Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
    22.
    发明授权
    Condenser microphone having flexure hinge diaphragm and method of manufacturing the same 失效
    具有挠性铰链隔膜的冷凝器麦克风及其制造方法

    公开(公告)号:US08422702B2

    公开(公告)日:2013-04-16

    申请号:US11875996

    申请日:2007-10-22

    IPC分类号: H04R25/00

    摘要: A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer to be used as a back plate on the first insulating layer; forming a plurality of sound holes by patterning the upper silicon layer; forming a second insulating layer on the upper silicon layer; forming a conductive layer on the upper silicon layer having the sound holes, and forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming a plurality of air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap between the diaphragm and the upper silicon layer.Consequently, due to the flexible diaphragm, a manufacturing process using semiconductor MEMS technology may improve the sensitivity of the condenser microphone and reduce the size of the condenser microphone, thereby enabling integration into a portable terminal.

    摘要翻译: 提供具有弯曲铰链形上隔膜和背板的微型电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成用作背板的上硅层; 通过图案化上硅层形成多个声孔; 在所述上硅层上形成第二绝缘层; 在具有所述声孔的所述上硅层上形成导电层,并在所述导电层上形成钝化层; 在钝化层上形成牺牲层; 在所述牺牲层上沉积隔膜,以及形成通过所述隔膜的多个空气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 蚀刻牺牲层,钝化层,导电层,上硅层,第一绝缘层和下硅层,以在隔膜和上硅层之间形成气隙。 因此,由于柔性隔膜,使用半导体MEMS技术的制造工艺可以提高电容式麦克风的灵敏度并减小电容式麦克风的尺寸,从而可以集成到便携式终端中。

    Forced acoustic dipole and forced acoustic multipole array using the same
    24.
    发明授权
    Forced acoustic dipole and forced acoustic multipole array using the same 有权
    强迫声偶极子和强迫声多极阵列使用相同

    公开(公告)号:US08031558B2

    公开(公告)日:2011-10-04

    申请号:US12473214

    申请日:2009-05-27

    IPC分类号: H04B1/02

    CPC分类号: H04R1/403

    摘要: Provided is a forced acoustic dipole capable of regulating phases and acoustic pressures of first and second acoustic signals output from first and second pole speakers to freely steer the direction of an acoustic lobe. In addition, a forced acoustic multipole array is constituted by a plurality of forced acoustic dipoles. When the phases and acoustic pressures of the first and second acoustic signals output from the forced acoustic dipoles are regulated to steer an acoustic lobe in a specific direction, sound can be heard from a desired direction only without disturbing others.

    摘要翻译: 提供了一种能够调节从第一和第二极扬声器输出的第一和第二声信号的相位和声压以自由地引导声波瓣的方向的强制声偶极子。 此外,强制声音多极阵列由多个强制声学偶极子构成。 当从强制声学偶极子输出的第一和第二声信号的相位和声压被调节以在特定方向上引导声波波瓣时,只能从期望的方向听到声音,而不会扰乱其它声音。

    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME
    25.
    发明申请
    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME 失效
    具有挠性铰链膜片的冷凝器麦克风及其制造方法

    公开(公告)号:US20080137884A1

    公开(公告)日:2008-06-12

    申请号:US11875996

    申请日:2007-10-22

    IPC分类号: H04R25/00 H01L21/64

    摘要: A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer to be used as a back plate on the first insulating layer; forming a plurality of sound holes by patterning the upper silicon layer; forming a second insulating layer on the upper silicon layer; forming a conductive layer on the upper silicon layer having the sound holes, and forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming a plurality of air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap between the diaphragm and the upper silicon layer.Consequently, due to the flexible diaphragm, a manufacturing process using semiconductor MEMS technology may improve the sensitivity of the condenser microphone and reduce the size of the condenser microphone, thereby enabling integration into a portable terminal.

    摘要翻译: 提供具有弯曲铰链形上隔膜和背板的微型电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成用作背板的上硅层; 通过图案化上硅层形成多个声孔; 在所述上硅层上形成第二绝缘层; 在具有所述声孔的所述上硅层上形成导电层,并在所述导电层上形成钝化层; 在钝化层上形成牺牲层; 在所述牺牲层上沉积隔膜,以及形成通过所述隔膜的多个空气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 蚀刻牺牲层,钝化层,导电层,上硅层,第一绝缘层和下硅层,以在隔膜和上硅层之间形成气隙。 因此,由于柔性隔膜,使用半导体MEMS技术的制造工艺可以提高电容式麦克风的灵敏度并减小电容式麦克风的尺寸,从而可以集成到便携式终端中。

    Security system and method using measurement of acoustic field variation
    26.
    发明授权
    Security system and method using measurement of acoustic field variation 有权
    使用声场变化测量的安全系统和方法

    公开(公告)号:US08797407B2

    公开(公告)日:2014-08-05

    申请号:US12878414

    申请日:2010-09-09

    摘要: A security system and a method of determining whether there is an intrusion are provided. A correlation between sound signals obtained from a sound source generating device and a sound-field variation measuring device is used to measure a acoustic field in a certain space. A difference between an initially set acoustic field and a changed acoustic field is used to determine whether there is an intruding object in a certain space. The security system includes a sound source generating device for generating a sound source; and a sound-field variation measuring device for measuring a acoustic field formed by the sound source, wherein an initially set acoustic field is compared with the measured acoustic field to determine whether there is an intrusion.

