公开(公告)号：US09354044B2

公开(公告)日：2016-05-31

申请号：US14795311

申请日：2015-07-09

Applicant: MITUTOYO CORPORATION

Inventor： Yutaka Miki

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01B2210/50

Abstract: A thickness measurement apparatus includes a light source emitting light; an optical system focusing the light emitted from the light source onto an optical axis; a reflector reflecting light focused by the optical system; a detector detecting intensity of the reflected light according to a position on the optical axis where the light passing through the optical system is in focus; and a calculator calculating thickness of a measured object using a refractive index of the measured object and an amount of displacement between a first focus position and a second focus position.

Abstract translation: 厚度测量装置包括发射光的光源; 将从光源发射的光聚焦到光轴上的光学系统; 反射由光学系统聚焦的光的反射器; 检测器，其根据在所述光轴上通过所述光学系统的光被聚焦的位置来检测反射光的强度; 以及使用所测量的物体的折射率和第一聚焦位置和第二聚焦位置之间的位移量来计算被测物体的厚度的计算器。

公开(公告)号：US20160146636A1

公开(公告)日：2016-05-26

申请号：US14553709

申请日：2014-11-25

Applicant: Mitutoyo Corporation

Inventor： Michael Nahum

IPC: G01D5/20

CPC classification number: G01D5/2053

Abstract: An absolute scale configuration is provided for use in a position encoder which includes a readhead and a scale. The absolute scale configuration includes a plurality of scale loops distributed along a measuring axis to provide a position dependent signal that varies depending on a relative position between the scale loops and the readhead. At least some of the scale loops are coupled to respective impedance modulating circuits connected to receive energy from current induced in the scale loop and to provide a unique coded modulation of the scale loop impedance during a code signal generating state. The unique coded modulations as sensed by the readhead are indicative of a coarse resolution absolute position, which may be utilized in combination with the position dependent signal to determine an absolute position with a high resolution.

Abstract translation: 提供绝对尺度配置用于包括读取头和刻度的位置编码器。 绝对刻度配置包括沿着测量轴分布的多个刻度环，以提供取决于刻度环和读取头之间的相对位置而变化的位置相关信号。 至少一些刻度环耦合到相应的阻抗调制电路，其连接以从在电荷循环中感应的电流接收能量，并且在码信号产生状态期间提供尺度环阻抗的唯一编码调制。 由读取头感测到的独特的编码调制表示粗分辨率绝对位置，其可以与位置相关信号组合使用以确定具有高分辨率的绝对位置。

公开(公告)号：US20160146594A1

公开(公告)日：2016-05-26

申请号：US14947368

申请日：2015-11-20

Applicant: MITUTOYO CORPORATION

Inventor： Yukimasa NISHIO ,  Toshikazu IWATA ,  Eisuke MORIUCHI

IPC: G01B11/02

CPC classification number: G01B11/25 ,  G01B21/047

Abstract: An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface.

Abstract translation: 一种图像测量装置，包括具有放置在其上放置被测量物体的放置面的样品台; 面向所述样品台的放置表面并捕获被测量物体的图像的图像捕获设备; 以及将预定图案投影到样品台上的图案投影装置，所述预定图案为放置表面上的要测量对象的放置位置和方向中的至少一个提供基准。

公开(公告)号：US09341554B2

公开(公告)日：2016-05-17

申请号：US14193403

申请日：2014-02-28

Applicant: MITUTOYO CORPORATION

Inventor： Masaharu Tsujii ,  Satoko Mori

IPC: G01N3/42

CPC classification number: G01N3/42 ,  G01N2203/0078 ,  G01N2203/0222

Abstract: A hardness tester has a test force applier generating a test force using an electromagnetic force generated by supplying a current to a drive coil provided in a magnetic field and applies the test force to an indenter to press the indenter into a surface of a sample; a temperature detector detecting a temperature of the test force applier; and a test force corrector correcting the test force generated from the test force applier based on the temperature detected by the temperature detector.

