公开(公告)号：US5871587A

公开(公告)日：1999-02-16

申请号：US625710

申请日：1996-04-03

申请人： Takayuki Hasegawa ,  Hidehiko Fujioka ,  Yoshito Yoneyama

发明人： Takayuki Hasegawa ,  Hidehiko Fujioka ,  Yoshito Yoneyama

IPC分类号： G03F7/16 ,  G03F7/20 ,  G03F7/30 ,  H01L21/00 ,  C23C16/00 ,  G21K5/00

CPC分类号： H01L21/67017 ,  G03F7/16 ,  G03F7/2039 ,  G03F7/30 ,  G03F7/70691 ,  G03F7/70866 ,  G03F7/70933

摘要： A processing system includes a processing chamber, a circulating device for purifying an inside ambience gas of the processing chamber and for circulating the purified gas back into the processing chamber, a measuring device for measuring the purity of the ambience gas, and an adjusting device for adjusting the purification capacity of the purifying device in accordance with an output of the measuring device. In another form, a processing system includes a first processing chamber in which a first process is to be performed therein, a second processing chamber in which a second process is to be performed therein, and a device for introducing an ambience gas, having been used in said first processing chamber for the first process, into the second chamber for reuse thereof. The gas subsequently used in the second chamber is introduced back into the first chamber for reuse of the gas. At least a portion of the circulated gas is purified to improve its purity. A purity sensor detects the purity of gas discharged from the second chamber and, in accordance with the detection, the capacity of gas purification is adjusted.

摘要翻译： 一种处理系统，包括处理室，用于净化处理室的室内气体并使纯化气体循环回处理室的循环装置，用于测量环境气体的纯度的测量装置，以及用于 根据测量装置的输出调节净化装置的净化能力。 在另一种形式中，处理系统包括其中要执行第一处理的第一处理室，要在其中执行第二处理的第二处理室，以及已经使用的环境气体引入装置 在用于第一工艺的所述第一处理室中，进入第二室以便重新使用。 随后在第二室中使用的气体被引回到第一室中，以重新利用气体。 循环气体的至少一部分被纯化以提高其纯度。 纯度传感器检测从第二室排出的气体的纯度，并且根据检测调整气体净化的容量。

公开(公告)号：US5828572A

公开(公告)日：1998-10-27

申请号：US677358

申请日：1996-07-05

申请人： Takayuki Hasegawa ,  Hidehiko Fujioka ,  Yoshito Yoneyama

发明人： Takayuki Hasegawa ,  Hidehiko Fujioka ,  Yoshito Yoneyama

IPC分类号： F24F7/06 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  B65G65/30

CPC分类号： H01L21/67276 ,  H01L21/67017

摘要： A processing system for processing semiconductor devices includes an adjusting device for adjusting atmospheric conditions such as the cleanness and temperature in a clean room, at least one processing device disposed in the clean room, and a control device for controlling operation of the adjusting device in accordance with an operating state of at least one of the processing devices. The invention makes it possible to highly control the air conditioning of a required location and at a required time.

摘要翻译： 一种用于处理半导体器件的处理系统包括：用于调节洁净室中的洁净度和温度等大气条件的调节装置，设置在洁净室中的至少一个处理装置，以及用于控制调节装置的操作的控制装置 具有至少一个处理装置的操作状态。 本发明使得可以在所需时间高度地控制所需位置的空调。

公开(公告)号：US5599502A

公开(公告)日：1997-02-04

申请号：US280132

申请日：1994-07-25

申请人： Takeshi Miyazaki ,  Matsuomi Nishimura ,  Kazuo Isaka ,  Kazumi Tanaka ,  Toshikazu Ohnishi ,  Yoshito Yoneyama ,  Hidehito Takayama

发明人： Takeshi Miyazaki ,  Matsuomi Nishimura ,  Kazuo Isaka ,  Kazumi Tanaka ,  Toshikazu Ohnishi ,  Yoshito Yoneyama ,  Hidehito Takayama

