公开(公告)号：US08062494B2

公开(公告)日：2011-11-22

申请号：US11810230

申请日：2007-06-04

申请人： Futoshi Iwata ,  Masatoshi Yasutake ,  Takuya Nakaue ,  Syuichi Kikuchi ,  Osamu Takaoka

发明人： Futoshi Iwata ,  Masatoshi Yasutake ,  Takuya Nakaue ,  Syuichi Kikuchi ,  Osamu Takaoka

IPC分类号： B23H7/00

CPC分类号： G03F1/82 ,  G03F7/0002

摘要： There is a micro-machining apparatus for removing the micro-machining dust generated at the time of machining while a workpiece M is machined within a liquid W using a probe tip. The apparatus includes a stage on which the workpiece is to be placed; a probe having the probe tip, a machining device having a moving means that moves the stage and the probe relative to each other to machine the workpiece by the probe tip, and a micro-machining dust removing device having a first electrode and a second electrode that are arranged in the liquid so as to sandwich the probe tip therebetween, and a voltage application means that applies a voltage to between both the electrodes to move the micro-machining dust in the liquid.

摘要翻译： 有一个微加工设备，用于去除在加工时产生的微加工粉尘，同时使用探头将工件M加工在液体W内。 该装置包括：工件待放置的台阶; 具有探针尖端的探针，具有移动装置的加工装置，所述移动装置使所述载物台和所述探针相对于彼此移动，以通过所述探针末端加工所述工件;以及微加工除尘装置，其具有第一电极和第二电极 其布置在液体中以夹住探针尖端;以及电压施加装置，其在两个电极之间施加电压以移动液体中的微加工灰尘。

公开(公告)号：US07987703B2

公开(公告)日：2011-08-02

申请号：US12130311

申请日：2008-05-30

申请人： Takashi Konno ,  Masatoshi Yasutake

发明人： Takashi Konno ,  Masatoshi Yasutake

IPC分类号： G01B5/28

CPC分类号： G01Q30/20 ,  G01Q10/065 ,  G01Q60/32 ,  G01Q60/38

摘要： A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.

摘要翻译： 配有镊子的扫描探针显微镜包括具有探测部分的第一臂，相对于第一臂沿着打开方向或关闭方向移动的第二臂，沿着打开方向或闭合驱动第二臂的静电致动器 基于施加到其上的打开/关闭驱动电压的方向，通过使用伴随静电致动器的电等效电路作为反馈电路而在静电致动器中引起自振荡并且使第二臂通过自振荡振动的放大器， 以及振动状态检测单元，其检测当所述第二臂接触物体时所述第二臂的振动状态的变化。

公开(公告)号：US20090206855A1

公开(公告)日：2009-08-20

申请号：US12378181

申请日：2009-02-11

申请人： Masatoshi Yasutake

发明人： Masatoshi Yasutake

IPC分类号： G01R27/08

CPC分类号： G01R27/02

摘要： The present invention is a conductivity measuring device comprising that two terminals tweezer having two probes of a observing probe and a grasping probe arranged contiguously along the face which is parallel to a sample support face. Two terminals of a tweezer are pressed while adjusts pressing force to a sample surface, it is galvanized between two terminal tweezer, and conductivity is determined making a current between the two terminals tweezers.

摘要翻译： 本发明是一种电导率测量装置，包括：具有观察探针的两个探头和沿着与所述面的平行于样品支撑面相邻布置的把持探头的两个端子镊子。 在对样品表面施加按压力的同时按压镊子的两个端子，在两端子镊子之间镀锌，确定导电性，使两端子镊子之间产生电流。

公开(公告)号：US20090188011A1

公开(公告)日：2009-07-23

申请号：US12355365

申请日：2009-01-16

申请人： Masatoshi Yasutake

发明人： Masatoshi Yasutake

IPC分类号： G12B21/00

CPC分类号： G01Q30/20

摘要： To enable to freely interchange a front end shape of a work in accordance with an object of, for example, removing a dust or the like, in addition thereto, even in a case of contaminating a work, to be able to easily deal therewith, and to be able to recognize a defect even when, for example, operated by an operator of a beginner without being governed by a technique of the operator, a tweezers constituted by two arms having probes arranged opposedly to a sample integrated to a scanning probe microscope and constituting an object of observation or working respectively at front ends thereof, and a plurality of kinds of interchanging works one of the plurality of kinds of which is selectively grasped by the tweezers are provided. As the interchanging works, there are an observing stylus work, a work for a contact hole, a corner moving work, a cutting work, a spatula shape work.

