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公开(公告)号：US07383955B2
公开(公告)日：2008-06-10
申请号：US10725288
申请日：2003-12-02
IPC分类号： B65D85/30
CPC分类号： H01L21/67373 , H01L21/67379 , H01L21/67383
摘要： A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a planar contact face which comes into contact with the slotted plate to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate. The upper receiving element on the slotted plate has a planar contact face. The lower fitting portion provides vertical, horizontal and front/rear positioning.
摘要翻译： 薄板支撑容器包括用于容纳半导体晶片的容器体，用于封闭容器主体的盖单元和用于从相对侧支撑半导体晶片的开槽板。 设置有用于支撑开槽板的上部的上配合部分和用于支撑开槽板的下部的下配合部分。 上装配部分的上配件具有与开槽板接触的平面接触面，从而将开槽板在前后方向上定位，同时抑制开槽板的摆动。 开槽板上的上接收元件具有平面接触面。 下配件部分提供垂直，水平和前/后定位。
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公开(公告)号：US07357258B2
公开(公告)日：2008-04-15
申请号：US10896912
申请日：2004-07-23
IPC分类号： B65D85/28
CPC分类号： H01L21/67369 , H01L21/67383 , Y10S206/832
摘要： The attaching-and-detaching operation of a lid unit, and the operation of taking in and out semiconductor wafers stored in a container body are facilitated. Thin-plate supporting units for supporting semiconductor wafers are provided in the container body of a thin-plate supporting container, and wafer holding units for pressing and supporting the semiconductor wafers, supported by the thin-plate supporting units, from a lid unit side are provided inside a lid unit. The area of a lower surface of a V-shaped groove of the wafer holding unit is increased. The V-shaped groove easily fits the peripheral portion of the semiconductor wafer when attaching the lid unit to the container body. The lower surface of a V-shaped groove of the thin-plate supporting portion is roughened to enhance slipping property with respect to the semiconductor wafer. The angle of inclination of a ridge is determined to be 2 to 5 degrees with respect to the horizontal direction.
摘要翻译： 盖单元的安装和拆卸操作以及存储在容器体中的半导体晶片的进出操作变得容易。 用于支撑半导体晶片的薄板支撑单元设置在薄板支撑容器的容器主体中，并且由盖单元侧支撑由薄板支撑单元支撑的半导体晶片的晶片保持单元是 设置在盖单元内。 晶片保持单元的V形槽的下表面的面积增加。 当将盖单元附接到容器主体时，V形槽容易地配合半导体晶片的周边部分。 薄板支撑部分的V形槽的下表面被粗糙化以增强相对于半导体晶片的滑动性能。 脊的倾斜角度相对于水平方向被确定为2至5度。
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公开(公告)号：US20060081635A1
公开(公告)日：2006-04-20
申请号：US11245105
申请日：2005-10-07
CPC分类号： H01L21/67376 , F16J15/025 , F16J15/061 , F16J15/062 , H01L21/67763 , H01L21/67766 , H01L21/67769
摘要： To prevent a sealing member from falling off, facilitate attachment of the sealing member, and improve the sealing property of the sealing member. The sealing member of the present invention includes a plurality of individually deformable portions fitted into fitting groove portions separated across a protrusion in the fitting groove formed in one of a container main body and a cover member, a coupling portion connecting the individually deformable portions, and a sealing piece abutting against a wall surface of the other one of the container main body and the cover member to seal a space, the sealing piece being integrated with the coupling portion connecting the individually deformable portions. Convex ribs are respectively formed on opposite sides of the individually deformable portions to elastically come into close contact with the wall surface of the protrusion.
