公开(公告)号：US09126139B2

公开(公告)日：2015-09-08

申请号：US13904988

申请日：2013-05-29

Applicant: Entegris, Inc.

Inventor： Shaun M. Wilson ,  Edward A. Sturm ,  Michael J. Wodjenski ,  J. Donald Carruthers ,  Joshua B. Sweeney

IPC: B01D53/04 ,  B01J20/20 ,  B01J20/30 ,  B01J20/34 ,  B01J20/28 ,  B01D53/02 ,  C12M1/00

CPC classification number: B01D53/04 ,  B01D53/02 ,  B01D2253/102 ,  B01D2257/304 ,  B01D2258/05 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/3078 ,  B01J20/3416 ,  C12M47/18 ,  Y02C20/20

Abstract: A durable carbon pyrolyzate adsorbent having reversible sorptive affinity for hydrogen sulfide, and including the following characteristics: (a) a bulk density as measured by ASTM D2854 in a range of from 0.55 g/cc adsorbent to 1.25 g/cc adsorbent; (b) an H2S capacity in a range of from 140 cc H2S/g adsorbent to 250 cc H2S/g adsorbent, at normal conditions (1 atm, 293.15° K); (c) an H2S capacity in a range of from 1.0 cc H2S/g adsorbent to 15.0 cc H2S/g adsorbent, at partial pressure of 0.76 torr (101.3 Pa) (1000 ppm) of H2S at 293.15° K; and (d) a single pellet radial crush strength in a range of from 7 kilopond (kP) to 40 kilopond (kP) as measured by ASTM D4179. Such adsorbent is usefully employed for capture of hydrogen sulfide from gases containing same, such as H2S-containing gas associated with flowable hydrocarbonaceous material in refining operations, biogas produced by biomass digesters, gas mixtures produced by fluid catalytic cracking (FCC) units, and effluents from power plants gasifying sulfur-containing coal in an integrated gasification combined cycle (IGCC) process.

Abstract translation: 具有对硫化氢具有可逆吸附亲和力的耐久碳热解物吸附剂，并且包括以下特征：（a）通过ASTM D2854测量的在0.55g / cc吸附剂至1.25g / cc吸附剂范围内的堆积密度; （b）在正常条件（1大气压，293.15°K）下，在140cc H2S / g吸附剂至250cc H2S / g吸附剂的范围内的H2S容量; （c）在293.15°K的0.76乇（101.3Pa）（1000ppm）的H 2 S的分压下，在1.0cc H 2 S / g吸附剂至15.0cc H 2 S / g吸附剂的范围内的H 2 S容量; 和（d）通过ASTM D4179测量的单个颗粒径向压实强度在7千帕（kP）至40千碱基（kP）的范围内。 这种吸附剂有用地用于从含有其的气体中捕获硫化氢，例如在精炼操作中与可流动的烃类材料相关的含H 2 S的气体，由生物质消化器产生的沼气，由流化催化裂化（FCC）单元产生的气体混合物，以及流出物 来自发电厂在一体化气化联合循环（IGCC）过程中气化含硫煤。

公开(公告)号：US11333302B2

公开(公告)日：2022-05-17

申请号：US16375000

申请日：2019-04-04

Applicant: ENTEGRIS, INC.

Inventor： Joseph Robert Despres ,  Joseph D. Sweeney ,  Edward A. Sturm

IPC: F17C11/00 ,  B01D53/04 ,  B01J20/22

Abstract: Described are storage and dispensing vessels and related systems and methods, for dispensing reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium, the reagent gas being contained at super-atmospheric pressure and the solid adsorbent medium comprising a metal-organic framework.

公开(公告)号：US10508773B2

公开(公告)日：2019-12-17

申请号：US16271339

申请日：2019-02-08

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. Sweeney ,  Edward Edmiston Jones ,  Joseph Robert Despres ,  Richard S. Ray ,  Peter C. Van Buskirk ,  Edward A. Sturm ,  Christopher Scannell

IPC: G06K19/06 ,  F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20180211839A1

公开(公告)日：2018-07-26

申请号：US15928645

申请日：2018-03-22

Applicant: Entegris, Inc.

