公开(公告)号：US10121671B2

公开(公告)日：2018-11-06

申请号：US15234448

申请日：2016-08-11

Applicant: Applied Materials, Inc.

Inventor： Xinyu Fu ,  David Knapp ,  David Thompson ,  Jeffrey W. Anthis ,  Mei Chang

IPC: H01L21/44 ,  H01L21/285 ,  C23C16/08 ,  C23C16/455 ,  C23C16/06 ,  H01L29/786

Abstract: Processing methods comprising exposing a substrate to an optional nucleation promoter followed by sequential exposure of a first reactive gas comprising a metal oxyhalide compound and a second reactive gas to form a metal film on the substrate.

公开(公告)号：US09196474B2

公开(公告)日：2015-11-24

申请号：US14193088

申请日：2014-02-28

Applicant: Applied Materials, Inc.

Inventor： David Knapp ,  David Thompson

IPC: H01L21/31 ,  H01L21/02 ,  C23C16/34 ,  C23C16/448 ,  C23C16/455

CPC classification number: H01L21/02175 ,  C23C16/34 ,  C23C16/4481 ,  C23C16/45536 ,  C23C16/45553 ,  H01L21/02183 ,  H01L21/02194

Abstract: Described are methods and apparatuses for the stabilization of precursors, which can be used for the deposition of manganese-containing films. Certain methods and apparatus relate to lined ampoules and/or 2-electron donor ligands.

Abstract translation: 描述了用于稳定前体的方法和装置，其可用于沉积含锰膜。 某些方法和装置涉及内衬安瓿和/或2-电子给体配体。

公开(公告)号：US09005704B2

公开(公告)日：2015-04-14

申请号：US14198776

申请日：2014-03-06

Applicant: Applied Materials, Inc.

Inventor： David Thompson ,  Jeffrey W. Anthis ,  David Knapp ,  Benjamin Schmiege

IPC: C23C16/14 ,  C23C16/34 ,  H05H1/24 ,  C23C16/42 ,  C23C16/18 ,  C23C16/455

CPC classification number: C23C16/42 ,  C23C16/18 ,  C23C16/34 ,  C23C16/45536 ,  C23C16/45553 ,  H01L21/28518 ,  H01L21/28562 ,  H01L21/76843

Abstract: Cobalt-containing films, as well as methods for providing the cobalt-containing films. Certain methods pertain to exposing a substrate surface to a precursor and a co-reactant to provide a cobalt-containing film, the first precursor having a structure represented by: wherein each R is independently C1-C6 substituted or un-substituted alkanes, branched or un-branched alkanes, substituted or un-substituted alkenes, branched or un-branched alkenes, substituted or un-substituted alkynes, branched or un-branched alkynes or substituted or un-substituted aromatics, L is a coordinating ligand comprising a Lewis base.

Abstract translation: 含钴膜，以及提供含钴膜的方法。 某些方法涉及将底物表面暴露于前体和共反应物以提供含钴膜，第一前体具有由以下表示的结构：其中每个R独立地为C 1 -C 6取代或未取代的烷烃，支链或 支链烷烃，取代或未取代的烯烃，支链或非支链烯烃，取代或未取代的炔烃，支链或非支链炔烃或取代或未取代的芳烃，L是包含路易斯碱的配位配体。