Photo-sensitive MEMS structure
    21.
    发明授权
    Photo-sensitive MEMS structure 失效
    光敏MEMS结构

    公开(公告)号:US07616425B2

    公开(公告)日:2009-11-10

    申请号:US11982002

    申请日:2007-10-31

    IPC分类号: H01G5/00

    摘要: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.

    摘要翻译: 热敏设备包括具有顶表面的基底,一个或多个条可旋转地接合到该表面并具有双压电晶片部分,以及可旋转地接合到该表面并且基本上刚性地连接到一个或多个条的板。 每个双压电晶片部分响应于加热而弯曲。 一个或多个杆和板被配置成响应于加热的一个或多个双压电晶片部分而使板移动离开顶表面更远。

    Mechanical lenses
    22.
    发明申请
    Mechanical lenses 审中-公开
    机械镜片

    公开(公告)号:US20090195882A1

    公开(公告)日:2009-08-06

    申请号:US12012772

    申请日:2008-02-05

    IPC分类号: G02B3/12

    CPC分类号: G02B3/14

    摘要: A mechanical lens includes a rigid chamber, a first transparent window located to close one end of the chamber, a flexible transparent membrane window located to close another end of the chamber, and a transparent fluid having an index of refraction. The flexible transparent membrane window is along an optical path of light received through said first transparent window. The chamber is filled with said fluid and a curvature of said flexible transparent membrane window is responsive to a pressure of said transparent fluid.

    摘要翻译: 机械透镜包括刚性室,位于封闭室的一端的第一透明窗口,用于封闭室的另一端的柔性透明膜窗和具有折射率的透明流体。 柔性透明膜窗沿着通过所述第一透明窗口接收的光的光路。 所述腔室充满所述流体,并且所述柔性透明膜窗口的曲率响应于所述透明流体的压力。

    MEMS ACTUATOR
    23.
    发明申请
    MEMS ACTUATOR 有权
    MEMS执行器

    公开(公告)号:US20090085699A1

    公开(公告)日:2009-04-02

    申请号:US11904949

    申请日:2007-09-29

    IPC分类号: H01H51/22 H01H57/00

    摘要: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    摘要翻译: 包括靠近推进器组件的基底,推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

    DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER
    24.
    发明申请
    DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER 有权
    具有双材料传感器的红外辐射探测器

    公开(公告)号:US20080315099A1

    公开(公告)日:2008-12-25

    申请号:US11766414

    申请日:2007-06-21

    IPC分类号: G01J5/00

    CPC分类号: G01J5/40

    摘要: A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.

    摘要翻译: 本发明的代表性实施例提供一种红外(IR)检测器,其具有通过悬架臂与基板偏移距离支撑的可移动板。 响应于由入射的IR辐射产生的板和衬底之间的温度差,悬架臂变形并改变板的偏移距离。 在一个实施例中,悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。 换能器也彼此平行,其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。

    Tip-tilt-piston actuator
    26.
    发明授权
    Tip-tilt-piston actuator 有权
    尖端倾斜活塞致动器

    公开(公告)号:US07068409B2

    公开(公告)日:2006-06-27

    申请号:US10813951

    申请日:2004-03-31

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0841 G02B26/0833

    摘要: A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that rotation of the rotatable plates about an axis transfers motion to the moveable plate attachment points. Respective posts couple the movement of each respective moveable plate attachment point to a moveable plate. In operation, the rotatable plates may be individually rotated, and the resulting motion of each rotatable plate is passed to its respective moveable plate attachment point. The combined motion of the moveable plate attachment points is passed to the moveable plate via the posts. Using proper control, the plate may be made to tip, tilt and piston. Advantageously, the piston motion may achieve a high vertical movement frequency response.

    摘要翻译: 可自由旋转的微机械板通过采用至少三个可旋转的板来实现,每个可转动的板各自经由相应的弹簧从基板悬挂,并且经由其它相应的弹簧联接到至少三个可移动的板附接点,使得可旋转板围绕 轴向移动板连接点传递运动。 相应的柱将每个相应的可移动板连接点的运动耦合到可移动板。 在操作中,可旋转板可以单独旋转,并且每个可旋转板的所得运动被传递到其相应的可移动板附接点。 可移动板连接点的组合运动经由柱传递到可移动板。 使用适当的控制,可将板制成尖端,倾斜和活塞。 有利地,活塞运动可以实现高垂直运动频率响应。

    Adjustable compound microlens apparatus with MEMS controller
    27.
    发明授权
    Adjustable compound microlens apparatus with MEMS controller 有权
    具有MEMS控制器的可调复合微透镜装置

    公开(公告)号:US06912090B2

    公开(公告)日:2005-06-28

    申请号:US10391330

    申请日:2003-03-18

    摘要: An adjustable compound optical microlens apparatus comprises first and second microlenses that are separated from one another along their optical axes. At least one of the microlenses is movable relative to the other. In a preferred embodiment, one microlens is stationary, the other movable. A MEMS controller electrically controls the position of the movable microlens relative to the stationary microlens, or the positions of at least two movable microlenses relative to one another. In accordance with one embodiment of our invention, an array of such microlens apparatuses is also contemplated, especially for applications such optical switches and routers. In accordance with another embodiment of our invention, the apparatus functions as an optical filter or dispersion compensator. Also described is method of compensating for variations in an optical parameter (e.g., effective focal length) of such an apparatus in an array.

    摘要翻译: 可调复合光学微透镜装置包括沿其光轴彼此分离的第一和第二微透镜。 微透镜中的至少一个可相对于另一个移动。 在优选实施例中,一个微透镜是静止的,另一个是可移动的。 MEMS控制器电控制可移动微透镜相对于固定微透镜的位置,或者至少两个可移动微透镜相对于彼此的位置。 根据本发明的一个实施例,还设想了这种微透镜装置的阵列,特别是对于这种光开关和路由器的应用。 根据本发明的另一个实施例,该装置用作滤光器或色散补偿器。 还描述了补偿阵列中这种装置的光学参数(例如,有效焦距)的变化的方法。

    Stable electro-mechanical actuators
    28.
    发明授权
    Stable electro-mechanical actuators 有权
    稳定的机电执行器

    公开(公告)号:US08269396B2

    公开(公告)日:2012-09-18

    申请号:US13036724

    申请日:2011-02-28

    IPC分类号: H02N2/00 G02B26/08

    摘要: An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position.

    摘要翻译: 机电致动器包括梳状驱动器和可变形连接器。 梳状驱动器具有第一电容器板和第二电容器板。 电容器板具有能够进行数字化的齿。 可变形连接器构造成对第一电容器板施加机械恢复力。 可变形连接器被配置为响应于不跨越电容器施加控制电压而将第一电容器板恢复到平衡静止位置。 梳齿驱动器在平衡静止位置比在梳齿驱动器的机械稳定性阈值处更多地啮合。 电容器板在平衡静止位置脱离。

    MEMS actuator
    30.
    发明授权
    MEMS actuator 有权
    MEMS致动器

    公开(公告)号:US07733200B2

    公开(公告)日:2010-06-08

    申请号:US11904949

    申请日:2007-09-29

    IPC分类号: H01H51/22

    摘要: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    摘要翻译: 包括靠近推进器组件的基底,推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。