公开(公告)号：US5746562A

公开(公告)日：1998-05-05

申请号：US898568

申请日：1997-07-25

申请人： Takayuki Hasegawa ,  Yutaka Tanaka ,  Hidehiko Fujioka

发明人： Takayuki Hasegawa ,  Yutaka Tanaka ,  Hidehiko Fujioka

IPC分类号： C23C14/56 ,  B65G49/07 ,  G03F7/20 ,  H01L21/00 ,  H01L21/027 ,  H01L21/205 ,  H01L21/67 ,  F16M1/00

CPC分类号： H01L21/67011 ,  G03F7/70808 ,  G03F7/70858 ,  H01L21/67 ,  H01L21/67126

摘要： A processing system is disclosed which includes first and second chambers, each for accommodating a processing apparatus therein, each chamber being able to be kept gas tight, a coupling member for coupling the processing apparatuses accommodated in the first and second chambers with each other, and an elastic gas tightness holding member for gas tightly sealing portions between the coupling member and the first and second chambers.

公开(公告)号：US5574556A

公开(公告)日：1996-11-12

申请号：US621512

申请日：1996-03-25

申请人： Tetsuzo Mori ,  Hidehiko Fujioka

发明人： Tetsuzo Mori ,  Hidehiko Fujioka

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01N21/01 ,  G01B11/27 ,  G05B1/06

CPC分类号： G03F7/70716

摘要： A stage mechanism suitable used in an exposure apparatus is disclosed, wherein heat generation of a coil assembly of a stage driving motor is prevented from adversely affecting a semiconductor substrate or measurement by a laser interferometer. A wafer chuck and the laser interferometer are disposed at a side of a base plate, and a stage and an electromagnetic coil for dirving the stage are disposed at the other side of the base plate. The wafer chuck and the stage are coupled to each other by a coupling member which extends through a bore formed in the base plate.

摘要翻译： 公开了一种适用于曝光装置的舞台机构，其中防止舞台驱动电动机的线圈组件的发热不利地影响半导体衬底或通过激光干涉仪的测量。 晶片卡盘和激光干涉仪设置在基板的一侧，并且在底板的另一侧设置用于传送台的台架和电磁线圈。 晶片卡盘和台架通过连接构件彼此连接，该联接构件延伸穿过形成在基板中的孔。

公开(公告)号：US5253012A

公开(公告)日：1993-10-12

申请号：US769974

申请日：1991-10-02

申请人： Yuji Chiba ,  Hidehiko Fujioka

发明人： Yuji Chiba ,  Hidehiko Fujioka

IPC分类号： G03F7/20 ,  H01L21/687 ,  G03B27/42

CPC分类号： G03F7/70741 ,  G03F7/707

摘要： A substrate holding apparatus for vertically holding a substrate to be exposed by radiation includes a substrate holding member for attracting a substrate by a magnetic force or vacuum and an engaging device for engaging the substrate on the substrate holding member. The engaging device is retractably supported by or fixed to the substrate holding member, and is engageable with or engages the substrate in such a manner that the engagement between the vertically held substrate and the engaging device is maintained even if the substrate holding member ceases to attract the substrate. Thus, dropping of the substrate by gravitation is prevented even if the substrate ceases to be attracted by the substrate holding member.

摘要翻译： 用于垂直保持要通过辐射曝光的基板的基板保持装置包括用于通过磁力或真空吸引基板的基板保持部件和用于将基板接合在基板保持部件上的卡合装置。 接合装置由基板保持构件伸缩地支撑或固定到基板保持构件，并且可以以这样的方式接合或接合基板，使得即使基板保持构件不再吸引，也保持垂直保持的基板和接合装置之间的接合 底物。 因此，即使基板停止被基板保持部件吸引，也能够防止重力下降基板。