Inventor： Oleg Byl ,  Edward A. Sturm ,  Ying Tang ,  Sharad N. Yedave ,  Joseph D. Sweeney ,  Steven G. Sergi ,  Barry Lewis Chambers

IPC: H01L21/265 ,  H01L33/00 ,  H01L31/18 ,  H01J37/08 ,  H01J37/317

CPC classification number: H01L21/265 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/022 ,  H01L31/18 ,  H01L33/005

Abstract: Ion implantation processes and systems are described, in which carbon dopant source materials are utilized to effect carbon doping. Various gas mixtures are described, including a carbon dopant source material, as well as co-flow combinations of gases for such carbon doping. Provision of in situ cleaning agents in the carbon dopant source material is described, as well as specific combinations of carbon dopant source gases, hydride gases, fluoride gases, noble gases, oxide gases and other gases.

公开(公告)号：US20180180225A1

公开(公告)日：2018-06-28

申请号：US15900033

申请日：2018-02-20

Applicant: Entegris, Inc.

Inventor： Joseph R. Despres ,  Joseph D. Sweeney ,  Edward E. Jones ,  Matthew B. Donatucci ,  Chiranjeevi Pydi ,  Edward A. Sturm ,  Barry Lewis Chambers ,  Gregory Scott Baumgart

IPC: F17C13/12 ,  F17C13/04

CPC classification number: F17C13/12 ,  F17C13/04 ,  F17C2201/0104 ,  F17C2205/0326 ,  F17C2205/0329 ,  F17C2205/0335 ,  F17C2205/0338 ,  F17C2205/0344 ,  F17C2205/035 ,  F17C2205/0382 ,  F17C2205/0391 ,  F17C2221/012 ,  F17C2221/013 ,  F17C2221/015 ,  F17C2221/016 ,  F17C2227/045 ,  F17C2250/0626 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/7795

Abstract: A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel, a valve head adapted for dispensing of fluid from the vessel, and an anti-pressure spike assembly adapted to combat pressure spiking in flow of fluid at inception of fluid dispensing.

公开(公告)号：US09960042B2

公开(公告)日：2018-05-01

申请号：US14378963

申请日：2013-02-13

Applicant: Entegris, Inc.

Inventor： Oleg Byl ,  Edward A. Sturm ,  Ying Tang ,  Sharad N. Yedave ,  Joseph D. Sweeney ,  Steven G. Sergi ,  Barry Lewis Chambers

IPC: H01L21/425 ,  H01L21/265 ,  H01J37/08 ,  H01J37/317 ,  H01L31/18 ,  H01L33/00

CPC classification number: H01L21/265 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/022 ,  H01L31/18 ,  H01L33/005

Abstract: Ion implantation processes and systems are described, in which carbon dopant source materials are utilized to effect carbon doping. Various gas mixtures are described, including a carbon dopant source material, as well as co-flow combinations of gases for such carbon doping. Provision of in situ cleaning agents in the carbon dopant source material is described, as well as specific combinations of carbon dopant source gases, hydride gases, fluoride gases, noble gases, oxide gases and other gases.

公开(公告)号：US09897257B2

公开(公告)日：2018-02-20

申请号：US14430105

申请日：2013-09-20

Applicant: Entegris, Inc.

Inventor： Joseph R. Despres ,  Joseph D. Sweeney ,  Edward E. Jones ,  Matthew B. Donatucci ,  Chiranjeevi Pydi ,  Edward A. Sturm ,  Barry Lewis Chambers ,  Gregory Scott Baumgart

IPC: F16K31/12 ,  F17C13/12 ,  F17C13/04

CPC classification number: F17C13/12 ,  F17C13/04 ,  F17C2201/0104 ,  F17C2205/0326 ,  F17C2205/0329 ,  F17C2205/0335 ,  F17C2205/0338 ,  F17C2205/0344 ,  F17C2205/035 ,  F17C2205/0382 ,  F17C2205/0391 ,  F17C2221/012 ,  F17C2221/013 ,  F17C2221/015 ,  F17C2221/016 ,  F17C2227/045 ,  F17C2250/0626 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/7795

Abstract: A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel, a valve head adapted for dispensing of fluid from the vessel, and an anti-pressure spike assembly adapted to combat pressure spiking in flow of fluid at inception of fluid dispensing.

