公开(公告)号：US07859656B2

公开(公告)日：2010-12-28

申请号：US12366956

申请日：2009-02-06

申请人： Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

发明人： Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

IPC分类号： G01N21/00 ,  G01N21/88 ,  H01L27/00

CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

摘要： An inspection system includes: a facility that uses wide-band illumination light having different wavelengths and single-wavelength light to perform dark-field illumination on an object of inspection, which has the surface thereof coated with a transparent film, in a plurality of illuminating directions at a plurality of illuminating angles; a facility that detects light reflected or scattered from repetitive patterns and light reflected or scattered from non-repetitive patterns with the wavelengths thereof separated from each other; a facility that efficiently detects light reflected or scattered from a foreign matter or defect in the repetitive patterns or non-repetitive patterns or a foreign matter or defect on the surface of the transparent film; and a facility that removes light, which is diffracted by the repetitive patterns, from a diffracted light image of actual patterns or design data representing patterns. Consequently, a more microscopic defect can be detected stably.

摘要翻译： 检查系统包括：使用具有不同波长的宽带照明光和单波长光的设备，在具有透明膜的表面上的多个照明中对被检查对象进行暗视场照明 多个照明角度的方向; 检测从重复图案反射或散射的光和从彼此分离的波长的非重复图案反射或散射的光的设备; 有效地检测异物反射或散射的光或重复图案或非重复图案中的缺陷或透明膜表面上的异物或缺陷的设备; 以及通过重复图案衍射的光从实际图案的衍射光图像或表示图案的设计数据中去除的设施。 因此，能够稳定地检测出更微细的缺陷。

公开(公告)号：US07697845B2

公开(公告)日：2010-04-13

申请号：US11752331

申请日：2007-05-23

申请人： Yasuhiro Uchiyama ,  Hiroyuki Nakano

发明人： Yasuhiro Uchiyama ,  Hiroyuki Nakano

IPC分类号： H04J14/02 ,  H04B10/16

CPC分类号： H04J14/0283 ,  H04J14/0204 ,  H04J14/0206 ,  H04J14/0212 ,  H04J14/0213 ,  H04J14/0221 ,  H04J14/0227 ,  H04J14/0246 ,  H04J14/025

摘要： An optical add-drop function part of an optical add-drop multiplexer has an output end of transmitted light signal in which an optical termination mechanism formed by an optical detector for detecting open of an optical fiber, an optical switch, and an optical terminator are mounted. Further, a reflection level calculation circuit, a reflection warning determination circuit, and an optical switch selection circuit are mounted to perform laser safety in the optical add-drop function part as well. The laser safety part in the optical add-drop function part is operated earlier than the laser safety part in an optical amplification function part.

摘要翻译： 光分插复用器的光分插功能部分具有透射光信号的输出端，其中由用于检测光纤开路的光检测器形成的光终端机构，光开关和光终端器是 安装。 此外，安装反射电平计算电路，反射警告确定电路和光开关选择电路以在光学分插功能部件中执行激光安全。 光学放大功能部件中的激光安全部件比光放大功能部件中的激光安全部件早。

公开(公告)号：US20100014075A1

公开(公告)日：2010-01-21

申请号：US12504965

申请日：2009-07-17

申请人： Takeo Ueno ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

发明人： Takeo Ueno ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N2021/4792 ,  G01N2021/8848

摘要： An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction.

公开(公告)号：US20090232475A1

公开(公告)日：2009-09-17

申请号：US12271640

申请日：2008-11-14

申请人： Hiroyuki Nakano ,  Takahisa Mori ,  Akihiro Mori

发明人： Hiroyuki Nakano ,  Takahisa Mori ,  Akihiro Mori

IPC分类号： H04N5/91

CPC分类号： H04N5/913 ,  G11B20/00086 ,  G11B20/0021 ,  G11B20/0055 ,  G11B20/00768 ,  G11B2220/2516 ,  G11B2220/65 ,  H04N5/765 ,  H04N5/781 ,  H04N5/85 ,  H04N5/907 ,  H04N2005/91364

摘要： According to one embodiment, a digital broadcast receiving/recording/reproducing apparatus has a receiving module which receives a broadcast signal of a program that is set to be recorded, a processing module which converts the broadcast signal received by the receiving module into digital picture and sound program data, a memory which records copy control information acquired from the broadcast signal received by the receiving module, a recording control module which encrypts the program data converted by the processing module and records the encrypted program data in a specified recording device, and a memory control module which encrypts the copy control information recorded in the memory and records the encrypted copy control information in the specified recording device and deletes the copy control information recorded in the memory after termination of the recording of the encrypted copy control information.

