边界之间或四方晶体和立方晶体之间或在立方晶体温度范围内的冷却或加热和冷却。

公开(公告)号：US20030164661A1

公开(公告)日：2003-09-04

申请号：US10316572

申请日：2002-12-10

申请人： Sick Engineering GmbH

发明人： Guenther Pfeifer

IPC分类号： H01L041/04 ,  H02N002/00

CPC分类号： G01F1/662 ,  G01N29/02 ,  G01N29/222 ,  G01N29/223 ,  G01N29/24 ,  G01N29/32 ,  G01N2291/02836 ,  G01N2291/0421 ,  G01N2291/048 ,  G10K11/002 ,  G10K11/04

摘要： An ultrasonic transducer system which has an ultrasound transducer and a filter supporting the transducer. To suppress the transmission of ultrasound signals through a housing of the ultrasound transducer arrangement, the filter is provided with a vibration plate for emitting ultrasound waves and is coupled to a deflecting segment which converts radial movements of a first section of the filter into torsional movements of a second section of the filter.

摘要翻译： 超声换能器系统，其具有超声波换能器和支撑换能器的过滤器。 为了抑制超声波信号通过超声换能器装置的壳体的传输，滤波器设置有用于发射超声波的振动板，并且耦合到偏转段，该偏转段将滤波器的第一部分的径向运动转换成扭转运动 过滤器的第二部分。

公开(公告)号：US20030164657A1

公开(公告)日：2003-09-04

申请号：US09968820

申请日：2001-10-02

发明人： Kenji Inoue ,  Katsuo Sato ,  Hiroki Morikoshi ,  Katsumi Kawasaki ,  Jun Sato

IPC分类号： H01L041/04

CPC分类号： H03H9/02543

摘要： A compact and wide band surface acoustic wave device for intermediate-frequency is disclosed. A piezoelectric substrate for use in a surface acoustic wave device having high electromechanical coupling factor and low SAW velocity is also disclosed. The surface acoustic wave device is constituted of a piezoelectric substrate 1 and inter-digital electrodes 2, 2 formed on the piezoelectric substrate 1. The piezoelectric substrate 1 has a crystal structure of Ca3Ga2Ge4O14 and is represented by the chemical formula, Ca3TaGa3Si2O14. A cut angle of the piezoelectric substrate 1 cut out of the single crystal and a direction of propagation of surface acoustic waves on the piezoelectric substrate represented in terms of Euler's angles (null, null, null) are found in an area represented by null2.5nullnullnullnull2.5null, 30nullnullnullnull90null, and null65nullnullnullnull65null.

摘要翻译： 公开了一种用于中频的紧凑且宽带声表面波装置。 还公开了一种用于具有高机电耦合系数和低SAW速度的表面声波装置中的压电基片。 表面声波装置由压电基片1和形成在压电基片1上的数字间电极2,2构成。压电基片1具有Ca 3 Ga 2 Ge 4 O 14的晶体结构，由化学式Ca 3 Ta Ga 3 Si 2 O 14表示。 从欧姆角（phi，θ，psi）表示的压电基板上切出的压电基板1的切割角和压电基板上的表面声波的传播方向在-2.5° <= phi <= 2.5°，30°<=θ<= 90°，-65°<= psi <= 65°。

公开(公告)号：US20030155843A1

公开(公告)日：2003-08-21

申请号：US10393037

申请日：2003-03-19

发明人： Sheng-Dong Dunn ,  Chi-Zen Yeh ,  Jeng-Yow Jih

IPC分类号： H01L041/04

CPC分类号： B06B1/0614 ,  Y10T29/42

摘要： An underwater wide-band electroacoustic transducer and a method of packaging the transducer. The underwater wide-band electroacoustic transducer comprises of several groups of piezoelectric ceramic units and acoustic window material. To produce the underwater wide-band electroacoustic transducer, groups of piezoelectric ceramic units each having a different dimension are assembled such that each ceramic unit separates from each other by different distances. The frequency response of each ceramic unit groups are added together to provide a wide-band frequency response. The acoustic window material is injected to joins the ceramic unit groups together into a package.

公开(公告)号：US20030150429A1

公开(公告)日：2003-08-14

申请号：US10297348

申请日：2003-04-16

发明人： Johannes-Joerg Rueger

IPC分类号： F02M051/00 ,  H01L041/04

CPC分类号： F02D41/2096 ,  F02D2041/2034

摘要： A method of triggering a piezoelectric actuator which controls the injection of fuel into the combustion chamber of an internal combustion engine via a valve is described in which the operating situation of the engine is determined and the derivative with respect to time of the voltage, which can be picked off at the piezoelectric actuator, is selected as a function of the operating situation. Furthermore, a control unit for controlling a fuel injection system is described, in which a piezoelectric element is triggered in such a way that the derivative with respect to time of the voltage, which can be picked off at the piezoelectric actuator, is adjusted to the operating situation of the engine. Additionally described is a fuel injection system, having at least one piezoelectric actuator which is triggered accordingly.