IPC分类号： F04F99/00 ,  B01L3/00 ,  B41J2/005 ,  F04B19/00 ,  F04B19/24 ,  G01N15/14 ,  G01N37/00 ,  G01N27/00 ,  G01N21/00 ,  G01N21/85

CPC分类号： B41J2/005 ,  B01L3/502715 ,  B01L3/50273 ,  F04B19/006 ,  F04B19/24 ,  B01L2300/0645 ,  B01L2300/0825 ,  B01L2300/0887 ,  B01L2300/1816 ,  B01L2300/1827 ,  B01L2300/1833 ,  B01L2300/1861 ,  B01L2400/0466

摘要： A minute flow path is filled with liquid so that the liquid may be supplied from an accumulating portion. Energy is imparted to the liquid exposed outwardly of an opening in the flow path by a heat generating element or by energy application to thereby heat and gasify the liquid. Thereupon, the liquid is supplied by an amount corresponding to the gasified liquid by capillary phenomenon through the flow path, and gasification is continuously effected, whereby a flow free of pulsating flow can be formed in the flow path.

摘要翻译： 一个微小的流路充满液体，从而可以从一个积聚部分提供液体。 通过发热元件或通过能量施加向流动路径中的开口向外暴露的液体赋予能量，从而加热和气化液体。 因此，通过流路通过毛细管现象向气化液体供给液体，连续进行气化，能够在流路中形成不产生脉动流的流动。

公开(公告)号：US06385497B1

公开(公告)日：2002-05-07

申请号：US08902160

申请日：1997-07-29

申请人： Nobuaki Ogushi ,  Hirohisa Ohta ,  Yoshito Yoneyama ,  Masaya Ogura

发明人： Nobuaki Ogushi ,  Hirohisa Ohta ,  Yoshito Yoneyama ,  Masaya Ogura

IPC分类号： G06F1100

CPC分类号： G03F7/70525 ,  G05B19/4184 ,  G05B23/0213 ,  G05B23/0283 ,  G05B2219/24084 ,  G05B2219/31186 ,  G05B2219/33284 ,  G05B2219/33313 ,  G05B2219/33318 ,  G05B2223/06 ,  Y02P90/14 ,  Y02P90/18

摘要： Factories (102-104) have host computers (107) for monitoring industrial equipments (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) and notifies the vendor side of status information representing a trouble state. In response to this, the host computer (108) on the vendor side notifies the factory side of response information representing a countermeasure against the trouble state.

公开(公告)号：US5182617A

公开(公告)日：1993-01-26

申请号：US545589

申请日：1990-06-29

申请人： Yoshito Yoneyama ,  Yoshiyuki Toge ,  Naoki Yuguchi

发明人： Yoshito Yoneyama ,  Yoshiyuki Toge ,  Naoki Yuguchi

IPC分类号： G01N33/49 ,  G01N1/00 ,  G01N15/14 ,  G01N21/11

CPC分类号： G01N35/1097 ,  G01N15/1404 ,  G01N21/11 ,  G01N2015/1409 ,  Y10T137/2509 ,  Y10T137/2567

摘要： A sample supply device includes first and second sample supply means for independently receiving respective samples via a common channel and for supplying the samples to an inspection position. The device is controlled so that the second sample supply means performs a sample receiving operation and/or a washing operation with the channel, while the first sample supply means supplies the sample to the inspection position. A sample inspection apparatus inspects the sample at the inspection position principally using an optical method.

