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1.发明申请公开(公告)号：US20050262685A1
公开(公告)日：2005-12-01
申请号：US11135075
申请日：2005-05-23
IPC分类号： G01B21/22 , B23Q17/00 , B82B3/00 , B82Y15/00 , B82Y35/00 , B82Y40/00 , G01B5/28 , G01Q60/24 , G01Q60/38 , G01Q80/00 , G03F1/08 , G03F1/68 , G03F1/72 , G03F7/00
CPC分类号： G01Q30/06 , G01Q40/00 , G01Q80/00 , G03F1/72 , G03F7/0002 , Y10T29/49004 , Y10T29/49771 , Y10T29/49822 , Y10T29/49824
摘要： An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error θ is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error θ of the probe, the mounting angle error of the probe is corrected in advance.
摘要翻译： 通过将具有垂直表面或垂直脊并且比样品材料更硬的扫描探针显微镜的探针推入用于测量凹陷的样品中来形成凹陷。 使用具有高纵横比的薄探针对垂直表面或垂直脊的方向进行形成的压痕的形状的高保真AFM观察，并且存储角度误差θ。 通过将样品台旋转与测量的测量的安装角度误差θ相对应的角度，预先校正探针的安装角度误差。
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2.发明授权公开(公告)号：US07278299B2
公开(公告)日：2007-10-09
申请号：US11135075
申请日：2005-05-23
CPC分类号： G01Q30/06 , G01Q40/00 , G01Q80/00 , G03F1/72 , G03F7/0002 , Y10T29/49004 , Y10T29/49771 , Y10T29/49822 , Y10T29/49824
摘要： An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error θ is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error θ of the probe, the mounting angle error of the probe is corrected in advance.
摘要翻译： 通过将具有垂直表面或垂直脊并且比样品材料更硬的扫描探针显微镜的探针推入用于测量凹陷的样品中来形成凹陷。 使用具有高纵横比的薄探针对垂直表面或垂直脊的方向进行形成的压痕的形状的高保真AFM观察，并且存储角度误差θ。 通过将样品台旋转与测量的测量的安装角度误差θ相对应的角度，预先校正探针的安装角度误差。
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3.发明申请公开(公告)号：US20060022134A1
公开(公告)日：2006-02-02
申请号：US11185657
申请日：2005-07-20
IPC分类号： G21K7/00
摘要： The kind of a particle is determined by pressing a hard atomic force microscope stylus having a spring constant equal to or larger than 300 N/m onto a particle to be removed and detecting bending quantity relative to a press force and a kind of a stylus used for removing the particle is changed in accordance with the kind of the particle.
摘要翻译： 颗粒的种类通过将具有等于或大于300N / m的弹簧常数的硬质原子力显微镜触针压到待除去的颗粒上并相对于压力和使用的触针的种类检测弯曲量来确定 用于除去颗粒的物质根据颗粒的种类而改变。
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公开(公告)号：US07259372B2
公开(公告)日：2007-08-21
申请号：US11135076
申请日：2005-05-23
IPC分类号： G01N23/00
摘要： A processing method uses a probe of a scanning probe microscope. A fine marker is formed in a processing material by thrusting the probe, which is made of a material harder than the processing material, into a portion of the processing material disposed in the vicinity of an area of the processing material to be processed by the probe during a processing operation. A position of the fine marker on the processing material is detected during the processing operation. A drift amount of the area of the processing material is calculated in accordance with the detected position of the fine marker. A position of the area of the processing material is corrected in accordance with the calculated drift amount.
摘要翻译： 处理方法使用扫描探针显微镜的探针。 通过将由比处理材料更硬的材料制成的探针推入处理材料的被处理材料的附近的被探针加工的区域附近的一部分，在处理材料中形成细小的标记 在处理操作期间。 在处理操作期间检测处理材料上的精细标记的位置。 根据检测的精细标记的位置来计算处理材料的面积的漂移量。 处理材料的区域的位置根据计算的漂移量被校正。
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5.发明授权公开(公告)号：US07232995B2
公开(公告)日：2007-06-19
申请号：US11185657
申请日：2005-07-20
IPC分类号： G21K7/00
摘要： The kind of a particle is determined by pressing a hard atomic force microscope stylus having a spring constant equal to or larger than 300 N/m onto a particle to be removed and detecting bending quantity relative to a press force and a kind of a stylus used for removing the particle is changed in accordance with the kind of the particle.
