公开(公告)号：US20070186851A1

公开(公告)日：2007-08-16

申请号：US11655111

申请日：2007-01-19

Applicant: Friedrich Geiser ,  Rene Brulc

Inventor： Friedrich Geiser ,  Rene Brulc

IPC: C23F1/00 ,  C23C16/00

CPC classification number: H01L21/67742 ,  Y10S414/139

Abstract: A vacuum chamber system for semiconductor processing includes at least two evacuable vacuum chambers (1a, 1b) which are provided for receiving semiconductor elements (5) to be processed and which in each case comprise a vacuum chamber opening (2a; 2b) and a vacuum chamber sealing surface (3a; 3b), and transfer aspects (4) by which one of the vacuum chambers (1a) can be moved relative to another of the vacuum chambers (1b) and can be docked with it (1b) in a vacuum-tight manner by producing substantially parallel opposite positions of the vacuum chamber sealing surfaces (3a, 3b) which are subject to possible misalignments. At least one of the vacuum chambers (1a; 1b) has support aspects which support one vacuum chamber (1a) on the other vacuum chamber (1b) in the evacuated, docked state. According to the invention, the support aspects are in the form of two support elements (71, 72; 81, 82) which are arranged on opposite sides of the vacuum chamber opening (2a; 2b), are substantially parallel to the opening central axis (aa; ab) and have an operative connection (9; 10; 11) to one another and have a force and displacement balance relative to one another with a balance center (Z) located substantially on the opening central axis (aa; ab), so that, in the docked state non-parallel positioning of the vacuum chamber sealing surfaces (3a, 3b) opposite one another, caused by possible misalignments, is compensated on support.

Abstract translation: 用于半导体处理的真空室系统包括至少两个可抽出的真空室（1a，1b），其设置用于接收待加工的半导体元件（5），并且在每种情况下都包括真空室开口（2a; 2b ）和真空室密封表面（3a; 3b）和转移方面（4），通过该方式，真空室（1a）中的一个可以相对于另一个真空室（1b）移动并且可以对接 与真空室密封面（3a，3b）大致平行的相对位置以真空密封的方式（1b）形成（1b）。 真空室（1a; 1b）中的至少一个具有支撑方面，所述支撑方面在抽空的停靠状态下在另一个真空室（1b）上支撑一个真空室（1a）。 根据本发明，支撑方面为布置在真空室开口（2a; 2b）的相对侧上的两个支撑元件（71,72; 81,82）的形式，其基本上平行于开口 中心轴线（aa; ab）并且具有彼此相对的操作连接（9; 10; 11），并且具有相对于彼此的力和位移平衡，其中平衡中心（Z）基本上位于开口中心轴线（aa; ab），使得在对接状态下，由可能的未对准引起的真空室密封面（3a，3b）的非平行定位被补偿。

公开(公告)号：US06698719B2

公开(公告)日：2004-03-02

申请号：US10185479

申请日：2002-06-26

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K5700

CPC classification number: F16K1/46 ,  F16K1/385

Abstract: A seal arrangement for a vacuum valve with a valve body in which is arranged a valve opening having a longitudinal axis and which has an inner jacket surface surrounding the valve opening and forming a valve seat, and with a valve plate which closes the valve opening in the closed state of the vacuum valve and which has an outer jacket surface surrounding the valve plate, said inner jacket surface and said outer jacket surface being located opposite one another in the closed state of the valve. The seal arrangement comprises a sealing ring which is arranged in an annular groove arranged at the outer or inner jacket surface and which has groove flanks and a groove base, and a sealing surface which is provided at the inner or outer jacket surface and which has a conical shape relative to the longitudinal axis the valve opening and which is contacted by the sealing ring in the closed state of the vacuum valve. The distance of the groove base from the longitudinal axis of the valve opening changes along the width of the groove at least in the position occupied by the valve plate in the closed state of the vacuum valve and, further, a supporting ring is arranged in the groove laterally next to the sealing ring to limit the deformation of the sealing ring in the closed state of the vacuum valve, and when the groove is formed in the outer jacket surface of the valve plate this supporting ring is located on the side of the sealing ring on which the groove base has a greater distance from the longitudinal axis, and when the groove is formed in the inner jacket surface of the valve body this supporting ring is located on the side of the sealing ring on which the groove base has a smaller distance from the longitudinal axis. A side surface of the supporting ring facing the sealing ring, together with the portion of the groove base located next to the supporting ring and the adjoining groove flank, define a receiving space for the sealing ring contacting this side surface of the supporting ring and increase the width of this receiving space toward the groove base.