Abstract translation: 硬度计具有试压力施加器，其使用通过向设置在磁场中的驱动线圈提供电流而产生的电磁力产生测试力，并将测试力施加到压头以将压头压入样品表面; 检测试压装置的温度的温度检测器; 以及测试力校正器，其基于由温度检测器检测到的温度来校正由测试力施加器产生的测试力。

公开(公告)号：US09341459B2

公开(公告)日：2016-05-17

申请号：US14464184

申请日：2014-08-20

Applicant: MITUTOYO CORPORATION

Inventor： Takashi Noda ,  Hiroshi Kamitani ,  Kazumi Mizukami

IPC: G01B5/008 ,  G01B5/20 ,  G01B21/04

CPC classification number: G01B5/008 ,  G01B5/204 ,  G01B21/047

Abstract: Controller executes a first scanning control, causing a driver to move a probe such that a tip scans along an inclined surface of a V groove to approach a center of the V groove, and a second scanning control, causing the driver to move the probe such that the tip scans along the inclined surface of the V groove to approach the center of the V groove from a side opposite that of the first scanning control. Angle calculator calculates an angle created between a direction of a deflection vector of the probe and a predetermined direction. Threshold value-correspondent coordinate obtainer obtains coordinates of the tip where the angle has changed to exceed a first threshold value during execution of the first scanning control and obtains coordinates of the tip where the angle has changed to exceed a second threshold value during execution of the second scanning control.

Abstract translation: 控制器执行第一扫描控制，使得驾驶员移动探头，使得尖端沿着V槽的倾斜表面扫描以接近V槽的中心;以及第二扫描控制，使得驾驶员将探针移动到 尖端沿着V槽的倾斜表面扫描以从与第一扫描控制的相反侧接近V槽的中心。 角度计算器计算在探针的偏转矢量的方向和预定方向之间产生的角度。 阈值对应坐标获取器在执行第一扫描控制期间获得角度已经改变的尖端的坐标超过第一阈值，并且在执行第一扫描控制期间获得角度已经改变的尖端的坐标超过第二阈值 第二扫描控制。

公开(公告)号：US09329059B2

公开(公告)日：2016-05-03

申请号：US13767101

申请日：2013-02-14

Applicant: MITUTOYO CORPORATION

Inventor： Kenichi Hayashi ,  Hiroaki Kawada

IPC: G01D5/30 ,  G01D5/347 ,  G01D5/34

CPC classification number: G01D5/34746 ,  G01D5/345

Abstract: A photoelectric encoder includes an irradiation unit configured to apply first and second irradiation light beams having a first linear polarization direction, a scale configured to produce first and second diffraction light beams having the first linear polarization direction by diffracting the first and second irradiation light beams, respectively, the scale having a glass plate whose front surface has a grating shape, a polarizing unit configured to convert the first diffraction light beam into a third diffraction light beam having a second linear polarization direction which is perpendicular to the first linear polarization direction, to produce first and second composite light beams by combining the second diffraction light beam and the third diffraction light beam, and to convert the first composite light beam into a circularly polarized third composite light beam, and a light receiver configured to receive the second composite light beam and the third composite light beam.

Abstract translation: 一种光电编码器包括：照射单元，被配置为施加具有第一线性偏振方向的第一和第二照射光束，刻度被配置为通过衍射第一和第二照射光束来产生具有第一线偏振方向的第一和第二衍射光束; 分别具有前表面具有光栅形状的玻璃板，将第一衍射光束转换为具有垂直于第一线偏振方向的第二线偏振方向的第三衍射光束的偏振部件， 通过组合第二衍射光束和第三衍射光束来产生第一和第二复合光束，并将第一复合光束转换成圆偏振的第三复合光束;以及光接收器，被配置为接收第二复合光束 和第三复合光束。

公开(公告)号：US20160103443A1

公开(公告)日：2016-04-14

申请号：US14511100

申请日：2014-10-09

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G05B19/21

CPC classification number: G05B19/21 ,  G01B11/005 ,  G01B2210/50 ,  G02B21/0016 ,  G02B21/0064 ,  G05B2219/23182 ,  G05B2219/37208 ,  G05B2219/37449 ,  G05B2219/37553 ,  G06F9/00

