公开(公告)号：US20080127722A1

公开(公告)日：2008-06-05

申请号：US11606695

申请日：2006-11-30

申请人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

发明人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

IPC分类号： G01B5/28

CPC分类号： G01Q60/32 ,  G01Q30/04

摘要： A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e.g., pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.

摘要翻译： 提供了一种用于其实践的方法和装置，其使用谐波共振成像将异质样品的至少一个组分与其他组分区分开，并且从差异化获得关于样品的信息。 在优选实施例中，产生具有谐波特性或谐波的组合的图像，产生具有样品组成成分之间的对比度因子的响应。 可以在样品的初步数据采集程序中识别所需的谐波，或者如果样品的组成成分预先已知，则预先确定。 期望的哈密顿可以由用户直接识别或通过例如模式识别自动识别。 然后可以生成和显示组成图，和/或可以获得关于样本的附加信息。

公开(公告)号：US20060272399A1

公开(公告)日：2006-12-07

申请号：US11436386

申请日：2006-05-18

申请人： Chanmin Su ,  Sergei Magonov

发明人： Chanmin Su ,  Sergei Magonov

IPC分类号： G01B5/28

CPC分类号： G01Q70/04 ,  G01N3/00 ,  G01N2203/0051 ,  G01N2203/0075 ,  G01N2203/0094 ,  G01N2203/0286 ,  G01Q60/38

摘要： Dynamic nanomechanical analysis of a sample is performed by using a cantilever probe that interacts with the sample using a force applied across a wide range of frequencies that includes frequencies greater than 300 Hz. The motion of the cantilever probe is detected in response to the applied force over the range of frequencies and analyzed over at least a portion of the wide range of frequencies to determine a mechanical response of the sample, preferably including quality factor and modulus of the sample. The analysis of the motion of the cantilever probe is preferably performed in terms of amplitude, phase, and frequency of both the probe and the sample and preferably, where the applied force is analyzed to determine both a real and an imaginary modulus of a mechanical response of the sample. Preferably, the force is applied so as to produce a minimum of phase and amplitude response variation in the absence of the sample. Furthermore the motion of the cantilever can be flexural or torsional and combinations thereof.

公开(公告)号：US20050121615A1

公开(公告)日：2005-06-09

申请号：US10975792

申请日：2004-10-28

申请人： Craig Prater ,  Charles Meyer ,  Chanmin Su ,  James Massie ,  Kenneth Babcock ,  Mary Turner

发明人： Craig Prater ,  Charles Meyer ,  Chanmin Su ,  James Massie ,  Kenneth Babcock ,  Mary Turner

IPC分类号： G01N9/00 ,  G01Q70/00 ,  G02B7/182 ,  G01N21/35

CPC分类号： G02B7/1821 ,  G01N9/002 ,  G01N2291/0427

摘要： An integrated cantilever sensor array system that accurately detects and measures the presence of target substances in various environmental conditions. The integrated cantilever sensor array system comprises a cantilever sensor measurement head, a cantilever sensor system for measuring the oscillatory properties of the cantilevers and a measurement chamber. The measurement head includes a cantilever array having at least one cantilever, a light source and a detector positioned to detect incoming light reflected by the cantilevers within the cantilever array. The cantilever sensor system measures the oscillatory properties generated by the cantilevers within the cantilever array. The system includes the cantilever array and a detection system that measures a signal related to the bending of the cantilever. In addition, optional components such as a high frequency clock, Q-Control, may be added to more accurately measure the oscillation of the cantilevers within the cantilever array. The measurement chamber includes a flow cell, a cantilever sensor array mounted within the flow cell. The flow cell is designed to minimize dead volume and unwanted air bubbles within the cell, which may reduce accuracy of measurement.

摘要翻译： 集成的悬臂传感器阵列系统，能够准确地检测和测量各种环境条件下目标物质的存在。 集成的悬臂传感器阵列系统包括悬臂传感器测量头，用于测量悬臂的振荡特性的悬臂传感器系统和测量室。 测量头包括悬臂阵列，其具有至少一个悬臂，光源和检测器，定位成检测由悬臂阵列内的悬臂反射的入射光。 悬臂传感器系统测量由悬臂阵列内的悬臂产生的振荡特性。 该系统包括悬臂阵列和测量与悬臂弯曲有关的信号的检测系统。 此外，可以添加诸如高频时钟Q-Control等可选组件以更准确地测量悬臂阵列内的悬臂的振荡。 测量室包括流动池，安装在流动池内的悬臂传感器阵列。 流动池被设计成使细胞内的死体积和不需要的气泡最小化，这可能降低测量精度。