    摘要翻译: 提供一种确定是否存在入侵的安全系统和方法。 使用从声源发生装置获取的声音信号和声场变化测量装置之间的相关性来测量某个空间中的声场。 使用初始设置的声场和改变的声场之间的区别来确定在某个空间中是否存在入侵物体。 安全系统包括用于产生声源的声源产生装置; 以及用于测量由声源形成的声场的声场变化测量装置,其中将初始设置的声场与所测量的声场进行比较以确定是否存在入侵。

    Piezoelectric speaker and method of manufacturing the same
    27.
    发明授权
    Piezoelectric speaker and method of manufacturing the same 有权
    压电扬声器及其制造方法

    公开(公告)号:US08712079B2

    公开(公告)日:2014-04-29

    申请号:US12507364

    申请日:2009-07-22

    IPC分类号: H04R25/00 H04R1/20

    摘要: A piezoelectric speaker and a method of manufacturing the same that can obtain a high sound pressure using a piezoelectric thin film are provided. The piezoelectric speaker includes a piezoelectric thin film, electrodes formed on an upper surface or upper and lower surfaces of the piezoelectric thin film, a damping material layer formed on the lower surface of the piezoelectric thin film, and a frame attached around at least one of the piezoelectric thin film and the damping material layer using an adhesive.

    摘要翻译: 提供一种使用压电薄膜可以获得高声压的压电扬声器及其制造方法。 压电扬声器包括压电薄膜,形成在压电薄膜的上表面或上表面和下表面上的电极,形成在压电薄膜的下表面上的阻尼材料层和围绕至少一个 压电薄膜和使用粘合剂的阻尼材料层。

    SECURITY SYSTEM AND METHOD USING MEASUREMENT OF ACOUSTIC FIELD VARIATION
    29.
    发明申请
    SECURITY SYSTEM AND METHOD USING MEASUREMENT OF ACOUSTIC FIELD VARIATION 有权
    安全系统和使用测量声场变化的方法

    公开(公告)号:US20110141283A1

    公开(公告)日:2011-06-16

    申请号:US12878414

    申请日:2010-09-09

    IPC分类号: H04N7/18 G01S15/00

    摘要: A security system and a method of determining whether there is an intrusion are provided. A correlation between sound signals obtained from a sound source generating device and a sound-field variation measuring device is used to measure a acoustic field in a certain space. A difference between an initially set acoustic field and a changed acoustic field is used to determine whether there is an intruding object in a certain space. The security system includes a sound source generating device for generating a sound source; and a sound-field variation measuring device for measuring a acoustic field formed by the sound source, wherein an initially set acoustic field is compared with the measured acoustic field to determine whether there is an intrusion.

    摘要翻译: 提供一种确定是否存在入侵的安全系统和方法。 使用从声源发生装置获取的声音信号和声场变化测量装置之间的相关性来测量某个空间中的声场。 使用初始设置的声场和改变的声场之间的区别来确定在某个空间中是否存在入侵物体。 安全系统包括用于产生声源的声源产生装置; 以及用于测量由声源形成的声场的声场变化测量装置,其中将初始设置的声场与所测量的声场进行比较以确定是否存在入侵。

    Near-field optical probe based on SOI substrate and fabrication method thereof
    30.
    发明授权
    Near-field optical probe based on SOI substrate and fabrication method thereof 失效
    基于SOI衬底的近场光探针及其制造方法

    公开(公告)号:US07871530B2

    公开(公告)日:2011-01-18

    申请号:US12465765

    申请日:2009-05-14

    IPC分类号: H01L21/306

    摘要: Provided is near-field optical probe including: a cantilever arm support portion that is formed of a lower silicon layer of a silicon-on-insulator (SOI) substrate, the cantilever arm support portion having a through hole formed therein at a side of the lower silicon layer; and a cantilever arm forming of a junction oxidation layer pattern and an upper silicon layer pattern on the SOI substrate that are supported on an upper surface of the lower silicon layer and each have a smaller hole than the through hole, a silicon oxidation layer pattern having a tip including an aperture at a vertical end, corresponding with the hole on the upper silicon layer pattern, and an optical transmission prevention layer that is formed on the silicon oxidation layer pattern and does not cover the aperture.

    摘要翻译: 本发明提供的近场光学探针包括:由绝缘体上硅(SOI)衬底的下硅层形成的悬臂支撑部,所述悬臂臂支撑部在其一侧形成有通孔, 下硅层; 以及形成在所述SOI衬底上的结氧化层图案和上硅层图案的悬臂,所述支撑在所述下硅层的上表面上并且具有比所述通孔更小的孔,硅氧化层图案具有 对应于上硅层图案上的孔的垂直端的开孔,以及形成在硅氧化层图案上并且不覆盖该孔的防透光层。