公开(公告)号：US5293025A

公开(公告)日：1994-03-08

申请号：US739295

申请日：1991-08-01

Applicant: Carl B. Wang

Inventor： Carl B. Wang

IPC: B23K26/00 ,  B23K26/02 ,  B23K26/38 ,  B23K101/42 ,  H01L21/48 ,  H05K1/02 ,  H05K1/03 ,  H05K1/09 ,  H05K3/00 ,  H05K3/46 ,  B23K26/08

CPC classification number: H05K3/4667 ,  B23K26/382 ,  B23K26/386 ,  B23K26/40 ,  B23K26/402 ,  H01L21/486 ,  H05K3/0008 ,  H05K3/0029 ,  B23K2203/16 ,  B23K2203/30 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/52 ,  H05K1/0269 ,  H05K1/0306 ,  H05K1/092

Abstract: The invention is directed to a method for rapidly forming a pattern of vias in multilayer electronic circuits in which each of the via holes is formed by drilling with a controlled number of Nd:YAG laser beam pulses. Beam positioning is controlled by means of a programmed galvanometric beam positioner. The drilling sequence is optionally controlled by application of an heuristic algorithm of the symmetric Traveling Salesman Problem.

Abstract translation: 本发明涉及一种用于在多层电子电路中快速形成通孔图案的方法，其中每个通孔通过用受控数量的Nd：YAG激光束脉冲钻孔形成。 光束定位通过编程的电流计量束定位器来控制。 可选地通过应用对称旅行销售员问题的启发式算法来控制钻取序列。