摘要翻译： 为了能够根据例如除去灰尘等的目的自由地交换作品的前端形状，即使在污染作品的情况下，为了能够容易地处理， 并且即使当例如由初学者的操作者操作而不受操作者的技术控制时也能够识别缺陷，由具有与集成在扫描探针显微镜上的样本相对设置的探针的两个臂构成的镊子 并且分别构成其前端观察或工作的对象，并且提供了多种通过镊子选择性地夹持的多种交换工具。 作为交换工作，有一个观察手写笔工作，接触孔工作，角落移动工作，切割工作，铲形工作。

公开(公告)号：US07373806B2

公开(公告)日：2008-05-20

申请号：US10925049

申请日：2004-08-24

申请人： Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

发明人： Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

IPC分类号： G01B5/28

CPC分类号： G01Q10/065 ,  G01Q60/32

摘要： A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.

摘要翻译： 扫描探针显微镜具有用于进行扫描操作的探针尖端，以在与样品表面平行的X和Y方向上扫描样品表面，并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端，强制地振动探针尖端。 当探头尖端接近或与样品表面接触时，观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动，并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面，直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间，只有当检测单元检测到探针尖端的振动状态的变化时，控制单元才控制探针尖端沿Z方向移动离开样品表面。

公开(公告)号：US20060219901A1

公开(公告)日：2006-10-05

申请号：US11370006

申请日：2006-03-04

申请人： Masatoshi Yasutake ,  Takuya Nakaue ,  Kazutoshi Watanabe ,  Osamu Takaoka ,  Atsushi Uemoto ,  Naoya Watanabe ,  Yoshiteru Shikakura

发明人： Masatoshi Yasutake ,  Takuya Nakaue ,  Kazutoshi Watanabe ,  Osamu Takaoka ,  Atsushi Uemoto ,  Naoya Watanabe ,  Yoshiteru Shikakura

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01N23/225 ,  G01Q60/34

摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.

摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。

公开(公告)号：US20050262685A1

公开(公告)日：2005-12-01

申请号：US11135075

申请日：2005-05-23

申请人： Osamu Takaoka ,  Masatoshi Yasutake ,  Shigeru Wakiyama ,  Naoya Watanabe

发明人： Osamu Takaoka ,  Masatoshi Yasutake ,  Shigeru Wakiyama ,  Naoya Watanabe

IPC分类号： G01B21/22 ,  B23Q17/00 ,  B82B3/00 ,  B82Y15/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01B5/28 ,  G01Q60/24 ,  G01Q60/38 ,  G01Q80/00 ,  G03F1/08 ,  G03F1/68 ,  G03F1/72 ,  G03F7/00

CPC分类号： G01Q30/06 ,  G01Q40/00 ,  G01Q80/00 ,  G03F1/72 ,  G03F7/0002 ,  Y10T29/49004 ,  Y10T29/49771 ,  Y10T29/49822 ,  Y10T29/49824

摘要： An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error θ is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error θ of the probe, the mounting angle error of the probe is corrected in advance.

摘要翻译： 通过将具有垂直表面或垂直脊并且比样品材料更硬的扫描探针显微镜的探针推入用于测量凹陷的样品中来形成凹陷。 使用具有高纵横比的薄探针对垂直表面或垂直脊的方向进行形成的压痕的形状的高保真AFM观察，并且存储角度误差θ。 通过将样品台旋转与测量的测量的安装角度误差θ相对应的角度，预先校正探针的安装角度误差。

公开(公告)号：US20050050947A1

公开(公告)日：2005-03-10

申请号：US10925049

申请日：2004-08-24

申请人： Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

发明人： Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

IPC分类号： G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/24 ,  G01Q60/32 ,  G01B5/28 ,  H01J3/14

CPC分类号： G01Q10/065 ,  G01Q60/32

摘要： There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.

