公开(公告)号：US20230393334A1

公开(公告)日：2023-12-07

申请号：US17831065

申请日：2022-06-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Adam Rosenfeld ,  Yusheng Bian ,  Francis Afzal ,  Bob Mulfinger

IPC: G02B6/124 ,  G02B6/13

CPC classification number: G02B6/124 ,  G02B6/13 ,  G02B2006/12107

Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a substrate, a waveguide core, and a grating disposed in a vertical direction between the waveguide core and the substrate. The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.

公开(公告)号：US11803016B2

公开(公告)日：2023-10-31

申请号：US17701942

申请日：2022-03-23

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/42 ,  G02B6/122 ,  G02B6/30

CPC classification number: G02B6/4203 ,  G02B6/1228 ,  G02B6/305

Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure includes a substrate, a waveguide core, and a metamaterial layer positioned in a vertical direction between the substrate and the waveguide core. The metamaterial layer includes a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps.

公开(公告)号：US20230333318A1

公开(公告)日：2023-10-19

申请号：US17723608

申请日：2022-04-19

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Kenneth J. Giewont

IPC: G02B6/122

CPC classification number: G02B6/1225 ,  G02B6/1228

Abstract: Disclosed is a photonic integrated circuit (PIC) structure including a first waveguide core with a first end portion, a second waveguide core with a second end portion overlaying and physically separated from the first end portion, and a coupler configured to facilitate low-loss optical signal transmission between the waveguide cores. The coupler can include at least one array of photonic material elements (e.g., photonic crystal elements or photonic metamaterial elements) embedded in cladding material between the end portions. Alternatively, the coupler can include at least one photonic material layer (e.g., a photonic crystal layer or a photonic metamaterial layer) between and physically separated from the end portions and an array of cladding material elements extending through the photonic material layer. Also disclosed is a PIC structure including an on-chip system (e.g., a photonic computing system) including a crossing array implemented using any of the above-described couplers.

公开(公告)号：US11789208B1

公开(公告)日：2023-10-17

申请号：US17658821

申请日：2022-04-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/30 ,  G02B6/136 ,  G02B6/122

CPC classification number: G02B6/305 ,  G02B6/1225 ,  G02B6/1228 ,  G02B6/136

Abstract: According to an aspect of the present disclosure, an edge coupler for a photonic chip is provided. The edge coupler includes a substrate having a top surface, a sealed cavity in the substrate, a waveguide core, and a back-end-of-line stack. The sealed cavity has varying depths relative to the top surface of the substrate. The waveguide core is over the sealed cavity. The back-end-of-line stack includes a side edge, an interlayer dielectric layer, and an assisting waveguide. The assisting waveguide is on the interlayer dielectric layer adjacent to the side edge. The assisting waveguide and the waveguide core have an overlapping arrangement with the sealed cavity in the substrate.

公开(公告)号：US20230305240A1

公开(公告)日：2023-09-28

申请号：US17701918

申请日：2022-03-23

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/42

CPC classification number: G02B6/4203 ,  G02B6/42

Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure includes a substrate, a first waveguide core, and a second waveguide core positioned in a vertical direction between the first waveguide core and the substrate. The second waveguide core includes a taper and an inverse taper longitudinally positioned adjacent to the taper.

公开(公告)号：US11768337B2

公开(公告)日：2023-09-26

申请号：US17362154

申请日：2021-06-29

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Spencer Porter ,  Mark Levy ,  Siva P. Adusumilli ,  Yusheng Bian

IPC: G02B6/42 ,  G02B6/122 ,  G02B6/12

CPC classification number: G02B6/4203 ,  G02B6/1225 ,  G02B2006/12104 ,  G02B2006/12159

Abstract: Structures for a coupler and methods of forming a structure for a coupler. A structure for a directional coupler may include a first waveguide core having one or more first airgaps and a second waveguide core including one or more second airgaps. The one or more second airgaps are positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core. A structure for an edge coupler is also provided in which the waveguide core of the edge coupler includes one or more airgaps.

公开(公告)号：US20230280549A1

公开(公告)日：2023-09-07

申请号：US17684840

申请日：2022-03-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/42 ,  G02B1/00

CPC classification number: G02B6/4203 ,  G02B1/002 ,  G02B6/42

Abstract: Structures including an optical component, such as an edge coupler, and methods of fabricating such structures. The structure includes a substrate, a waveguide core over the substrate, and a metamaterial layer positioned in a vertical direction between the waveguide core and the substrate. The metamaterial layer includes a set of elements separated by a set of gaps and a dielectric material in the set of gaps.

公开(公告)号：US11747562B2

公开(公告)日：2023-09-05

申请号：US17738156

申请日：2022-05-06

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Yusheng Bian

IPC: G02B6/124 ,  G02B6/12

CPC classification number: G02B6/124 ,  G02B2006/12061 ,  G02B2006/12126

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to spiral waveguide absorbers and methods of manufacture. The structure includes: a photonics component; and a waveguide absorber with a grating pattern coupled to a node of the photonics component.

公开(公告)号：US20230266544A1

公开(公告)日：2023-08-24

申请号：US17679188

申请日：2022-02-24

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Nicholas Polomoff ,  Keith Donegan ,  Qizhi Liu ,  Steven M. Shank

IPC: G02B6/42 ,  H01S5/02251

CPC classification number: G02B6/4212 ,  G02B6/421 ,  G02B6/4245 ,  H01S5/02251 ,  G02B1/002

Abstract: Structures including an edge coupler, and methods of fabricating a structure that includes an edge coupler. The structure includes an edge coupler having a waveguide core with an end surface and a longitudinal axis. The end surface defines a plane tilted in a first direction at a first acute angle relative to the longitudinal axis and tilted in a second direction at a second acute angle relative to the longitudinal axis. The second direction differs from the first direction.

公开(公告)号：US11733458B2

公开(公告)日：2023-08-22

申请号：US17493260

申请日：2021-10-04

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13

CPC classification number: G02B6/1228 ,  G02B6/13 ,  G02B2006/12061

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The structure includes a first waveguide core having a first inverse taper, a second waveguide core having a second inverse taper, and a third waveguide core having a third inverse taper that is laterally positioned between the first inverse taper and the second inverse taper. The structure further includes a fourth waveguide core having a fourth inverse taper that is positioned to overlap with the first inverse taper, and a fifth waveguide core having a fifth inverse taper that is positioned to overlap with the second inverse taper.