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公开(公告)号：US20120164564A1
公开(公告)日：2012-06-28
申请号：US13381590
申请日：2010-06-29
CPC分类号： G03F1/72 , B82Y10/00 , B82Y40/00 , C23C18/06 , C23C18/1204 , C23C18/1254 , C23C18/14 , G03F7/0002
摘要： Additive repair of advanced photomasks with low temperature or optical curing via direct write lithographic printing with sharp tips and cantilevers. The optical properties of the materials formed from the ink can be tuned (e.g., n and k values). Sol gel inks, including silsesquioxane inks, can be used to form MoSi compositions. The repaired photomasks are resistant to washing under normal photomask washing conditions. AFM instrumentation can be used to perform the additive repair to provide the high resolution and registration.
摘要翻译： 通过直接写入平版印刷与尖锐的尖端和悬臂，对低温或光学固化的先进光掩模进行添加修复。 可以调整由墨形成的材料的光学性质（例如n和k值）。 溶胶凝胶油墨，包括倍半硅氧烷油墨，可用于形成MoSi组合物。 修复的光掩模在正常的光掩模洗涤条件下耐洗涤。 AFM仪器可用于执行添加剂修复以提供高分辨率和注册。
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公开(公告)号：US20120297509A1
公开(公告)日：2012-11-22
申请号：US13530006
申请日：2012-06-21
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译： 以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。 该阵列设计为只有尖端触摸表面。 这可以通过长尖端和弯曲的悬臂和对准来实现。 一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端， 其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。 可以制备组合阵列和生物阵列。 阵列可以通过微加工方法制造。
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公开(公告)号：US08220317B2
公开(公告)日：2012-07-17
申请号：US11690738
申请日：2007-03-23
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译： 以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。 该阵列设计为只有尖端触摸表面。 这可以通过长尖端和弯曲的悬臂和对准来实现。 一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端， 其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。 可以制备组合阵列和生物阵列。 阵列可以通过微加工方法制造。
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公开(公告)号：US20110274839A1
公开(公告)日：2011-11-10
申请号：US13064766
申请日：2011-04-13
CPC分类号： G03F7/0002 , B81B2203/0118 , B81C1/00031 , B81C99/0025 , B82B3/00 , B82Y10/00 , B82Y40/00 , G03F7/2049
摘要： Cantilever design for patterning from a cantilever tip can be improved with, for example, a recessed area surrounding the cantilever tip. A device for printing nanoscopic and microscopic patterns includes at least one cantilever having a front surface, a first side edge, a second side edge, and a first end which is a free end and a second end which is a non-free end. The front surface includes at least one first sidewall disposed at the first cantilever side edge and at least one second sidewall disposed at the second cantilever side edge opposing the first cantilever side edge, at least one channel, adapted to hold a fluid, disposed between the first and second sidewalls, wherein the channel, the first sidewall, and the second sidewall extend toward the cantilever free end but do not reach the free end, and a base region having a boundary defined by the first edge, the second edge, and the cantilever free end and also the first sidewall, second sidewall, and the channel, wherein the base region comprises a tip extending away from the cantilever front surface. Improved deposition can result. Fluidic inks comprising biomolecules can be patterned successfully.
摘要翻译： 例如可以通过围绕悬臂尖端的凹陷区域来改善从悬臂尖端进行图案化的悬臂设计。 用于印刷纳米尺度和微观图案的装置包括至少一个具有前表面，第一侧边缘，第二侧边缘以及作为自由端的第一端和作为非自由端的第二端的悬臂。 前表面包括设置在第一悬臂侧边缘处的至少一个第一侧壁和设置在与第一悬臂侧边缘相对的第二悬臂侧边缘处的至少一个第二侧壁，至少一个适于保持流体的通道， 第一和第二侧壁，其中，所述通道，所述第一侧壁和所述第二侧壁朝向所述悬臂自由端延伸，但是不到达所述自由端，并且具有由所述第一边缘，所述第二边缘和所述第二边缘限定的边界的基底区域 悬臂自由端以及第一侧壁，第二侧壁和通道，其中基部区域包括远离悬臂前表面延伸的尖端。 可以改善沉积。 可以成功地构图包含生物分子的流体油墨。
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公开(公告)号：US20100100989A1
公开(公告)日：2010-04-22
申请号：US12465625
申请日：2009-05-13
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译： 描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。 还提供了制造和使用这种装置的方法。
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公开(公告)号：US08393011B2
公开(公告)日：2013-03-05
申请号：US12465625
申请日：2009-05-13
IPC分类号： G01Q70/14
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译： 描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。 还提供了制造和使用这种装置的方法。
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公开(公告)号：US20080105042A1
公开(公告)日：2008-05-08
申请号：US11690738
申请日：2007-03-23
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译： 以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。 该阵列设计为只有尖端触摸表面。 这可以通过长尖端和弯曲的悬臂和对准来实现。 一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端， 其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。 可以制备组合阵列和生物阵列。 阵列可以通过微加工方法制造。
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