公开(公告)号：US20050020089A1

公开(公告)日：2005-01-27

申请号：US10666002

申请日：2003-09-17

Applicant: Hongqin Shi ,  Gregory Schaadt ,  Andrew Huibers ,  Satyadev Patel

Inventor： Hongqin Shi ,  Gregory Schaadt ,  Andrew Huibers ,  Satyadev Patel

IPC: G02B26/08 ,  H01L21/00 ,  H01L21/302 ,  H01L21/461

CPC classification number: H01L21/67069 ,  B81C1/00595 ,  B81C2201/0132 ,  G02B26/0841

Abstract: The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.

Abstract translation: 本发明公开了一种使用具有自发气相化学蚀刻剂的气相蚀刻剂配方去除微结构制造中的牺牲材料的方法和装置。 气相蚀刻剂配方具有对应于微结构的结构层之间的牺牲层的最小厚度的平均自由程。 该方法在去除微结构结构层下面的牺牲层时尤其重要。

公开(公告)号：US20100302618A1

公开(公告)日：2010-12-02

申请号：US12853411

申请日：2010-08-10

Applicant: Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

Inventor： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

IPC: G02B26/00 ,  B32B37/14 ,  B05D5/06

CPC classification number: G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

Abstract translation: 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

公开(公告)号：US07436572B2

公开(公告)日：2008-10-14

申请号：US10927408

申请日：2004-08-25

Applicant: Andrew Huibers ,  Satyadev Patel

Inventor： Andrew Huibers ,  Satyadev Patel

IPC: G02B26/02 ,  G03B21/26

CPC classification number: H04N5/7458 ,  G02B26/008 ,  G02B26/0841 ,  G03B21/008

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.

Abstract translation: 公开了一种空间光调制器以及用于制造这种调制器的方法。 空间光调制器包括微镜阵列，每个微镜具有通过基板上的铰链保持的铰链和微镜板，微镜板附接到铰链，使得微镜板可以沿着旋转轴线旋转并且铰链结构位于 在微镜板和光源之间。 镜板形成在铰链和形成有铰链的基板之间。 结果，在操作期间铰链暴露于入射光。

公开(公告)号：US07411717B2

公开(公告)日：2008-08-12

申请号：US11256035

申请日：2005-10-21

Applicant: Satyadev Patel ,  Andrew Huibers

Inventor： Satyadev Patel ,  Andrew Huibers

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is not parallel to the substrate on which the mirror plate is formed. The micromirror device may have an ON state stopper for limiting the rotation of the mirror plate at the ON state angle, but does not have an OFF state stopper. The non-zero OFF state is achieved by attaching the mirror plate to a deformable hinge held by a hinge support that is curved at the natural resting state.

Abstract translation: 空间光调制器包括微镜器件的阵列，每个微镜器件具有反射和可偏转的镜板。 在操作期间，镜板在ON和OFF状态之间移动，其中OFF状态是其中镜板不平行于其上形成有镜板的基板的状态。 微反射镜装置可以具有ON状态止动器，用于将镜板的旋转限制在ON状态角度，但不具有OFF状态挡块。 通过将镜板附接到由在自然静止状态下弯曲的铰链支撑件保持的可变形铰链来实现非零关闭状态。

公开(公告)号：US07394140B2

公开(公告)日：2008-07-01

申请号：US11110184

申请日：2005-04-19

Applicant: Satyadev Patel ,  Andrew Huibers ,  Chris Spindt ,  Peter H Heureux

Inventor： Satyadev Patel ,  Andrew Huibers ,  Chris Spindt ,  Peter H Heureux

IPC: H01L31/0232 ,  G02B26/00

CPC classification number: G09G3/346 ,  G02B26/0833 ,  G09G2300/0426 ,  G09G2300/0465

Abstract: Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.

Abstract translation: 本文公开了一种微镜阵列器件，其包括反射偏转镜板阵列，每个反射镜阵列与一个单个寻址电极相关联以被偏转到ON状态角。 透光电极设置在靠近镜板的位置，用于将镜板偏转到非零OFF角度。 镜面阵列布置在阵列中，中心距离为10.17微米或更小。

公开(公告)号：US07375873B2

公开(公告)日：2008-05-20

申请号：US11069408

申请日：2005-02-28

Applicant: Satyadev Patel ,  James Dunphy ,  Peter Richards ,  Michel Combes

Inventor： Satyadev Patel ,  James Dunphy ,  Peter Richards ,  Michel Combes

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

Abstract translation: 这里公开的是操作包括微镜阵列的装置的方法。 该方法包括可用于在操作期间修复微镜阵列的粘性微镜的过程。 修复过程在ON状态下，对阵列中的微镜的镜板施加两个连续的刷新电压，其中脉冲在时间上比微镜的特征振荡时间长。 修复过程可独立应用于微镜。 或者，修复过程可以结合偏置反转过程。

公开(公告)号：US07215459B2

公开(公告)日：2007-05-08

申请号：US11056732

申请日：2005-02-11

Applicant: Andrew Huibers ,  Satyadev Patel ,  Jonathan Doan ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

Inventor： Andrew Huibers ,  Satyadev Patel ,  Jonathan Doan ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B27/1033 ,  Y10S359/904

Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

Abstract translation: 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。

公开(公告)号：US07153443B2

公开(公告)日：2006-12-26

申请号：US10805610

申请日：2004-03-18

Applicant: Jonathan Doan ,  Satyadev Patel

Inventor： Jonathan Doan ,  Satyadev Patel

IPC: H01L21/302

CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

Abstract: A microstructure and the method for making the same are disclosed herein. The microstructure has structural members, at least one of which comprises an intermetallic compound. In making such a microstructure, a sacrificial material is employed. After completion of forming the structural layers, the sacrificial material is removed by a spontaneous vapor phase chemical etchant.

Abstract translation: 本文公开了微结构及其制造方法。 微结构具有结构构件，其中至少一个包括金属间化合物。 在制造这样的微结构时，采用牺牲材料。 在完成形成结构层之后，牺牲材料通过自发气相化学腐蚀剂除去。

公开(公告)号：US07099065B2

公开(公告)日：2006-08-29

申请号：US10437776

申请日：2003-05-13

Applicant: Satyadev Patel ,  Andrew G. Huibers ,  Christopher J. Spindt ,  Peter J. Heureux

Inventor： Satyadev Patel ,  Andrew G. Huibers ,  Christopher J. Spindt ,  Peter J. Heureux

IPC: G02B26/00

CPC classification number: B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  C10L1/026 ,  G02B26/0841

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.

公开(公告)号：US07042623B1

公开(公告)日：2006-05-09

申请号：US10969258

申请日：2004-10-19

Applicant: Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

Inventor： Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

IPC: G02B26/00

CPC classification number: G02B26/0833

Abstract: Disclosed herein is a micromirror array device package having a light absorbing material disposed within the package for reducing undesired light scattering. The light absorbing material can be deposited as a thin film (or strip, frame, segments or a combination thereof), or as a vertical wall insert between the micromirror array device and a cover substrate of the package.

Abstract translation: 本文公开了一种微镜阵列器件封装，其具有设置在封装内的光吸收材料，用于减少不期望的光散射。 光吸收材料可以作为薄膜（或条，框架，段或其组合）沉积，或者作为微镜阵列器件和封装的覆盖衬底之间的垂直壁插入物沉积。