摘要翻译： 描述了一种触发压缩致动器的方法，该压电致动器控制经由阀将燃料喷射到内燃机的燃烧室中，其中确定发动机的运行情况并且相对于电压的时间导数，其可以 在压电致动器处被拾取，作为操作情况的函数被选择。 此外，描述了一种用于控制燃料喷射系统的控制单元，其中以这样的方式触发压电元件，使得相对于在压电致动器处可被拾取的电压的时间的导数被调整为 发动机运行状况。 另外描述了一种燃料喷射系统，其具有相应地被触发的至少一个压电致动器。

公开(公告)号：US20030102779A1

公开(公告)日：2003-06-05

申请号：US10040360

申请日：2002-01-09

申请人： Samsung Electro-Mechanics Co., Ltd.

发明人： Jong Sun Kim ,  Jin Woo Park

IPC分类号： H01L041/04

CPC分类号： H01L41/107

摘要： Disclosed is a piezoelectric transformer capable of easily achieving external electrical connection and polarization of electrodes while obtaining stable output characteristics. The piezoelectric transformer includes a piezoelectric member having two opposite rectangular major surfaces as first and second surfaces, and four side surfaces connecting the first and second surfaces. The piezoelectric member is longitudinally divided into two portions to have a first portion and a second portion, thereby longitudinally dividing each of the first and second surfaces into a first surface portion and a second surface portion. The piezoelectric transformer also includes an input electrode formed on the first surface portion of the first surface of the piezoelectric member, a ground electrode formed on the first surface portion of the second surface of the piezoelectric member while being vertically symmetrical with the input electrode, and an output electrode formed on the second portion of the piezoelectric member at an end of the second portion spaced away from the input electrode.

摘要翻译： 公开了一种能够容易地获得电极的外部电连接和极化同时获得稳定的输出特性的压电变压器。 压电变压器包括具有作为第一和第二表面的两个相对的矩形主表面和连接第一表面和第二表面的四个侧表面的压电元件。 压电构件纵向分成两部分，以具有第一部分和第二部分，从而将第一和第二表面中的每一个纵向分成第一表面部分和第二表面部分。 压电变压器还包括形成在压电元件的第一表面的第一表面部分上的输入电极，形成在压电元件的第二表面的第一表面部分上并与输入电极垂直对称的接地电极，以及 在所述第二部分的与所述输入电极间隔开的端部处形成在所述压电部件的所述第二部分上的输出电极。

公开(公告)号：US20030088960A1

公开(公告)日：2003-05-15

申请号：US10140199

申请日：2002-05-08

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： O-Gweon Seo ,  Chan-Bong Jun ,  Man-Geum Park

IPC分类号： H04R017/00 ,  H05K003/20 ,  H02N002/00 ,  H01L041/04

CPC分类号： H03H9/173 ,  H03H3/02 ,  H03H2003/021 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155

摘要： A method of fabricating an air gap type Film Bulk Acoustic Resonator (FBAR) is provided. The FBAR fabrication method includes: (a) depositing and patterning a sub-electrode on a semiconductor substrate; (b) depositing and patterning a piezoelectric material layer on the sub-electrode; (c) depositing and patterning an upper electrode on the piezoelectric material layer; (d) forming a hole which passes through the upper electrode, the piezoelectric material layer and the sub-electrode; and (e) injecting a fluorine compound into the hole so that an air gap can be formed on the semiconductor substrate, and non-plasma etching the semiconductor substrate. Since the FBAR fabrication method does not include forming and eliminating the sacrificial layer in the fabrication process, the fabrication process is simplified. In addition, the air gap having the limitless frequency selectivity can be formed and the performance of the FBAR can be enhanced.

摘要翻译： 提供了一种制造气隙型膜体积声谐振器（FBAR）的方法。 FBAR制造方法包括：（a）在半导体衬底上沉积和图案化子电极; （b）在子电极上沉积和图案化压电材料层; （c）在压电材料层上沉积和图案化上电极; （d）形成穿过上电极，压电材料层和副电极的孔; 和（e）将氟化合物注入到孔中，使得可以在半导体衬底上形成气隙，并且不对等离子体蚀刻半导体衬底。 由于FBAR制造方法不包括在制造工艺中形成和消除牺牲层，所以制造工艺简化。 此外，可以形成具有无限频率选择性的气隙，并且可以提高FBAR的性能。

公开(公告)号：US20030067252A1

公开(公告)日：2003-04-10

申请号：US09971292

申请日：2001-10-04

发明人： Alfredo Vazquez Carazo

IPC分类号： H01L041/04

CPC分类号： H01L41/107

摘要： A multilayer piezoelectric transformer is provided using a composite vibration modes for step-up voltage conversion applications. An input portion polarized to deform radially is bonded to an output portion via a bondline or constraint layer. The deformation of the central face of the input portion is constrained by the bonded output layer or constraint layer. The output layer is bonded to the input layer or constraint layer and also deforms radially. The differing freedom of motion between the layers creates a gradient of stress and strain in the thickness direction resulting in large shear forces along the input and output layers.The composite radial-shear mode deformation of the output portion piezoelectrically generates an efficient, stepped-up high output voltage.

摘要翻译： 使用用于升压电压转换应用的复合振动模式提供多层压电变压器。 偏振地径向变形的输入部经由接合线或约束层与输出部接合。 输入部分的中心面的变形由结合的输出层或约束层约束。 输出层结合到输入层或约束层，并且也径向变形。 层之间的不同运动自由度在厚度方向上产生应力和应变梯度，导致沿着输入和输出层的大的剪切力。输出部分的复合径向剪切模式变形压电产生有效的，加强的 高输出电压。