摘要翻译： 为了防止密封部件脱落，便于密封部件的安装，提高密封部件的密封性。 本发明的密封构件包括多个可单独变形的部分，该多个可单独变形的部分嵌合在形成在容器主体和盖构件中的一个中的配合槽中的突起之间分离的装配槽部分中，连接单独可变形部分的联接部分和 密封件与所述容器主体和所述盖部件中的另一个的壁面抵接以密封空间，所述密封件与连接所述可变形部分的所述联接部分一体化。 凸肋分别形成在单独可变形部分的相对侧上，以弹性地与突起的壁表面紧密接触。
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公开(公告)号：US20050133402A1
公开(公告)日：2005-06-23
申请号：US10896913
申请日：2004-07-23
CPC分类号： H01L21/67373 , H01L21/67383
摘要： The attaching-and-detaching operation of a lid unit is automated using an existing attaching-and-detaching device. A lid unit for closing a container body of a thin-plate supporting container for use in storing semiconductor wafers therein is provided. A simplified attaching-and-detaching mechanism allows the lid unit to be attached and detached by easy locking and unlocking with respect to the container body. The simplified attaching-and-detaching mechanism includes a locking member engageable with a second receiving device of the container body, and a guiding member disposed at the extremity of the locking member, which guiding member reaches the second receiving device and guides the locking member into the second receiving device in a state in which the main body fits lightly in the container body. The guiding member includes a reaching portion that first reaches the second receiving device, and a guiding portion that guides the locking member to the second receiving device.
摘要翻译： 使用现有的安装和拆卸装置自动使用盖子单元的安装和拆卸操作。 提供了用于封闭用于在其中存储半导体晶片的薄板支撑容器的容器主体的盖单元。 简化的安装和拆卸机构允许通过容易地相对于容器主体的锁定和解锁来将盖单元附接和拆卸。 简化的附接和分离机构包括可与容器主体的第二接收装置接合的锁定构件，以及设置在锁定构件的末端处的引导构件，该引导构件到达第二接收装置并将锁定构件引导到 第二接收装置处于主体轻轻地装配在容器主体中的状态。 引导构件包括第一到达第二接收装置的到达部分和将锁定构件引导到第二接收装置的引导部分。
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公开(公告)号：US20060126052A1
公开(公告)日：2006-06-15
申请号：US11293084
申请日：2005-12-05
IPC分类号： G03B27/62
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67005 , H01L21/6735
摘要： The present invention allows a reticle-carrying container 11 to be fastened in a reticle stocker 2 even if the reticle-carrying container 11 is wrongly oriented. The reticle-carrying container 11 includes an interior with an opening at one end for storing a reticle 12, a door 14 for covering and blocking the opening, and a seal material 15 for sealing the interior hermetically when the door 14 blocks the pod 13. The reticle-carrying container 11 is provided with two pairs of kinematic pin grooves 61 for positioning and fastening the reticle-carrying container 11, which are formed with a 180-degree turn from each other on the outer surface of the door 14. Receiving parts 22 for receiving and holding the kinematic pin grooves 61 are arranged in the positions corresponding to the kinematic pin grooves 61 on the outer surface of the pod 13 so that the two pairs of kinematic pin grooves 61 can be engaged with the pins in the both orientations.
摘要翻译： 本发明即使标线承载容器11错误地定向，也能够将标线承载容器11紧固在掩模版保存架2中。 标本承载容器11包括内部，其一端具有用于存储标线12的开口，用于覆盖和阻塞开口的门14，以及当门14阻挡荚13时密封内部的密封材料15。 标线承载容器11设置有两对运动销槽61，用于在门14的外表面上彼此形成180度转弯的定影和紧固光罩承载容器11。 用于接收和保持运动销槽61的接收部件22被布置在与容器13的外表面上的运动销槽61相对应的位置中，使得两对运动销槽61可以与销中的销接合 两个方向。
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公开(公告)号：US20060021904A1
公开(公告)日：2006-02-02
申请号：US11242566
申请日：2005-10-04
申请人： Chiaki Matsutori , Takaharu Oyama
发明人： Chiaki Matsutori , Takaharu Oyama
IPC分类号： B65D85/48
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container body. The supporting member includes a base plate portion, side plates extending from the base plate portion, and a handle on each side plate for lifting the container body. The thin plate supporting member has contacting portions to support the thin plates, supporting members which elastically support the contacting portions, and a base support bar to support the supporting portions. The tip end of each supporting portion contacts a support stage, and elastically supports the contacting portions from both sides.