摘要翻译： 根据一个实施例，数字广播接收/记录/再现装置具有接收模块，其接收被设置为被记录的节目的广播信号;处理模块，其将由接收模块接收的广播信号转换为数字图像;以及 声音节目数据，记录从由接收模块接收的广播信号获取的复制控制信息的存储器，对由处理模块转换的节目数据进行加密并将加密的节目数据记录在指定的记录装置中的记录控制模块，以及 存储器控制模块，其对记录在存储器中的复制控制信息进行加密，并将加密的复制控制信息记录在指定的记录装置中，并且在加密的复制控制信息的记录结束之后删除记录在存储器中的复制控制信息。

公开(公告)号：US20090079973A1

公开(公告)日：2009-03-26

申请号：US12273174

申请日：2008-11-18

申请人： Sachio UTO ,  Hiroyuki Nakano

发明人： Sachio UTO ,  Hiroyuki Nakano

IPC分类号： G01N21/00

CPC分类号： G01N21/94 ,  G01N21/47 ,  G01N21/9501

摘要： The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and with a high sensitivity, an object to be inspected on which a transparent film is formed, is irradiated with a beam which is emitted from an illuminator whose illumination direction and illumination angle are selected from a plurality of choices to be optimum, so that scattered reflected light from a minute foreign particle defect on the object or the transparent film is effectively detected by eliminating a noise from the pattern formed on the object, and a detection optical system is optimized by evaluating and adjusting, with an image forming performance checker, an image forming performance of the detection optical system included in an inspecting apparatus.

摘要翻译： 本发明涉及用于在诸如半导体器件的衬底上形成电路图案的器件制造工艺。 为了能够在高速，高灵敏度的装置的制造中能够稳定地检查微小的外来粒子和图案缺陷，对要形成透明膜的检查对象进行照射， 从照明方向和照明角度从多个选择中选择为最佳的发光体发射，从而通过从形成的图案中消除噪声来有效地检测来自物体或透明膜上的微小异物缺陷的散射反射光 并且通过利用图像形成性能检查器评估和调整包括在检查装置中的检测光学系统的图像形成性能来优化检测光学系统。

公开(公告)号：US07415177B2

公开(公告)日：2008-08-19

申请号：US11798645

申请日：2007-05-15

申请人： Yasuyuki Fukashiro ,  Hiroyuki Nakano ,  Tetsuya Uda ,  Tooru Hirai

发明人： Yasuyuki Fukashiro ,  Hiroyuki Nakano ,  Tetsuya Uda ,  Tooru Hirai

IPC分类号： G02B6/34

CPC分类号： H04B10/2525

摘要： A dispersion compensating fiber whose chromatic dispersion is positive and a negative dispersion compensating fiber whose chromatic dispersion is negative are prepared, and division-multiplexed optical signals, after being guided to either dispersion compensating fiber to once shift the whole wavelength band to positivity or negativity, are subjected to fine adjustment with a dispersion compensating fiber of a reverse sign.

摘要翻译： 准备色散为正的色散补偿光纤和色散为负的负色散补偿光纤，并且在被分配复用光信号被引导到任一色散补偿光纤之后，将整个波长带一次移动到积极性或消极性， 用相反符号的色散补偿光纤进行微调。

公开(公告)号：US07258126B2

公开(公告)日：2007-08-21

申请号：US10667656

申请日：2003-09-23

申请人： Yoshikazu Shinchi ,  Hiroyuki Nakano ,  Michio Watanabe

发明人： Yoshikazu Shinchi ,  Hiroyuki Nakano ,  Michio Watanabe

IPC分类号： B08B3/02

CPC分类号： A47L15/4246 ,  A47L15/0084 ,  A47L15/4251

摘要： A dishwasher includes a main body having an open front, a washer tub being extracted from and retracted into the main body through the open front, the washer tub having an open top, a lid for closing the open top of the washer tub when the washer tub is fully retracted to be accommodated in the main body, and an extension member extending backward from a top rear portion of the washer tub. When the washer tub is fully extracted from the main body, a rear end of an inner wall of the washer tub is located in front of a front end of the main body and a free end of the extension member is placed under the lid.