Abstract: A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

Abstract translation: 一种用于为包括3D运动控制系统，第一类型Z高度感测系统和第二类Z高度感测系统的度量系统的三维（3D）工件扫描路径进行编程的方法，其提供较不精确的表面 在更高的Z高度测量范围内的Z高度测量。 该方法包括：将代表性工件放置在测量系统的台上，为代表性工件定义至少第一工件扫描路径段，确定沿着第一工件扫描路径段的初步实际表面Z高度测量值，以及确定精确 3D扫描路径用于移动第一种类型的Z高度感测系统，以执行精确的表面Z高度测量。 精确的3D扫描路径基于确定的初步实际表面Z高度测量。 精确的3D扫描路径可用于执行精确的表面Z高度测量或存储以用于检查程序。

公开(公告)号：US09310225B2

公开(公告)日：2016-04-12

申请号：US14284902

申请日：2014-05-22

Applicant: MITUTOYO CORPORATION

Inventor： Fujio Maeda

IPC: G01D5/34 ,  G01D5/347

CPC classification number: G01D5/34707 ,  G01D5/34746

Abstract: A scale for a photoelectric encoder includes a scale substrate and a reflection film formed at a predetermined pitch on the scale substrate. A surface of the reflection film forms a reflection surface. A low-reflection surface is formed by etching the scale substrate between reflection films. Accordingly, a scale can be provided which is lower in cost and has favorable yield rates.

Abstract translation: 光电编码器的标尺包括刻度尺基板和在刻度尺基板上以预定间距形成的反射膜。 反射膜的表面形成反射面。 通过在反射膜之间蚀刻刻度尺基板来形成低反射面。 因此，可以提供成本较低并且具有良好收率的标尺。

公开(公告)号：US09291538B2

公开(公告)日：2016-03-22

申请号：US13705536

申请日：2012-12-05

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi Sawa

IPC: G01N3/42

CPC classification number: G01N3/42 ,  G01N2203/0082 ,  G01N2203/0218

Abstract: The present invention provides a hardness tester capable of accurately detecting a point where an indenter contacts a sample in instrumented indentation testing. Prior to beginning measurement, the hardness tester defines an expected range for a value for a displacement, speed, or acceleration of an indenter during a process of approaching a sample. After measurement has begun, the hardness tester measures the value for the displacement, speed, or acceleration of the indenter during the process of approaching the sample. When the measured value is not within the expected range, the hardness tester determines that detection of a zero point has failed.

Abstract translation: 本发明提供了一种硬度计，能够精确地检测压痕在仪器压入试验中与样品接触的点。 在开始测量之前，硬度计定义了在接近样品的过程中压头的位移，速度或加速度值的预期范围。 测量开始后，硬度计测量在接近样品过程中压头的位移，速度或加速度的值。 当测量值不在预期范围内时，硬度计确定零点检测失败。

公开(公告)号：US09291447B2

公开(公告)日：2016-03-22

申请号：US14327469

申请日：2014-07-09

Applicant: Mitutoyo Corporation

Inventor： Jon David Bumgardner

IPC: G01B5/008 ,  G01B11/00

CPC classification number: G01B11/007 ,  G01B21/04

Abstract: A method for manually controlling the motion of a coordinate measuring machine (CMM) is disclosed. The method may include providing at least one guide element motion tracking sensor; defining a guide element active tracking volume relative to one of the guide element tracking sensor and a portion of the CMM; placing a guide element in the active motion tracking volume; tracking the position of the guide element; and moving a measurement probe of the CMM in response to the tracked position (e.g., to follow the position changes). The method may further include detecting a tracking motion activation trigger indicator or condition, and operating the CMM to move the measurement probe portion of the CMM according to the tracking motion after the tracking motion activation trigger indicator or condition is detected and according to the condition that the guide element is located in the active tracking volume.

Abstract translation: 公开了一种用于手动控制坐标测量机（CMM）的运动的方法。 该方法可以包括提供至少一个引导元件运动跟踪传感器; 定义相对于所述引导元件跟踪传感器和所述CMM的一部分的引导元件主动跟踪体积; 将引导元件放置在主动运动跟踪体积中; 跟踪引导元件的位置; 以及响应于跟踪位置（例如，跟随位置改变）移动CMM的测量探针。 该方法可以进一步包括检测跟踪运动激活触发指示符或状态，并且在检测到跟踪运动激活触发指示符或状态之后根据跟踪运动操作CMM以移动CMM的测量探针部分，并且根据 引导元件位于活动跟踪体积中。