公开(公告)号：US06431518B1

公开(公告)日：2002-08-13

申请号：US09759111

申请日：2001-01-11

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K318

CPC classification number: F16K3/18 ,  F16K51/02

Abstract: A vacuum valve comprises a valve opening which is provided in a valve housing and can be closed by a valve plate arranged at least one valve rod, at least a first piston-cylinder unit by which the valve plate is displaceable from its open position releasing the valve opening into a position which is located opposite the valve opening but is lifted from the valve seat, and at least a second piston-cylinder unit by which the valve plate can be moved toward the valve seat and pressed against it from its position which is located opposite the valve opening but is lifted from the valve seat. A first connection line runs between a base of the first piston-cylinder unit and a base of the second piston-cylinder unit, wherein a non-return valve is arranged in the first connection line and closes when there is a pressure in a closing cylinder space of the first piston-cylinder unit that is greater than or equal to the pressure in a closing cylinder space of the second piston-cylinder unit, and a mandrel is provided at the piston of the second piston-cylinder unit, which mandrel releases the non-return valve when the valve plate is in the position in which it is completely lifted from the valve seat.

Abstract translation: 真空阀包括阀开口，其设置在阀壳体中并且可以由布置有至少一个阀杆的阀板关闭，至少第一活塞 - 气缸单元，阀板可从其打开位置移位，从而释放 阀开口进入位于阀开口相对的位置，但是从阀座升起，以及至少第二活塞 - 气缸单元，阀板可以朝向阀座移动，并从其位置压紧阀座 位于与阀开口相对的位置，但是从阀座抬起。 第一连接线在第一活塞 - 气缸单元的基座和第二活塞 - 气缸单元的基座之间延伸，其中止回阀布置在第一连接线中并且当闭合气缸中存在压力时闭合 所述第一活塞 - 气缸单元的空间大于或等于所述第二活塞 - 气缸单元的闭合气缸空间中的压力，并且心轴设置在所述第二活塞 - 气缸单元的活塞处，所述心轴将所述第二活塞 - 当阀板处于从阀座完全提升的位置时，止回阀。

公开(公告)号：US08870158B2

公开(公告)日：2014-10-28

申请号：US12910568

申请日：2010-10-22

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16 ,  F16K1/20 ,  H01L21/67 ,  F16K51/02

CPC classification number: H01L21/67126 ,  F16K1/2007 ,  F16K1/2028 ,  F16K1/205 ,  F16K51/02

Abstract: A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam, which can be pivoted via a pivoting bearing between a closed and open position. A shaft can be rotated by a drive and is operatively connected to the valve closure beam such that rotation of the shaft causes the valve closure beam to pivot. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. First arms are arranged on the shaft to provide a force to the rear face of the valve closure beam to pivot the valve closure beam. According to one development of the invention, the valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing, wherein the shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing.

Abstract translation: 公开了一种翼片转换阀。 细长的第一开口可以由细长的阀闭合梁封闭，该闭合梁可以通过枢转轴承在闭合位置和打开位置之间枢转。 轴可以通过驱动器旋转并且可操作地连接到阀闭合梁，使得轴的旋转导致阀闭合梁枢转。 枢转轴承由至少三个轴承元件形成，所述至少三个轴承元件沿着阀壳体中的轴线彼此间隔一定距离，并且阀闭合梁和轴安装在该轴承元件上。 轴轴距离枢转轴线一定距离。 第一臂布置在轴上以向阀闭合梁的后表面提供力以枢转阀闭合梁。 根据本发明的一个发展，阀闭合梁，枢转轴承和轴布置在气密密封阀壳体中的阀盖上，其中轴，枢转轴承和阀闭合梁可以与 阀门壳体。

公开(公告)号：US08827241B2

公开(公告)日：2014-09-09

申请号：US13575411

申请日：2011-01-18

Applicant: Friedrich Geiser ,  Anton Neumeier ,  Cedric Wagner

Inventor： Friedrich Geiser ,  Anton Neumeier ,  Cedric Wagner

IPC: F16K25/00 ,  F16K51/02 ,  F16K3/18

CPC classification number: F16K51/02 ,  F16K3/188

Abstract: A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9′, 9″) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9′, 9″) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25′, 26, 26′), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20). At least one wall (39) of the tilting actuator (25, 25′, 26, 26′) bounding the inner cavity (27) is elastic and/or flexible at least over a section of the extent of the wall.

