SENSOR COMPONENT HAVING TWO SENSOR FUNCTIONS
    22.
    发明申请

    公开(公告)号:US20170113924A1

    公开(公告)日:2017-04-27

    申请号:US15302128

    申请日:2015-04-23

    Applicant: Epcos AG

    Inventor: Wolfgang Pahl

    Abstract: A sensor component having a MEMS sensor and an ASIC for one sensor function each. A base element, a wall element in the form of a frame and a cover together enclose a cavity of a housing. The MEMS sensor is mounted inside the cavity on the base element of the housing. The ASIC has an active sensor surface and is mounted on or under the cover or is embedded in the cover. Electrical external contacts for the MEMS sensor and ASIC are provided on an external surface of the housing. The cavity has at least one opening or bushing.

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