公开(公告)号：US5567929A

公开(公告)日：1996-10-22

申请号：US391709

申请日：1995-02-21

Applicant: Donald R. Ouimette

Inventor： Donald R. Ouimette

IPC: H01J31/28 ,  H01J31/26 ,  H01J31/38 ,  H01J31/49 ,  H01J40/14

CPC classification number: H01J31/26 ,  H01J31/38 ,  H01J2201/304 ,  H01J2201/30403 ,  H01J2231/50036 ,  H01J2231/50068

Abstract: A flat panel image sensor is provided by combining the photoconductive imaging electrode of a vidicon with a two dimensional array of cold cathode field emitters commonly used for flat panel Field Emission Display (FED) systems. The FED operates normally to emit electrons which are accelerated in prior art displays towards a luminescent phosphor to generate light output proportional to the cathode emission. Rather than accelerating towards a phosphor, electrons, in accordance with the principles of this invention, are accelerated towards a photoconductor layer to replace charge removed from the layer by an incident radiation pattern directed at the photoconductor layer through a layer of transparant, electrically-conducting material which serves as a radiation window. A large area, low cost, small, flat panel sensor is realized. The transparant, electrically-conducting layer may be partitioned to reduce stray capacitance for large area sensors and the partitioned, electrically-conducting layer permits a parallel readout mode of operation.

Abstract translation: 通过组合摄像机的光导成像电极和通常用于平板场发射显示（FED）系统的冷阴极场发射器的二维阵列来提供平板图像传感器。 FED正常工作以发射在现有技术显示器中朝向发光荧光体加速的电子，以产生与阴极发射成比例的光输出。 不是朝向磷光体加速，而是依照本发明的原理将电子加速到光电导体层，以通过指向光电导体层的入射辐射图形来替代从层移除的电荷，该层通过透明层，导电 用作辐射窗的材料。 实现了大面积，低成本，小型，平板传感器。 透明导电层可以被分隔以减小大面积传感器的杂散电容，并且分隔的导电层允许并行读出操作模式。

公开(公告)号：US5504385A

公开(公告)日：1996-04-02

申请号：US299470

申请日：1994-08-31

Applicant: Sungho Jin ,  Gregory P. Kochanski ,  John Thomson, Jr.

Inventor： Sungho Jin ,  Gregory P. Kochanski ,  John Thomson, Jr.

IPC: H01J1/304 ,  H01J9/02 ,  H01J31/12 ,  H01J1/30

CPC classification number: H01J9/025 ,  H01J2201/30403 ,  H01J2201/30457 ,  H01J2329/00

Abstract: In accordance with the invention, a field emission device is made by disposing emitter material on an insulating substrate, applying a sacrificial film to the emitter material and forming over the sacrificial layer a conductive gate layer having a random distribution of apertures therein. In the preferred process, the gate is formed by applying masking particles to the sacrificial film, applying a conductive film over the masking particles and the sacrificial film and then removing the masking particles to reveal a random distribution of apertures. The sacrificial film is then removed. The apertures then extend to the emitter material. In a preferred embodiment, the sacrificial film contains dielectric spacer particles which remain after the film is removed to separate the emitter from the gate. The result is a novel and economical field emission device having numerous randomly distributed emission apertures which can be used to make low cost flat panel displays.

Abstract translation: 根据本发明，通过将发射极材料设置在绝缘衬底上，将牺牲膜施加到发射极材料并在牺牲层上形成具有其中孔径随机分布的导电栅极层而形成场致发射器件。 在优选的方法中，通过将掩模颗粒施加到牺牲膜，在掩模颗粒和牺牲膜上施加导电膜，然后去除掩模颗粒以显示孔的随机分布来形成栅极。 然后去除牺牲膜。 孔然后延伸到发射体材料。 在优选实施例中，牺牲膜包含介电间隔物颗粒，其在除去膜之后保留，以将发射极与栅极分离。 结果是一种新颖且经济的场致发射装置，其具有许多随机分布的发射孔，其可用于制造低成本的平板显示器。

公开(公告)号：US5391259A

公开(公告)日：1995-02-21

申请号：US184819

申请日：1994-01-21

Applicant: David A. Cathey ,  Kevin Tjaden

Inventor： David A. Cathey ,  Kevin Tjaden

IPC: C23F4/00 ,  H01J9/02 ,  H01J9/00

CPC classification number: H01J9/025 ,  H01J2201/30403

Abstract: A method for forming a substantially uniform array of atomically sharp emitter tips, comprising: patterning a substrate with a mask, thereby defining an array; isotropically etching the array to form pointed tips; and removing the mask when substantially all of the tips have become sharp. A mask having a composition and dimensions which enable the mask to remain balanced on the apex of the tips until all of the tips are of substantially the same shape is used to form the array of substantially uniform tips.