Abstract translation: 用于密封真空室（4）相对于大气的壁（3）中的开口（2）的门包括密封元件（1），该密封元件（1）附接到至少一个杆（9,9'，9“ ），并且其可以在密封元件释放开口（2）的打开位置之间移动，中间位置，密封元件覆盖开口（2），但是从围绕开口（2）的座（7）升高 （2），并且其中所述密封元件被压靠在所述座（7）上的关闭位置，所述门体（10）承载所述至少一个杆（9,9'，9“）和所述密封元件 （1），并且可相对于所述壁（3）围绕倾斜轴线（20）倾斜，以便在所述中间位置和所述关闭位置之间移动所述密封元件（1），并且至少一个倾斜致动器 25'，26,26'），其具有内腔（27），压缩气体可以被引入到其中，以便围绕倾斜轴线（20）倾斜门元件（10）。 限定内腔（27）的倾斜致动器（25,25'，26,26'）的至少一个壁（39）至少在壁的一部分上是弹性的和/或柔性的。

公开(公告)号：US08097084B2

公开(公告)日：2012-01-17

申请号：US11655111

申请日：2007-01-19

Applicant: Friedrich Geiser ,  Rene Brulc

Inventor： Friedrich Geiser ,  Rene Brulc

IPC: C23C16/54 ,  C23C14/56 ,  H01L21/67 ,  C23F1/00

CPC classification number: H01L21/67742 ,  Y10S414/139

Abstract: A vacuum chamber system for semiconductor processing includes at least two evacuable vacuum chambers for receiving semiconductor elements to be processed, each including a vacuum chamber opening and a vacuum chamber sealing surface, and transfer aspects by which one of the vacuum chambers can be moved relative to another of the vacuum chambers and can be docked with it in a vacuum-tight manner by producing substantially parallel opposite positions of the vacuum chamber sealing surfaces which are subject to possible misalignments. At least one of the vacuum chambers has support aspects which support one vacuum chamber on the other vacuum chamber in the evacuated, docked state. The support aspects are in the form of two support elements which are arranged on opposite sides of the vacuum chamber opening, are substantially parallel to the opening central axis and have an operative connection to one another and have a force and displacement balance relative to one another with a balance center located substantially on the opening central axis, so that, in the docked state non-parallel positioning of the vacuum chamber sealing surfaces opposite one another, caused by possible misalignments, is compensated on support.

Abstract translation: 用于半导体处理的真空室系统包括至少两个用于接收待加工的半导体元件的可抽空真空室，每个真空室包括真空室开口和真空室密封表面，并且传送一个真空室可相对于 真空室中的另一个并且可以通过产生真空室密封表面基本上平行的相对位置以真空密封的方式与其对接，这些位置可能会导致可能的未对准。 真空室中的至少一个具有支撑方面，其支撑在处于抽空的对接状态的另一个真空室上的一个真空室。 支撑方面是两个支撑元件的形式，其布置在真空室开口的相对侧上，基本上平行于开口中心轴线并且具有彼此的可操作连接并且具有相对于彼此的力和位移平衡 具有基本上位于开口中心轴线上的平衡中心，使得在对接状态下，由支撑件补偿由可能的未对准引起的彼此相反的真空室密封面的非平行定位。

公开(公告)号：US07802772B2

公开(公告)日：2010-09-28

申请号：US11641114

申请日：2006-12-19

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve plate (5) having a closing side (6) with a first sealing ring (7) and at least one drive (8). By action of the drive (8), the valve plate (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve plate (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the first sealing ring (7) and the first valve seat (4). The valve plate (5) includes support part (9), which is connected to the drive (8) and fixes the first sealing ring (7) in the perpendicular direction to the first valve seat (4), and a sealing part (10) which has an inner circumferential area (11) and which is mounted so as to be movable relative to the support part (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The inner circumferential area (11) encloses the first sealing ring (7) in an essentially gastight way with an inner seal. Thus, in the closed position (C), a pressure difference at the valve plate (5) acts essentially on the sealing part (10) so that sealing part (10), decoupled from the support part (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).