摘要翻译： 公开了一种扫描探针显微镜和扫描方法，其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤，缩短测量时间，提高吞吐量和测量精度，并且收集观测数据，例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元，用于当尖端接近样品表面时收集观察数据的观察单元，用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元，用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后，控制单元沿与样品表面平行的方向扫描尖端，直到到达X或Y方向的下一个观察位置。 在扫描期间，如果检测到尖端的振动状态的变化，则控制单元将尖端沿Z方向移动离开样品表面。

公开(公告)号：US06255127B1

公开(公告)日：2001-07-03

申请号：US09187938

申请日：1998-11-06

申请人： Naohiko Fujino ,  Isamu Karino ,  Masashi Ohmori ,  Masatoshi Yasutake ,  Shigeru Wakiyama

发明人： Naohiko Fujino ,  Isamu Karino ,  Masashi Ohmori ,  Masatoshi Yasutake ,  Shigeru Wakiyama

IPC分类号： H01L3126

CPC分类号： G01N21/94 ,  G01N21/9501 ,  G01N21/9503 ,  H01L22/12 ,  H01L22/20 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

摘要： To enable observation, analysis and evaluation of minute foreign substances by adopting a method for enabling performance of linkage between equipment coordinates of a particle examination equipment and apparatus coordinates of an analyzing apparatus such as SEM which is not a particle examination equipment with a precision higher than that with which coordinate linkage is performed between conventional equipment and apparatus coordinates. An analyzing method for analyzing minute foreign substances comprises the steps of determining the position of a minute foreign substance on the surface of a sample in a particle examination equipment, transferring the sample to a coordinate stage of an analyzing apparatus and inputting the position of the minute foreign substance determined by the particle examination equipment to thereby analyze the contents of this minute foreign substance. It is characterized by linking the equipment coordinates adopted by the particle examination equipment with the apparatus coordinates adopted by the analyzing apparatus by use of the same coordinate system based on the configurations of the sample.

摘要翻译： 为了能够观察，分析和评估微小的异物，通过采用能够实现粒子检查设备的设备坐标与不是具有高于 在常规设备和设备坐标之间进行哪个坐标连接。 用于分析微小异物的分析方法包括以下步骤：在粒子检查设备中确定样品表面上的微小异物的位置，将样品转移到分析设备的坐标台并输入分钟的位置 外来物质由颗粒检测设备确定，从而分析该微量异物的含量。 其特征在于，基于样本的构造，通过使用相同的坐标系将粒子检查装置采用的设备坐标与分析装置采用的装置坐标相连接。

公开(公告)号：US5945671A

公开(公告)日：1999-08-31

申请号：US800074

申请日：1997-02-12

申请人： Masatoshi Yasutake

发明人： Masatoshi Yasutake

IPC分类号： G01B21/30 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/10 ,  H01J37/00 ,  H01J37/20

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q10/02 ,  Y10S977/871 ,  Y10S977/872

摘要： A scanning probe microscope has a probe for measuring the shape of a sample surface and various physical properties of the sample, and a micro-positioning mechanism for positioning the sample proximate the probe. The micro-positioning mechanism has spring elements for effecting fine movement of the sample in a predetermined direction toward the probe, an electromagnetic power generating mechanism for driving the spring elements, a support mechanism mounted for movement in the predetermined direction and having a support member supported through a viscous element for effecting coarse movement of the sample in the predetermined direction, and a heating mechanism for heating the viscous element.

摘要翻译： 扫描探针显微镜具有用于测量样品表面的形状和样品的各种物理性质的探针以及用于将样品定位在探针附近的微型定位机构。 微型定位机构具有弹簧元件，用于使样品沿预定方向微细移动到探头，用于驱动弹簧元件的电磁发电机构，安装成沿预定方向移动的支撑机构， 通过用于在预定方向上实现样品粗略移动的粘性元件和用于加热粘性元件的加热机构。