Abstract:
A vacuum pressure control system includes a vacuum chamber, a vacuum pump for sucking gas from the vacuum chamber, a vacuum open/close valve for controlling vacuum pressure in the vacuum chamber by changing a opening degree by driving air supplied from an air supply source serving as a power source, a vacuum pressure control device for controlling the vacuum open/close valve, and a servo valve for controlling the opening degree of the vacuum open/close valve.
Abstract:
It is to provide a tablet filling device having improved quality and productivity by correctly filling the tablets in pocket parts of a container film even when the tablets have a non-circular shape such as triangle. The tablet filling device 52 has a rotary drum 2 provided with holding recesses 3 for storing the tablets 1 and transferring the tablets 1 to the downstream for filling the tablet 1 in a pocket part 44 of a container film 41. The holding recess 3 has a tablet receptacle section 3a that is larger than the tablet 1 supplied from a tablet feeding chute 5, and a posture correction section 3b that corrects the posture of the tablet 1 received in the tablet receptacle section 3a during the conveyance.
Abstract:
An object of the present invention is to provide a malfunction prevention manual valve capable of preventing a malfunction while ensuring operability in opening and closing the valve. To achieve the object, a malfunction prevention manual valve 1 of the present invention includes a lock mechanism including a parallel pin 75 held against rotation relative to a housing 71, and a sub-handle 73 provided in a handle 72 in such a manner as to be engageable with the parallel pin 75. The parallel pin 75 or the sub-handle 73 is urged by a lock spring 77, bringing the sub-handle in engagement with the parallel pin 75 to restrain rotation of the handle 72. A malfunction prevention manual valve 2 of another aspect includes a lock mechanism including a spring pin 175 held against rotation relative to a housing 171, a cam groove 172a formed in a handle 172 to receive a spring pin 175, and a sub-handle 173 provided integral with the handle 172 and urged by a spring 177.
Abstract:
A rocking substrate 31 provided with a porous unit 41 is supported by a platform 21 by means of a spherical bearing. Furthermore, air is provided between the platform 21 and the rocking substrate 31 to allow the rocking substrate 31 and the porous unit 41 to rock along a spherical surface. This rocking allows the top surface 12a of an improved levitation unit 12 to tilt freely. When a wavy glass substrate is placed on the levitation device, the top surface 12a of the improved levitation unit 12 tilts, tracing the tilt of the substrate. Jetting air out in this state levitates the substrate, with its top surface 12a in the horizontal state, and allows the levitational force to be reliably applied to the substrate.
Abstract:
The present invention is made to prevent stress concentration on or around a boundary between a valve element body and a web portion of a diaphragm even in controlling supply of high-pressure fluid, thereby improving durability of the diaphragm. A diaphragm valve 1 of the present invention comprises a diaphragm valve element 20 including a valve element body 21 movable into contact with a valve seat 13, a web portion 22 extending outward from the valve element body 21, and a fixed portion 23 formed at an outer peripheral edge of the web portion 22. The web portion 22 includes a vertical portion 22a vertically formed continuous with the valve element body 21, a horizontal portion 22c horizontally formed continuous with the fixed portion 23, and a connecting portion 22b of a circular arc shape (an upward protruding shape) in section to connect the vertical portion 22a with the horizontal portion 22c, thereby holding the vertical portion 22a in constant contact with an outer surface of a backup 40.
Abstract:
A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.
Abstract:
An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a cross-shaped venting groove 22e extending from the opening 22d of the passage 22b to the periphery of the wall surface 22c is formed in the wall surface 22c. Thus, an operating air in the chamber 26 is discharged (sucked) through the passage 22b during drawing in the chemical liquid. Since the opening 22d communicates with the venting groove 22e extending to the periphery of the chamber 26, if the center of the diaphragm 23 covers the opening 22d first, the operating air in the chamber 26 can be continuously evacuated (drew out) from the venting groove 22e positioned on the outside of the center part which first comes into contact with the opening 22d
Abstract:
For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional measuring instrument is provided which is capable of shortening the measurement time. A printed state inspection device 1 includes a table for placing a printed circuit board K printed with cream solder H, an illumination device 3 for illuminating three sine wave light component patterns with different phases on the surface of printed circuit board K, a CCD camera 4 for picking-up images of the illuminated part of the printed circuit board K, a white light illumination unit L for illuminating a white light on the surface of printed circuit board K, and a laser pointer for measuring the standard height. A control device 7 determines the existing area of the cream solder H from the image data obtained by the illumination of the white light, and calculates the height of the cream solder H from the image data obtained by the illumination device 3 by using a phase shift method.
Abstract:
A gas supply unit includes fluid control devices and piping blocks so that the fluid control devices are mounted on the upper surfaces of the piping blocks and thus connected with each other, constituting a part of a gas supply line. A filter block including a filter element in a passage providing communication between the fluid control device and the piping block is connected between the fluid control device and the piping block.
Abstract:
There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, bringing a diaphragm into close contact with a valve seat. In this state, when compressed air is supplied into a pilot chamber, moving the piston, the diaphragm is brought out of contact with the valve seat. Then, the piston comes into contact with a nut and the diaphragm is stopped providing a fixed clearance between the diaphragm and the valve seat. An opened state is established. Of course, the nut can be moved to any desired position by means of a serve motor or the like, so that a position at which the piston comes into contact with the nut can be changed.