Abstract translation: 本发明涉及一种用于基本上气密地关闭流路（F）的阀，特别是摆锤或滑动闸阀。 阀包括具有第一壁（2）的阀壳（1），该第一壁具有第一开口（3）和第一阀座（4），阀板（5）具有封闭侧（6） 环（7）和至少一个驱动器（8）。 通过驱动器（8）的作用，阀板（5）可从基本平行于第一阀座（4）的打开位置（A）枢转或移动，并且阀板（5）与阀板 可以减小第一阀座（4），使得在关闭位置（C）中，通过第一密封环（7）和第一阀座（6）之间的轴向密封接触，流动路径（F）基本上气密地闭合 4）。 阀板（5）包括支撑部分（9），其连接到驱动器（8）并且沿与第一阀座（4）垂直的方向固定第一密封环（7），并且密封部件 ），其具有内圆周区域（11），并且安装成能够相对于支撑部件（9）沿基本上垂直于第一阀座（4）的方向（Z）移动。 内周区域（11）以基本上气密的方式围绕第一密封环（7）以内密封封闭。 因此，在关闭位置（C）中，阀板（5）处的压力差基本上在密封部件（10）上作用，使得与支撑部件（9）分离的密封部件（10）垂直地支撑在 阀壳体（1）的一部分，特别是第一阀座（4）或横向凹槽（27）。

公开(公告)号：US07413162B2

公开(公告)日：2008-08-19

申请号：US11693257

申请日：2007-03-29

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K31/12

CPC classification number: F16K3/10 ,  F16K3/188 ,  F16K51/02

Abstract: A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a carrying arm that is rigidly connected to a shaft which, for purposes of opening and closing the vacuum valve, is rotatable around its longitudinal axis and displaceable in axial direction, and a driving device for opening and closing the vacuum valve. The driving device comprises a rotary drive for rotating the shaft. The driving device further comprises a driving piston which is arranged in an inner cavity of the valve disk and which has, at least over portions of its circumference, a radial extension which is larger than the outlet opening with respect to the center longitudinal axis of the outlet opening and at which tappets are arranged on the side facing the outlet opening. The tappets are guided out of the inner cavity of the valve disk and are supported in the closed position of the valve disk at the valve housing in the area next to the outlet opening and press the valve disk against the valve seat and can be lifted from the valve housing for displacing the valve disk from its closed position into its intermediate position by means of a displacement of the driving piston. At least one spring element displaces the valve disk into its intermediate position by an axial displacement of the shaft.

Abstract translation: 真空阀包括具有入口开口和出口开口的阀壳体，阀盘位于阀壳体的内部空间中，并且布置在刚性地连接到轴的承载臂上，该轴为了目的 打开和关闭真空阀，可绕其纵向轴线旋转并沿轴向移动，以及用于打开和关闭真空阀的驱动装置。 驱动装置包括用于旋转轴的旋转驱动器。 所述驱动装置还包括驱动活塞，所述驱动活塞设置在所述阀盘的内腔中，并且所述驱动活塞至少在其周边的一部分上具有径向延伸部，所述径向延伸部相对于所述出口开口相对于所述中心纵向轴线大于所述出口开口 出口开口，并且在面对出口开口的一侧布置有挺杆。 挺杆被引导出阀盘的内腔，并且在靠近出口开口的区域中的阀壳处被支撑在阀盘的关闭位置，并将阀盘压靠在阀座上并且可以从 阀壳体，用于通过驱动活塞的位移将阀盘从其关闭位置移动到其中间位置。 至少一个弹簧元件通过轴的轴向位移将阀盘移位到其中间位置。

公开(公告)号：US20070193803A1

公开(公告)日：2007-08-23

申请号：US10589286

申请日：2005-02-10

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: B62D61/06 ,  B60G21/00 ,  B60N2/02

CPC classification number: B62K5/10 ,  B60G17/01908 ,  B60G17/01925 ,  B60G2300/122 ,  B60G2300/45 ,  B60G2400/204 ,  B60G2400/62 ,  B60G2400/96 ,  B60G2800/019 ,  B62D9/02 ,  B62K5/027