Abstract translation: 一种用于形成基本上均匀阵列的原子锋利的发射极尖端的方法，包括：用掩模图案化衬底，从而限定阵列; 各向同性蚀刻阵列以形成尖端; 并且当基本上所有的尖端已经变得尖锐时去除掩模。 具有使掩模在尖端的顶点上保持平衡的成分和尺寸的掩模，直到所有尖端具有基本相同的形状，以形成基本均匀的尖端的阵列。

公开(公告)号：US5341063A

公开(公告)日：1994-08-23

申请号：US981958

申请日：1992-11-24

Applicant: Nalin Kumar

Inventor： Nalin Kumar

IPC: H01J1/304 ,  H01J9/02 ,  H01J1/02 ,  H01J1/14

CPC classification number: H01J1/3042 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30457

Abstract: A field emitter comprising a conductive metal and a diamond emission tip with negative electron affinity in ohmic contact with and protruding above the metal. The field emitter is fabricated by coating a substrate with an insulating diamond film having negative electron affinity and a top surface with spikes and valleys, depositing a conductive metal on the diamond film, and applying an etch to expose the spikes without exposing the valleys, thereby forming diamond emission tips which protrude a height above the conductive metal less than the mean free path of electrons in the diamond film.

Abstract translation: 一种场致发射器，包括导电金属和具有负电子亲和力的金刚石发射尖端，与金属欧姆接触并在其上突出。 通过用具有负电子亲和性的绝缘金刚石膜和具有尖峰和谷的顶表面涂覆衬底，在金刚石膜上沉积导电金属以及施加蚀刻以暴露尖峰而不暴露谷来制造场致发射体，从而 形成金刚石发射尖端，其突出在导电金属之上的高度小于金刚石膜中电子的平均自由程。

公开(公告)号：US5278510A

公开(公告)日：1994-01-11

申请号：US917484

申请日：1992-07-20

Applicant: Robert Baptist ,  Christophe Py

Inventor： Robert Baptist ,  Christophe Py

IPC: G01L21/30 ,  G01L21/34 ,  G01N27/70 ,  H01J1/30 ,  H01J19/24

CPC classification number: G01L21/34 ,  H01J2201/30403

Abstract: Ionization vacuum gauge comprising, like Bayard Alpert gauges, in a chamber (1) containing an extremely low pressure atmosphere, whose ultra-vacuum degree it is desired to be measured, an electron source cathode (2), a grid (3) for collecting these electrons and surrounding a collector (4) of ions resulting from the impact of the electrons on the gas molecules of the extremely low pressure atmosphere, wherein the electron source is a cold micropoint cathode.

Abstract translation: 离子化真空计包括像Bayard Alpert量规，在包含极低压气氛的室（1）中，其希望被测量其超真空度，电子源阴极（2），用于收集的电网（3） 这些电子并围绕由电子撞击极低压气氛的气体分子产生的离子的集电体（4），其中电子源是冷微点阴极。

公开(公告)号：US5199918A

公开(公告)日：1993-04-06

申请号：US789237

申请日：1991-11-07

Applicant: Nalin Kumar

Inventor： Nalin Kumar

IPC: H01J1/304 ,  H01J9/02

CPC classification number: H01J1/3042 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30457

Abstract: A field emitter device comprising a conductive metal and a diamond emission tip with negative electron affinity in ohmic contact with and protruding above the metal. The device is fabricated by coating a substrate with an insulating diamond film having negative electron affinity and a top surface with spikes and valleys, depositing a conductive metal on the diamond film, and applying an etch to expose the spikes without exposing the valleys, thereby forming diamond emission tips which protrude a height above the conductive metal less than the mean free path of electrons in the diamond film.

Abstract translation: 一种场致发射器件，包括导电金属和具有负电子亲和力的金刚石发射尖端，与金属欧姆接触并突出在金属上方。 该器件通过用具有负电子亲和性的绝缘金刚石膜和具有尖峰和谷的顶表面的衬底涂覆衬底，在金刚石膜上沉积导电金属，以及施加蚀刻以暴露尖峰而不暴露谷，从而形成 金刚石发射尖端突出高于导电金属的高度小于金刚石膜中电子的平均自由程。