公开(公告)号：US08408649B2

公开(公告)日：2013-04-02

申请号：US12673093

申请日：2008-09-05

申请人： Koji Ito ,  Hidehiko Fujioka

发明人： Koji Ito ,  Hidehiko Fujioka

IPC分类号： B60N2/00 ,  B60N2/02

CPC分类号： B60N2/0705 ,  B60N2/0825 ,  B60N2/0843 ,  B60N2/123

摘要： A walk-in seat is provided, which has decreased number of components, and has a vacant space formed below a seat cushion so that the walk-in seat may be used even for a different-level seat track. The walk-in seat has a first control lever 171 for unlocking a first locking mechanism 100; a second control lever 181 for unlocking a second locking mechanism 100′; a memory mechanism 300 holding the first control lever 171 such that when a first upper rail 5 is located between a middle position and a foremost position with a seatback being tilted most forward, the first locking mechanism 100 is unlocked; first cable means FC operating such that when the seatback of a seat is tilted to a most forward position, the means FC drives the first control lever 171 to unlock the first locking mechanism 100; and second cable means SC transmitting operation of the first control lever 171 to the second control lever 181.

摘要翻译： 提供了一种步入座椅，其具有减少的部件数量，并且在座垫下方形成有空的空间，使得即使对于不同等级的座椅轨道也可以使用步入式座椅。 步行座椅具有用于解锁第一锁定机构100的第一控制杆171; 用于解锁第二锁定机构100'的第二控制杆181; 保持第一控制杆171的存储机构300，使得当第一上轨道5位于中间位置和最前方位置之间时，座椅靠背最向前倾斜，第一锁定机构100被解锁; 第一电缆装置FC操作，使得当座椅的座椅靠背倾斜到最前进位置时，装置FC驱动第一控制杆171以解锁第一锁定机构100; 第二电缆装置SC将第一控制杆171的操作传送到第二控制杆181。

公开(公告)号：US20120074289A1

公开(公告)日：2012-03-29

申请号：US13311877

申请日：2011-12-06

申请人： Akihiro KIMURA ,  Hidehiko Fujioka ,  Hiroyuki Suzuki ,  Kanji Yamaguchi

发明人： Akihiro KIMURA ,  Hidehiko Fujioka ,  Hiroyuki Suzuki ,  Kanji Yamaguchi

IPC分类号： B60N2/075

CPC分类号： B60N2/0705 ,  F16C29/04 ,  F16C33/38

摘要： A seat track mechanism for a vehicle, includes a lower rail mounted to a vehicle floor; an upper rail supported by the lower rail and slidable relative to the lower rail; and spherical rotators held between the lower and upper rails, the spherical rotators rolling via a sliding movement of the upper rail. One of the upper rail and the lower rail includes at least one horizontal flat portion parallel to a widthwise direction of the seat track mechanism and parallel to a direction of the sliding movement of the upper rail, and the other of the upper rail and the lower rail includes at least one rotator supporting recess having a circularly arcuate shape in cross section which is uniform in a lengthwise direction of the seat track mechanism, the spherical rotators being held between the rotator supporting recess and the horizontal flat portion.

摘要翻译： 一种用于车辆的座椅轨道机构，包括安装在车辆地板上的下轨道; 上轨道由下轨道支撑并相对于下轨道滑动; 并且保持在下轨道和上轨道之间的球形旋转体，球形旋转体通过上轨道的滑动运动而滚动。 上轨道和下轨道中的一个包括平行于座椅轨道机构的宽度方向的平行于上轨道的滑动方向的至少一个水平平面部分，并且上轨道和下轨道中的另一个 导轨包括至少一个旋转器支撑凹部，该旋转体支撑凹部具有在座椅轨道机构的长度方向上均匀的横截面的圆弧形状，球形旋转体保持在旋转体支撑凹部和水平平坦部分之间。

公开(公告)号：US5828572A

公开(公告)日：1998-10-27

申请号：US677358

申请日：1996-07-05

申请人： Takayuki Hasegawa ,  Hidehiko Fujioka ,  Yoshito Yoneyama

发明人： Takayuki Hasegawa ,  Hidehiko Fujioka ,  Yoshito Yoneyama

IPC分类号： F24F7/06 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  B65G65/30

CPC分类号： H01L21/67276 ,  H01L21/67017

摘要： A processing system for processing semiconductor devices includes an adjusting device for adjusting atmospheric conditions such as the cleanness and temperature in a clean room, at least one processing device disposed in the clean room, and a control device for controlling operation of the adjusting device in accordance with an operating state of at least one of the processing devices. The invention makes it possible to highly control the air conditioning of a required location and at a required time.