摘要翻译： 样品供应装置包括第一和第二样品供应装置，用于经由公共通道独立地接收相应样品，并将样品供应到检查位置。 控制装置，使得第二样品供应装置在通道中进行样品接收操作和/或洗涤操作，而第一样品供应装置将样品供应到检查位置。 样本检查装置主要使用光学方法检查检查位置处的样品。

公开(公告)号：US06801913B2

公开(公告)日：2004-10-05

申请号：US09978212

申请日：2001-10-17

申请人： Isao Matsumura ,  Yoshito Yoneyama

发明人： Isao Matsumura ,  Yoshito Yoneyama

IPC分类号： G06F1730

CPC分类号： G06Q10/087 ,  G06F19/00 ,  G06F19/3418 ,  G16H40/20 ,  G16H40/63 ,  Y10S707/99933 ,  Y10S707/99934 ,  Y10S707/99935 ,  Y10S707/99937

摘要： A medical-instrument service providing system receives an online order for a medical instrument via a communication network from a service utilizing terminal of a medical institution, accesses a stock control server controlled by a supplier of the medical instrument, to check whether or not the on-order medical instrument is in stock in the supplier. If the on-order medical instrument is in stock in the supplier, the system instructs to deliver the medical instrument to the medical institution. If the on-order medical instrument is insufficient in stock, the system accesses a stock control server, controlled by other institution than the medical instrument, to check whether or not the instrument is in stock, via the communication network. If the on-order medical instrument is in stock, the system instructs to supply the medical instrument to the medical institution from the other institution.

摘要翻译： 医疗器械服务提供系统通过来自医疗机构的服务使用终端的通信网络接收医疗机构的在线订单，访问由医疗器械的供应商控制的库存控制服务器，以检查是否 在线订购医疗仪器在供应商库存。 如果订单中的医疗器械库存在供应商中，则系统指示将医疗器械交付给医疗机构。 如果订购医疗器械库存不足，则系统访问由医疗器械以外的机构控制的库存控制服务器，通过通信网络检查仪器是否库存。 如果订购的医疗器具库存，系统指示从其他机构向医疗机构提供医疗器械。

公开(公告)号：US07805279B2

公开(公告)日：2010-09-28

申请号：US11438440

申请日：2006-05-23

申请人： Nobuaki Ogushi ,  Hirohisa Ohta ,  Yoshito Yoneyama ,  Masaya Ogura

发明人： Nobuaki Ogushi ,  Hirohisa Ohta ,  Yoshito Yoneyama ,  Masaya Ogura

IPC分类号： G06F11/30 ,  G06F19/00

CPC分类号： G03F7/70525 ,  G05B19/4184 ,  G05B23/0213 ,  G05B23/0283 ,  G05B2219/24084 ,  G05B2219/31186 ,  G05B2219/33284 ,  G05B2219/33313 ,  G05B2219/33318 ,  G05B2223/06 ,  Y02P90/14 ,  Y02P90/18

摘要： Factories (102-104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) and notifies the vendor side of status information representing a trouble state. In response to this, the host computer (108) on the vendor side notifies the factory side of response information representing a countermeasure against the trouble state.

摘要翻译： 工厂（102-104）拥有监控工业设备的主机（107）（106）。 每个主计算机（107）通过互联网（105）连接到供应商（101）侧的管理主机计算机（108）。 工厂侧的主计算机（107）检测工业设备（106）的故障的发生，并通知供应商侧表示故障状态的状态信息。 响应于此，供应方侧的主计算机（108）向工厂通知代表针对故障状态的对策的响应信息。

公开(公告)号：US07062343B2

公开(公告)日：2006-06-13

申请号：US11117455

申请日：2005-04-29

申请人： Nobuaki Ogushi ,  Hirohisa Ohta ,  Yoshito Yoneyama ,  Masaya Ogura

发明人： Nobuaki Ogushi ,  Hirohisa Ohta ,  Yoshito Yoneyama ,  Masaya Ogura

IPC分类号： G06F19/00

CPC分类号： G03F7/70525 ,  G05B19/4184 ,  G05B23/0213 ,  G05B23/0283 ,  G05B2219/24084 ,  G05B2219/31186 ,  G05B2219/33284 ,  G05B2219/33313 ,  G05B2219/33318 ,  G05B2223/06 ,  Y02P90/14 ,  Y02P90/18

摘要： Factories (102–104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) and notifies the vendor side of status information representing a trouble state. In response to this, the host computer (108) on the vendor side notifies the factory side of response information representing a countermeasure against the trouble state.

