Thin film electrical energy storage device
    21.
    发明授权
    Thin film electrical energy storage device 失效
    薄膜电能储存装置

    公开(公告)号:US5437941A

    公开(公告)日:1995-08-01

    申请号:US373903

    申请日:1995-01-17

    摘要: An electrical energy storage device (10). An electrode (12) consisting of a thin film of metal or metal oxide is deposited on a substrate (24), preferably by sputtering. Spherical plastic spacers (16) are uniformly dispersed on the electrode at a maximum density of about 1000 spacers per square millimeter of the electrode area. A second substrate also has an electrode (14) formed of a thin film of metal or metal oxide deposited on it, similar to the first substrate. The first and second substrates are arranged so that the electrodes face each other and are separated by the spherical plastic spacers to form a gap (18) of about 20 microns between the electrodes. An electrolyte (20) is filled in the gap, and the edges of the gap are optionally sealed (22) to form the electrical energy storage device. The device may also be formed by using metal foils, and eliminating one or more of the substrates. In both cases, the use of an electrolyte is optional.

    摘要翻译: 一种电能存储装置(10)。 优选通过溅射将由金属或金属氧化物薄膜组成的电极(12)沉积在基板(24)上。 球形塑料间隔物(16)以电极面积每平方毫米约1000个间隔物的最大密度均匀分散在电极上。 类似于第一衬底,第二衬底还具有由沉积在其上的金属或金属氧化物薄膜形成的电极(14)。 第一和第二基板被布置成使得电极彼此面对并且被球形塑料间隔物隔开,以在电极之间形成约20微米的间隙(18)。 电解质(20)填充在间隙中,并且间隙的边缘任选地被密封(22)以形成电能存储装置。 该装置还可以通过使用金属箔形成,并且消除一个或多个基板。 在这两种情况下,使用电解质都是可选的。

    Method of adherent metal coating for aluminum nitride surfaces
    24.
    发明授权
    Method of adherent metal coating for aluminum nitride surfaces 失效
    氮化铝表面附着金属涂层的方法

    公开(公告)号:US5217589A

    公开(公告)日:1993-06-08

    申请号:US770270

    申请日:1991-10-03

    摘要: A method of metallizing a substrate by vacuum depositing a thin layer of chromium. The substrate is first cleaned (16) by exposing it to a plasma gas discharge. A thin layer of chromium metal is then sputtered under vacuum (17) onto the substrate. The substrate is then heated in an oxygen containing atmosphere (18) for a period of time and at a temperature sufficient to convert the chromium metal to chromium oxide. A second layer of chromium metal is then sputtered (20) onto the chromium oxide layer in order to form an adherent metal system to the substrate.

    摘要翻译: 通过真空沉积薄层的铬来金属化衬底的方法。 首先通过将衬底暴露于等离子体气体放电来清洁衬底(16)。 然后将薄的铬金属层在真空(17)下溅射到基底上。 然后将基材在含氧气氛(18)中加热一段时间,并在足以将铬金属转化为氧化铬的温度下加热。 然后将第二层铬金属溅射(20)到氧化铬层上,以便形成与衬底粘附的金属体系。