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公开(公告)号：US09387960B2
公开(公告)日：2016-07-12
申请号：US14131120
申请日：2012-07-03
申请人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
发明人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
IPC分类号： B65D43/02 , H01L21/673
CPC分类号： B65D43/02 , H01L21/67373
摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。
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公开(公告)号：US20060027477A1
公开(公告)日：2006-02-09
申请号：US11242531
申请日：2005-10-04
申请人： Chiaki Matsutori , Takaharu Oyama
发明人： Chiaki Matsutori , Takaharu Oyama
IPC分类号： B65D85/48
CPC分类号： H01L21/67376 , H01L21/67369 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A wafer storage container has a container body and a lid. Thin plates are inserted into and picked up from the container body. The container has lid supporters placed on a lid receptacle of the container body, and contacting portions contact with the lid supporters to support the lid. A supporting member is a member attached to support the container body. The supporting member has a base plate portion to support the container body, side plate portions formed as standing from the base plate portion, and a handle on each side plate gripped to lift the container body. The thin plate supporting member has contacting portions to support thin plates, supporting members to support the contacting portions elastically, and base supporting bar portions to support the supporting portions. Tip end of each supporting portion contacts with a contacting portion of each supporting stage, and elastically supports the contacting portions from both sides.
摘要翻译： 晶片储存容器具有容器主体和盖子。 将薄板从容器主体插入并从容器主体拾起。 容器具有放置在容器主体的盖容器上的盖支撑件，并且接触部分与盖支撑件接触以支撑盖子。 支撑构件是附接以支撑容器主体的构件。 支撑构件具有用于支撑容器主体的基板部分，从基板部分竖立形成的侧板部分，以及夹持在每个侧板上的手柄以提升容器主体。 薄板支撑构件具有用于支撑薄板的接触部分，支撑构件以弹性地支撑接触部分，并且支撑基部支撑支撑部分。 每个支撑部分的尖端与每个支撑台的接触部分接触，并且从两侧弹性地支撑接触部分。
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公开(公告)号：US20140138279A1
公开(公告)日：2014-05-22
申请号：US14131120
申请日：2012-07-03
申请人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
发明人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
IPC分类号： B65D43/02
CPC分类号： B65D43/02 , H01L21/67373
摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。
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公开(公告)号：US20060126042A1
公开(公告)日：2006-06-15
申请号：US11293083
申请日：2005-12-05
IPC分类号： G03B27/42
CPC分类号： H01L21/67353 , G03F1/42 , G03F1/66 , G03F7/70541 , G03F7/70741 , H01L21/67005 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： The present invention corrects automatically the wrong orientation of a reticle-carrying container 11. The present invention includes a reticle-processing system having the reticle-carrying container 11, transfer means (4, 5) for transferring the reticle-carrying container 11, a light exposure apparatus for printing a circuit pattern, and a reticle stocker 2 for keeping a plurality of reticles 12. The present invention also includes orientation change means 81 for detecting the orientation of the reticle-carrying container 11 and changing it appropriately in a path from the reticle stocker 2 to a printing position in the light exposure apparatus 1. The orientation change means 81 includes a rotation drive part 82 for rotating the reticle-carrying container 11, orientation detection means 83 for detecting the orientation of the reticle-carrying container 11, which is provided in some place in the path from the reticle stocker 2 to the printing position in the light exposure apparatus 1, and a control part 84 for, when the orientation detected by the orientation detection means 83 is shifted by 180 degrees, controlling the rotation drive part 82 so as to correct the orientation.
摘要翻译： 本发明自动校正标本承载容器11的错误取向。 本发明包括具有标线承载容器11的掩模版处理系统，用于传送标本承载容器11的转印装置（4,5），用于印刷电路图案的曝光装置和用于保持 多个标线片12。 本发明还包括用于检测标本承载容器11的取向并在从掩模版存储器2到曝光装置1中的打印位置的路径中适当改变的取向改变装置81。 取向改变装置81包括用于旋转分光带承载容器11的旋转驱动部82，用于检测标本保持容器11的取向的取向检测装置83，该方向检测装置83设置在从光栅储存器2的路径中的某个位置 到曝光装置1中的打印位置，以及控制部分84，当由取向检测装置83检测到的方向偏移180度时，控制旋转驱动部分82以便校正方位。
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