摘要翻译： 颗粒的种类通过将具有等于或大于300N / m的弹簧常数的硬质原子力显微镜触针压到待除去的颗粒上并相对于压力和使用的触针的种类检测弯曲量来确定 用于除去颗粒的物质根据颗粒的种类而改变。
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公开(公告)号：US20050263700A1
公开(公告)日：2005-12-01
申请号：US11135076
申请日：2005-05-23
IPC分类号： B81C99/00 , B82B3/00 , B82Y15/00 , B82Y40/00 , G01N23/00 , G01Q60/10 , G01Q80/00 , G01Q90/00 , G03F1/08 , G03F1/68 , G03F1/72
摘要： Fine markers are formed by thrusting a probe, which is harder than material to be processed, the formed fine markers are observed in the course of processing, the drift amount is obtained from the change of the position of the center of gravity of the hole, and the processing is restarted in the processing area corrected by the obtained drift amount.
摘要翻译： 通过推出比待处理材料更难的探针来形成精细标记，在加工过程中观察形成的精细标记，漂移量由孔的重心位置的变化获得， 并且在通过所获得的漂移量校正的处理区域中重新开始处理。
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公开(公告)号：US07378654B2
公开(公告)日：2008-05-27
申请号：US11066063
申请日：2005-02-25
IPC分类号： G01N23/00
CPC分类号： G03F1/72 , Y10S977/855
摘要： A processing probe for repairing a defective portion in a sample has a cantilever and a probe separate and independent from the cantilever and integrally connected to an end portion of the cantilever for scratch-processing a defective portion of a sample. The cantilever and the probe are conductive for preventing the generation of electrostatic charges by friction of the probe against the sample during scratch-processing of the defective portion of the sample.
摘要翻译： 用于修复样品中的缺陷部分的处理探针具有与悬臂分离并独立的悬臂和探针，并且整体地连接到悬臂的端部，用于对样品的缺陷部分进行刮擦处理。 悬臂和探针是导电的，用于通过在样品的缺陷部分的刮擦处理期间探针与样品的摩擦来防止产生静电电荷。
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公开(公告)号：US20050199809A1
公开(公告)日：2005-09-15
申请号：US11066063
申请日：2005-02-25
CPC分类号： G03F1/72 , Y10S977/855
摘要： A processing probe capable of repairing a mask-pattern without any damage by preventing electric discharge between the mask patterns, which is caused by electrostatic electrification due to friction between a probe and a mask glass substrate, in repairing a black defect (a convex defect) of a photo-mask with the probe microscope technique is provided. A probe used for mechanically scratching a defective portion is arranged to have conductively. This allows static electricity due to friction in processing to be released from the probe, a cantilever and a cantilever holding member to a square body of an apparatus to prevent electrostatic electrification of a mask glass substrate, and thereby, to prevent electric discharge between mask patterns, so that the mask pattern can be repaired without any damage.
摘要翻译： 一种能够通过防止由于探针和掩模玻璃基板之间的摩擦引起的静电带电导致的掩模图案之间的放电而修复掩模图案而无任何损坏的处理探针，以修复黑色缺陷（凸起缺陷） 提供了具有探针显微镜技术的光掩模。 用于机械地划伤缺陷部分的探针被布置成具有导电性。 这允许由于处理中的摩擦而导致的静电从探针，悬臂和悬臂保持构件释放到设备的正方体，以防止掩模玻璃基板的静电带电，从而防止掩模图案之间的放电 ，使得掩模图案可以被修复而没有任何损坏。
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公开(公告)号：US07373806B2
公开(公告)日：2008-05-20
申请号：US10925049
申请日：2004-08-24
IPC分类号： G01B5/28
CPC分类号： G01Q10/065 , G01Q60/32
摘要： A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.
摘要翻译： 扫描探针显微镜具有用于进行扫描操作的探针尖端，以在与样品表面平行的X和Y方向上扫描样品表面，并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端，强制地振动探针尖端。 当探头尖端接近或与样品表面接触时，观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动，并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面，直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间，只有当检测单元检测到探针尖端的振动状态的变化时，控制单元才控制探针尖端沿Z方向移动离开样品表面。
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公开(公告)号：US20050050947A1
公开(公告)日：2005-03-10
申请号：US10925049
申请日：2004-08-24
CPC分类号： G01Q10/065 , G01Q60/32
摘要： There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.
摘要翻译： 公开了一种扫描探针显微镜和扫描方法，其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤，缩短测量时间，提高吞吐量和测量精度，并且收集观测数据，例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元，用于当尖端接近样品表面时收集观察数据的观察单元，用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元，用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后，控制单元沿与样品表面平行的方向扫描尖端，直到到达X或Y方向的下一个观察位置。 在扫描期间，如果检测到尖端的振动状态的变化，则控制单元将尖端沿Z方向移动离开样品表面。
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