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公开(公告)号：US4463073A
公开(公告)日：1984-07-31
申请号：US394642
申请日：1982-07-01
申请人： Tateoki Miyauchi , Katsuro Mizukoshi , Mikio Hongo , Masao Mitani , Masaaki Okunaka , Takao Kawanabe , Isao Tanabe
发明人： Tateoki Miyauchi , Katsuro Mizukoshi , Mikio Hongo , Masao Mitani , Masaaki Okunaka , Takao Kawanabe , Isao Tanabe
IPC分类号： G03F1/00 , G03F1/72 , H01L21/027 , H01L21/30 , G03F9/00
CPC分类号： G03F1/72 , H01L21/30 , Y10S430/139 , Y10S430/146
摘要： A method and apparatus for repairing defect portions of a photomask. A complex material from which a light shading material can be deposited is applied over the photomask. A white (blank) defect region is irradiated with a continuous wave laser light beam projected in a slit-like light image to thereby convert the complex material into the shading material. After washing, a half-deposited portion formed in a peripheral portion of the light shading region is further deposited by a post-baking process. Those portions of the light shading film which depart from the desired mask pattern are removed together with black (solid) defect portion originally present in the photomask through irradiation with a pulse laser light beam. The pulse laser is constituted by a Dye-laser, while the continuous wave laser is constituted by an Ar-laser. A specific half-mirror which transmits therethrough Ar-laser light while reflecting Dye-laser light is displaceable provided. The white and the black defects are selectively centered on a same optical axis of an optical projection system including a slit and a condenser lens, whereby the white and the black defect portions are each removed through irradiation with the associated laser light projected thereto in a slit-like light image through the same optical projection system.
摘要翻译： 一种用于修复光掩模的缺陷部分的方法和装置。 将光阴影材料沉积的复合材料施加在光掩模上。 用投影在狭缝状光图像中的连续波激光束照射白色（空白）缺陷区域，从而将复合材料转换成遮光材料。 洗涤后，通过后烘烤处理进一步沉积形成在遮光区域的周边部分中的半沉积部分。 通过照射脉冲激光，与原来存在于光掩模中的黑色（实心）缺陷部分一起除去遮光膜的偏离所需掩模图案的那些部分。 脉冲激光由染料激光器构成，而连续波激光由Ar激光器构成。 通过反射染料激光而透过其的Ar激光的特定半反射镜是可置换的。 白色和黑色缺陷选择性地集中在包括狭缝和聚光透镜的光学投影系统的相同光轴上，由此白色和黑色缺陷部分通过照射投射到狭缝中的相关激光而被去除 类似的光图像通过相同的光学投影系统。
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22.发明授权
公开(公告)号：US5832595A
公开(公告)日：1998-11-10
申请号：US260382
申请日：1994-06-14
申请人： Shigenobu Maruyama , Mikio Hongo , Haruhisa Sakamoto , Tateoki Miyauchi , Ryohei Satoh , Kiyoshi Matsui , Shinichi Kazui , Kaoru Katayama , Hiroshi Fukuda
发明人： Shigenobu Maruyama , Mikio Hongo , Haruhisa Sakamoto , Tateoki Miyauchi , Ryohei Satoh , Kiyoshi Matsui , Shinichi Kazui , Kaoru Katayama , Hiroshi Fukuda
CPC分类号： H01L21/485 , H05K3/225 , H05K1/095 , H05K2203/0769 , H05K2203/0783 , H05K2203/107 , H05K2203/108 , H05K2203/121 , H05K2203/173 , H05K2203/175 , H05K3/0017 , H05K3/027 , H05K3/102 , Y10T29/49124 , Y10T29/49718 , Y10T29/49732
摘要： A method of modifying an electronic circuit board by performing disconnection or connection of conductive lines at a specified or an arbitrary position of the conductive lines of the electronic circuit board thereby changing an electric circuit and of completely modifying an open pattern defect of the conductive lines or an insulator layer, and its device, wherein a first energy beam is irradiated to portions of repair terminals 9 and 9' which are intended to connect or disconnect, of conductive lines 5 and 5' in the electronic circuit board thereby removing a protection layer, making windows and exposing the terminals 9 and 9' for connection; a second energy beam is irradiated thereby disconnecting the repair terminals 9 and 9', or a metal piece for connecting is supplied to between the repair terminals 9 and 9' and applying an energy thereto thereby electrically connecting them; and the disconnected or connected windowed portion is locally coated with the insulator layer thereby modifying the conductive lines of the electronic circuit board. Further, windows 311 or 311' is formed in an insulating protection layer 310 on a conductive line connecting portion 308 formed in a couple or a conductive line disconnecting portion 309, a conductive line of the conductive line disconnecting portion is disconnected or a liquid material 312 for connecting conductive lines is supplied to the conductive line connecting portion 308, a metal layer 313 is precipitated by heating the liquid material 312 thereby connecting the conductive line connecting portion 308, and the window 311 or 311' is coated with an organic insulator layer.
摘要翻译： 通过在电子电路板的导线的指定或任意位置执行导线的断开或连接来改变电子电路板的方法，从而改变电路并完全改变导电线的开路图案缺陷，或 绝缘体层及其装置，其中第一能量束照射到旨在连接或断开电子电路板中的导线5和5'的修复端子9和9'的部分，从而去除保护层， 制造窗户并露出端子9和9'用于连接; 照射第二能量束，从而断开维修端子9和9'，或者用于连接的金属片供应到修理端子9和9'之间并向其施加能量，从而电连接它们; 并且断开或连接的窗口部分局部地涂覆有绝缘体层，从而修改电子电路板的导线。 此外，窗311或311'形成在形成在耦合或导线断路部分309中的导线连接部分308上的绝缘保护层310中，导线断开部分的导线被断开或液体材料312 用于连接导线的导线被提供给导线连接部分308，金属层313通过加热液体材料312而沉淀，从而连接导线连接部分308，并且窗311或311'被涂覆有机绝缘体层。
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公开(公告)号：US4079230A
公开(公告)日：1978-03-14
申请号：US627279
申请日：1975-10-30
CPC分类号： G02B26/108 , B23K26/08 , B23K26/082 , G02B26/0891 , G02B26/10
摘要： The laser light emitted from a laser generator is cast on two prisms which have the same angle of deflection and are supported rotatably by support members so as to be rotated about the optical axis of the laser light in the opposite directions at the same speed. The laser beam scanned through the rotations of the two prisms is focussed on a work piece by a convergence lens so that the work piece is linearly scanned for laser-working. Moreover, there are provided a pair of scanning sections, each comprising such a pair of prisms as described above, the scanning sections being so arranged that the directions of scanning the laser beam by the respective sections may be perpendicular to each other. The rotational speeds of the prisms of each scanning section is so controlled as to subject the spot of the laser beam to two-dimensional scanning for laser-working a work piece.
摘要翻译： 从激光发生器发射的激光投射在具有相同的偏转角的两个棱镜上，并且由支撑部件可旋转地支撑，以便以相同的速度在相反的方向围绕激光的光轴旋转。 通过两个棱镜的旋转扫描的激光束通过会聚透镜聚焦在工件上，使得工件被线性扫描以进行激光加工。 此外，提供了一对扫描部分，每个扫描部分包括如上所述的这样的一对棱镜，扫描部分被布置成使得由各个部分扫描激光束的方向可以彼此垂直。 对每个扫描部分的棱镜的旋转速度进行控制，以使激光束的光斑进行二维扫描以对工件进行激光加工。
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