Abstract:
An outer dimension measuring apparatus includes a light source; an optical system focusing the light emitted from the light source onto an optical axis; a reflector reflecting the focused light; a detector detecting an intensity of the reflected light; and a calculator calculating an outer dimension of a measured object using a first focus position, a second focus position, and a position of the reflector on the optical axis, the first focus position lying on the optical axis where a peak in reflected light intensity is detected by the detector for light reflected by a first surface, and the second focus position lying on the optical axis where a peak in reflected light intensity is detected by the detector for light that has been reflected by the reflector and emitted at a second surface.
Abstract:
A thickness measurement apparatus includes a light source emitting light; an optical system focusing the light emitted from the light source onto an optical axis; a reflector reflecting light focused by the optical system; a detector detecting intensity of the reflected light according to a position on the optical axis where the light passing through the optical system is in focus; and a calculator calculating thickness of a measured object using a refractive index of the measured object and an amount of displacement between a first focus position and a second focus position.
Abstract:
A position measurement apparatus includes a measurement head, a controller and a light transmission section. The measurement head includes a light projecting lens and a light receiving lens. The controller includes a light emitting section, a light emission circuit controlling the light emitting section, a light receiving section, and a pixel data processing circuit detecting a position of light received in the light receiving section, and outputting positional information to a calculation section calculating a position of an object to be measured. The light transmission section includes an optical fiber transmitting light from the light emitting section to the light projecting lens, and an image fiber with incidence and emission end faces, in which end faces of plural cores are two-dimensionally arrayed in the incidence end face and the emission end face, the image fiber transmitting light converged by the light receiving lens to the light receiving section.
Abstract:
Optical observation apparatus includes: light source emitting broadband light; image fiber with first and second end faces, wherein end faces of plural cores are two-dimensionally arrayed in first and second end faces; imaging optical system provided on first end face side of image fiber, causing light from first end face to be imaged on imaging plane; and axial aberration optical system provided on second end face side of image fiber, having an axial chromatic aberration on optical axis, and causing light from second end face toward object to be observed to be converged. Image fiber takes light from light source from first end face, and transmits light to second end face, and takes light, reflected and scattered by a surface of object, converged by axial aberration optical system, and focused for each plural core on second end face, from second end face and transmits light to first end face.