公开(公告)号：US09468901B2

公开(公告)日：2016-10-18

申请号：US14961793

申请日：2015-12-07

Applicant: Entegris, Inc.

Inventor： Shaun M. Wilson ,  Edward A. Sturm

IPC: B01D53/02 ,  B01J20/20 ,  F17C11/00 ,  B01J20/30 ,  B01J20/28 ,  C23C16/44

CPC classification number: B01J20/20 ,  B01D53/02 ,  B01D2253/102 ,  B01D2253/202 ,  B01D2256/18 ,  B01D2257/2027 ,  B01D2257/204 ,  B01D2257/2047 ,  B01D2257/40 ,  B01J20/28011 ,  B01J20/28016 ,  B01J20/28042 ,  B01J20/28078 ,  B01J20/2808 ,  B01J20/28083 ,  B01J20/3078 ,  C23C16/4405 ,  F17C11/00 ,  Y02C20/10 ,  Y10T137/0318 ,  Y10T137/8593

Abstract: A polyvinylidene fluoride (PVDF) pyrolyzate adsorbent is described, having utility for storing gases in an adsorbed state, and from which adsorbed gas may be desorbed to supply same for use. The PVDF pyrolyzate adsorbent can be of monolithic unitary form, or in a bead, powder, film, particulate or other finely divided form. The adsorbent is particularly suited for storage and supply of fluorine-containing gases, such as fluorine gas, nitrogen trifluoride, carbo-fluoride gases, and the like. The adsorbent may be utilized in a gas storage and dispensing system, in which the adsorbent is contained in a supply vessel, from which sorbate gas can be selectively dispensed.

Abstract translation: 描述了聚偏二氟乙烯（PVDF）热解物吸附剂，其具有用于在吸附状态下储存气体的效用，并且吸附的气体可从其吸附以供给其供使用。 PVDF热解物吸附剂可以是整体单一形式，或者是珠，粉末，薄膜，颗粒或其它细碎形式。 吸附剂特别适用于氟气，三氟化氮，碳氟化物气体等含氟气体的储存和供给。 吸附剂可以用在气体储存和分配系统中，其中吸附剂包含在供应容器中，可以从其中选择性地分配山梨酸气体。

公开(公告)号：US20160020102A1

公开(公告)日：2016-01-21

申请号：US14378963

申请日：2013-02-13

Applicant: Entegris, Inc

Inventor： Oleg Byl ,  Edward A. Sturm ,  Ying Tang ,  Sharad N. Yedave ,  Joseph D. Sweeney ,  Steven G. Sergi ,  Barry Lewis Chambers

IPC: H01L21/265 ,  H01L33/00 ,  H01J37/317 ,  H01L31/18

CPC classification number: H01L21/265 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/022 ,  H01L31/18 ,  H01L33/005

Abstract: Ion implantation processes and systems are described, in which carbon dopant source materials are utilized to effect carbon doping. Various gas mixtures are described, including a carbon dopant source material, as well as co-flow combinations of gases for such carbon doping. Provision of in situ cleaning agents in the carbon dopant source material is described, as well as specific combinations of carbon dopant source gases, hydride gases, fluoride gases, noble gases, oxide gases and other gases.

Abstract translation: 描述了离子注入工艺和系统，其中使用碳掺杂剂源材料来实现碳掺杂。 描述了各种气体混合物，包括碳掺杂剂源材料，以及用于这种碳掺杂的气体的共流组合。 描述了在碳掺杂剂源材料中提供原位清洁剂，以及碳掺杂剂源气体，氢化物气体，氟化物气体，惰性气体，氧化物气体和其它气体的特定组合。