摘要翻译： 工厂（102-104）拥有监控工业设备的主机（107）（106）。 每个主计算机（107）通过互联网（105）连接到供应商（101）侧的管理主机计算机（108）。 工厂侧的主计算机（107）检测工业设备（106）的故障的发生，并通知供应商侧表示故障状态的状态信息。 响应于此，供应方侧的主计算机（108）向工厂通知代表针对故障状态的对策的响应信息。

公开(公告)号：US5370842A

公开(公告)日：1994-12-06

申请号：US979811

申请日：1992-11-20

申请人： Takeshi Miyazaki ,  Matsuomi Nishimura ,  Takayuki Yagi ,  Kazumi Tanaka ,  Toshikazu Ohnishi ,  Masanori Sakuranaga ,  Yoshito Yoneyama ,  Hidehito Takayama ,  Kazuo Isaka

发明人： Takeshi Miyazaki ,  Matsuomi Nishimura ,  Takayuki Yagi ,  Kazumi Tanaka ,  Toshikazu Ohnishi ,  Masanori Sakuranaga ,  Yoshito Yoneyama ,  Hidehito Takayama ,  Kazuo Isaka

IPC分类号： B01L3/00 ,  B01L3/02 ,  G01N15/14 ,  G01N21/03 ,  G01N33/543 ,  G01N35/00 ,  G01N35/08 ,  G01N35/10 ,  G01N21/00 ,  G01N21/85 ,  B01L21/85

CPC分类号： G01N15/1459 ,  B01L3/0268 ,  B01L3/502715 ,  G01N15/1484 ,  G01N21/0303 ,  G01N33/54366 ,  G01N35/08 ,  B01L2200/027 ,  B01L2200/0636 ,  B01L2300/0654 ,  B01L2300/0825 ,  B01L2400/0442 ,  B01L2400/0466 ,  G01N2035/00237 ,  G01N2035/1039 ,  G01N2035/1041

摘要： An injection port for injecting a sample, an accumulation portion for accumulating the injected sample having a reagent carrier enclosed, a flow passage portion, having a light receiving element at a measuring position located halfway thereof, for passing a reaction fluid having reacted with the reagent in the accumulation portion therethrough, a micro-pump having a feed action of the sample fluid within the flow passage portion and which is a heat generating element provided near a nozzle downstream of the measuring position of the flow passage portion are formed integrally and intensively as a cartridge by a producing method including a semiconductor fabrication process.

摘要翻译： 用于注射样品的注入口，用于积聚注入了试剂载体的注射样品的积聚部分，在位于其中途的测量位置处具有光接收元件的流路部分，用于使与反应物反应的反应流体 在其中的积聚部分中，具有在流动通道部分内具有样品流体的进给动作并且设置在流路部分的测量位置下游的喷嘴附近的发热元件的微型泵一体地集中地形成为 一种通过包括半导体制造工艺的制造方法的盒。

公开(公告)号：US5180065A

公开(公告)日：1993-01-19

申请号：US596083

申请日：1990-10-11

申请人： Yoshiyuki Touge ,  Yoshito Yoneyama

发明人： Yoshiyuki Touge ,  Yoshito Yoneyama

IPC分类号： G01N15/02 ,  G01N15/14

CPC分类号： G01N15/1404 ,  G01N2015/0238 ,  G01N2015/1409 ,  G01N2015/149 ,  Y10S209/906

摘要： This invention measures the properties of individual particles in particle-suspended liquid by an optical technique or the like, causes the particle-suspended liquid to fall while separating the liquid into droplets containing the individual particles therein, and causes liquid droplets discharged from a nozzle to collide with the droplets from a direction differing from the direction of fall, in conformity with the properties of the particles discriminated by the measurement, so as to change the direction of fall of the falling droplets, thereby fractionating the particles.