摘要翻译： 一种洗碗机，包括具有敞开的前部的主体，通过打开的前部从洗涤桶中抽出并缩回到主体中的洗涤桶，洗衣桶具有敞开的顶部，当洗衣机 浴缸完全缩回以容纳在主体中，并且延伸构件从洗涤桶的顶部后部向后延伸。 当洗涤桶从主体完全抽出时，洗衣桶的内壁的后端位于主体的前端的前方，延伸部件的自由端位于盖的下方。

公开(公告)号：US20070177136A1

公开(公告)日：2007-08-02

申请号：US11653322

申请日：2007-01-16

申请人： Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

发明人： Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

IPC分类号： G01N21/88

CPC分类号： G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/9513 ,  G01N2021/95638 ,  H01L22/12

摘要： A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.

摘要翻译： 缺陷检查装置包括照射光学系统20，检测光学系统30和图像处理器40。 在照射光学系统中，设置反射镜2603以向下反射已经被引导到第一或第二光路的光束，并且设置柱面透镜251和倾斜镜2604以聚焦已导向的光束 作为狭缝状光束90，通过反射镜向下倾斜，从与水平方向延伸的所需倾斜方向倾斜的角度，到被检查的基板1上。

公开(公告)号：US20060163503A1

公开(公告)日：2006-07-27

申请号：US11325550

申请日：2006-01-05

申请人： Yuta Urano ,  Hiroyuki Nakano ,  Shunji Maeda ,  Sachio Uto

发明人： Yuta Urano ,  Hiroyuki Nakano ,  Shunji Maeda ,  Sachio Uto

IPC分类号： G01N21/86

CPC分类号： G01N21/9501 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

摘要： When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects.

摘要翻译： 当在用于检查异物和缺陷的装置中使用CCD传感器作为光检测器时，存在在将由光电转换产生的信号电荷转换成电压并读取的同时将电噪声引起的问题。 因此，通过检测来自小异物和缺陷的反射和散射光获得的弱检测信号被埋在电噪声中，这是检测小异物和缺陷的障碍。 为了解决上述问题，根据本发明，使用电子倍增CCD传感器作为光检测器。 电子倍增CCD传感器能够通过将通过光电转换产生的电子与其进行读取而相对于电噪声放大由输入光产生的信号。 因此，与常规CCD传感器相比，它可以检测较弱的光，因此可以检测较小的异物和缺陷。

公开(公告)号：US20060139629A1

公开(公告)日：2006-06-29

申请号：US11296290

申请日：2005-12-08

申请人： Yoshimasa Ohshima ,  Hisafumi Iwata ,  Hiroyuki Nakano

发明人： Yoshimasa Ohshima ,  Hisafumi Iwata ,  Hiroyuki Nakano

IPC分类号： G01N21/88

CPC分类号： G01N21/47 ,  G01N21/21 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825

摘要： There is disclosed a defect detecting apparatus that focuses a laser beam, irradiates it onto the surface of a sample to be examined, and detects a foreign substance/defect existing on the surface from the scattered light as a result of the irradiation of the beam onto the sample surface. In order to stably detect defects such as foreign substance, the defect detecting apparatus according to the invention is constructed to use a beam shape optical system by which the laser beam emitted from a laser source is shaped to change the illumination intensity from its Gauss distribution to a flat distribution so that the detected signal can be stably produced even if the relative position of a defect/foreign substance to the laser beam irradiation position is changed.

摘要翻译： 公开了一种将激光束聚焦并将其照射到待检查样品的表面上的缺陷检测装置，并且由于将光束照射到散射光上而检测存在于表面上的异物/缺陷 样品表面。 为了稳定地检测异物等缺陷，根据本发明的缺陷检测装置的结构是使用光束形状光学系统，通过该光束系统将从激光源发射的激光束成形为将照射强度从其高斯分布改变为 平坦分布，使得即使改变了缺陷/异物与激光束照射位置的相对位置，也能够稳定地产生检测信号。