Abstract: A curve-tilting vehicle, e.g, a three-wheeled vehicle (30), including a laterally tilting device (4) at least one section (5) of the vehicle by a tilting axis (6) that runs substantially parallel to the longitudinal axis (3) of the vehicle such that the center of gravity of the vehicle can be displaced perpendicular to the direction of travel when driving, especially in curves or on a sloped or uneven ground. The vehicle includes at least one vehicle seat (8a) that is disposed in the tilting section (5) of the vehicle and is allocated to the driver who steers the vehicle. The vehicle further includes a detector (9a) for detecting a lateral force of the seat, which the body of the driver applies at least to one zone of the vehicle seat (8a) in a lateral direction (10a) extending perpendicular to the direction of travel. The lateral force of the seat may be detected using a pivotal spring-centered vehicle seat (8a). The detector (9a) is effectively connected to the lateral tilting includes (4) in such a way that lateral tilting occurs in accordance with the detected lateral force of the seat while the tilting speed is a function at least of the lateral force of the seat and the vehicle speed, the tilting speed increasing as the lateral force of the seat rises at a factor that decreases as the speed of the vehicle goes up. The invention further relates to a method for tilting such a vehicle.

Abstract translation: 曲线倾斜车辆，例如三轮车辆（30），其包括通过基本上平行于纵向轴线的倾斜轴线（6）的车辆的至少一个部分（5）的横向倾斜装置（4） （3），使得当行驶时，特别是在曲线上或在倾斜或不平坦的地面上，车辆的重心可以垂直于行进方向移位。 车辆包括设置在车辆的倾斜部分（5）中的至少一个车辆座椅（8a），并被分配给驾驶者驾驶车辆。 车辆还包括用于检测座椅的侧向力的检测器（9a），其中驾驶员的身体沿着横向（10a）垂直延伸的横向方向（10a）至少施加到车辆座椅（8a）的一个区域 旅行方向 可以使用枢转的弹簧对中的车辆座椅（8a）来检测座椅的横向力。 检测器（9a）被有效地连接到横向倾斜包括（4），使得侧向倾斜根据检测到的座椅的侧向力而发生，同时倾斜速度至少是 座椅和车辆速度，倾斜速度随着座椅的横向力随着车辆速度上升而降低的因素而增加。 本发明还涉及一种倾斜这种车辆的方法。

公开(公告)号：US20070138425A1

公开(公告)日：2007-06-21

申请号：US11588354

申请日：2006-10-27

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1; 1a) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve disk (5) having a closing side (6) with a sealing ring (7) and at least one drive (8). Through drive (8), the valve disk (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve disk (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring (7) and the first valve seat (4). The valve disk (5) includes an outer disk section (9), which is connected to the drive (8) and fixes the sealing ring (7) in the perpendicular direction to the first valve seat (4), and an inner disk section (10) which has an outer circumferential area (11) and which is mounted so as to be movable relative to the outer disk section (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The outer circumferential area (11) is enclosed essentially gastight with an inner seal by the sealing ring (7). Thus, in the closed position (C), a pressure difference at the valve disk (5) acts essentially on the inner disk section (10) so that the inner disk section (10), decoupled from the outer disk section (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).

Abstract translation: 本发明涉及一种用于基本上气密地关闭流路（F）的阀，特别是摆锤或滑动闸阀。 所述阀包括具有第一壁（2）的阀壳（1; 1a），所述第一壁具有第一开口（3）和第一阀座（4），阀盘（5）具有封闭侧（6） 密封环（7）和至少一个驱动器（8）。 通过驱动（8），阀盘（5）可从基本上平行于第一阀座（4）的打开位置（A）枢转或移动，并且阀盘（5）与第一阀 座（4）可以减小，使得在关闭位置（C）中，通过密封环（7）和第一阀座（4）之间的轴向密封接触，流路（F）基本上气密地闭合。 阀盘（5）具有与驱动装置（8）连接并与第一阀座（4）垂直的方向固定密封环（7）的外盘部（9），内盘部 （10），其具有外周区域（11），并且安装成能够相对于外盘部分（9）沿基本上垂直于第一阀座（4）的方向（Z）移动。 通过密封环（7），外圆周区域（11）通过内部密封件基本上气密地封闭。 因此，在关闭位置（C）中，阀盘（5）的压差基本上在内盘部（10）上作用，使得与外盘部（9）脱离的内盘部（10） 垂直地支撑在阀壳体（1）的一部分上，特别是第一阀座（4）或横向凹槽（27）上。