摘要翻译： 一种用于处理半导体器件的处理系统包括：用于调节洁净室中的洁净度和温度等大气条件的调节装置，设置在洁净室中的至少一个处理装置，以及用于控制调节装置的操作的控制装置 具有至少一个处理装置的操作状态。 本发明使得可以在所需时间高度地控制所需位置的空调。

公开(公告)号：US5641264A

公开(公告)日：1997-06-24

申请号：US996870

申请日：1992-12-21

申请人： Mitsutoshi Kuno ,  Hidehiko Fujioka ,  Nobutoshi Mizusawa ,  Yuji Chiba ,  Takao Kariya ,  Koji Uda ,  Shunichi Uzawa ,  Eigo Kawakami

发明人： Mitsutoshi Kuno ,  Hidehiko Fujioka ,  Nobutoshi Mizusawa ,  Yuji Chiba ,  Takao Kariya ,  Koji Uda ,  Shunichi Uzawa ,  Eigo Kawakami

IPC分类号： G03F7/20 ,  H01L21/687 ,  B65G65/00

CPC分类号： G03F7/70741 ,  H01L21/68707 ,  Y10S294/907

摘要： A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined force.

摘要翻译： 一种控制输送装置的方法，所述输送装置具有用于夹持要输送的物品的夹持手和用于输送夹持手的输送机构，其中检测到通过被输送物品施加到抓握手的按压力，并且输送操作 当按压力超过预定力时，输送机构停止。

公开(公告)号：US4963921A

公开(公告)日：1990-10-16

申请号：US312761

申请日：1989-02-21

申请人： Takao Kariya ,  Hidehiko Fujioka

发明人： Takao Kariya ,  Hidehiko Fujioka

IPC分类号： G03F1/22 ,  G03F7/20

CPC分类号： G03F1/22 ,  G03F7/707

摘要： A device for detachably holding a mask at least a portion of which is made of a magnetic material. The device includes a holding member, on which the mask is to be held, the holding member having a portion made of a magnetic material; a first system for producing holding magnetic lines of force so as to generate a magnetic force between the magnetic portion of the holding member and the magnetic portion of the mask, to thereby hold the mask on the holding member; and a second system for producing releasing magnetic lines of force which are operative against the magnetic lines of force produced by the first system so as to reduce the same to a degree sufficient to disengage the mask from the holding member. Also, disclosed is a mask holding device for detachably holding a mask, typically for use in the manufacture of microcircuits, which device is arranged to hold the mask by use of a magnetically attracting force, the magnetically attracting force being made variably controllable so as to correct the flatness of the mask.

摘要翻译： 一种用于可拆卸地保持至少一部分由磁性材料制成的掩模的装置。 该装置包括保持构件，掩模将被保持在该保持构件上，保持构件具有由磁性材料制成的部分; 用于产生保持磁力线以便在保持构件的磁性部分和掩模的磁性部分之间产生磁力的第一系统，从而将掩模保持在保持构件上; 以及用于产生释放磁力线的第二系统，其抵抗由第一系统产生的磁力线操作，以将其减小到足以使掩模与保持构件脱离的程度。 此外，公开了一种用于可拆卸地保持通常用于制造微电路的掩模的掩模保持装置，该装置被布置成通过使用磁吸引力来保持掩模，磁吸引力被可变地控制，从而 校正面具的平整度。