公开(公告)号：US20050034512A1

公开(公告)日：2005-02-17

申请号：US10638963

申请日：2003-08-11

申请人： Chanmin Su ,  Sergei Magonov

发明人： Chanmin Su ,  Sergei Magonov

IPC分类号： G01N3/00 ,  G01N3/02 ,  G01Q60/38 ,  G01Q70/04 ,  G01N19/02

CPC分类号： G01Q70/04 ,  G01N3/00 ,  G01N2203/0051 ,  G01N2203/0075 ,  G01N2203/0094 ,  G01N2203/0286 ,  G01Q60/38

摘要： Dynamic nanomechanical analysis of a sample is performed by using a cantilever probe that interacts with the sample using a force applied across a wide range of frequencies that includes frequencies greater than 300 Hz. The motion of the cantilever probe is detected in response to the applied force over the range of frequencies and analyzed over at least a portion of the wide range of frequencies to determine a mechanical response of the sample, preferably including quality factor and modulus of the sample. The analysis of the motion of the cantilever probe is preferably performed in terms of amplitude, phase, and frequency of both the probe and the sample and preferably, where the applied force is analyzed to determine both a real and an imaginary modulus of a mechanical response of the sample. Preferably, the force is applied so as to produce a minimum of phase and amplitude response variation in the absence of the sample. Furthermore the motion of the cantilever can be flexural or torsional and combinations thereof.

摘要翻译： 样品的动态纳米力学分析是通过使用悬臂式探头进行的，该悬臂探头使用施加在包括大于300Hz的频率的宽频率范围内的力与样品相互作用。 响应于在频率范围上施加的力来检测悬臂探头的运动，并且在宽频率范围的至少一部分上分析以确定样品的机械响应，优选地包括样品的质量因子和模量 。 优选地，根据探针和样品的振幅，相位和频率来执行悬臂探头的运动分析，并且优选地，在分析所施加的力以确定机械响应的实数和虚数模量的情况下 的样品。 优选地，施加力以在不存在样品的情况下产生最小的相位和幅度响应变化。 此外，悬臂的运动可以是弯曲的或扭转的以及它们的组合。

公开(公告)号：US07865966B2

公开(公告)日：2011-01-04

申请号：US12210075

申请日：2008-09-12

申请人： Chanmin Su ,  Sergey Belikov

发明人： Chanmin Su ,  Sergey Belikov

IPC分类号： G01Q10/06 ,  G01Q30/04 ,  G01Q30/06

CPC分类号： G01Q30/04 ,  G01Q10/06 ,  Y10S977/85

摘要： A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.

摘要翻译： 操作扫描探针显微镜（SPM）的方法包括扫描样品作为SPM的探针与样品相互作用，并响应于扫描步骤收集样品表面数据。 该方法从样品表面数据识别样品的特征，并基于识别步骤自动执行特征的放大扫描。 该方法用于快速识别和确认感兴趣的特征的位置，例如纳米凹凸，以便于执行特征的定向高分辨率图像。

公开(公告)号：US07757544B2

公开(公告)日：2010-07-20

申请号：US11619097

申请日：2007-01-02

申请人： Lin Huang ,  Chanmin Su

发明人： Lin Huang ,  Chanmin Su

IPC分类号： G01B5/28

CPC分类号： G01Q20/04 ,  G01Q10/065 ,  G01Q30/06 ,  G01Q30/18 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/40 ,  G01Q60/48

摘要： The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.

摘要翻译： 优选实施例涉及一种操作扫描探针显微镜（SPM）的方法和装置，包括在探针的扭转共振下振荡SPM的探针，并且通常同时测量电特性，例如电流，电容，阻抗 等等，在SPM的探针和由扭转共振模式控制的分离的样品之间。 优选地，在使用扭转共振反馈以维持SPM操作的设定点的同时执行测量步骤。

公开(公告)号：US07658097B2

公开(公告)日：2010-02-09

申请号：US11537535

申请日：2006-09-29

申请人： Chanmin Su ,  Peter M. Lombrozo

发明人： Chanmin Su ,  Peter M. Lombrozo

IPC分类号： G01B5/28 ,  G01N13/16

CPC分类号： G01Q10/045 ,  G01Q10/04

摘要： A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.

摘要翻译： 具有与样品表面相互作用以便高速进行机械性能测量的探针的探针仪器包括产生样品和探针之间的相对运动的扫描器。 此外，探针致动器在大致垂直的方向上产生样品和探针之间的相对运动，以及产生扫描仪驱动信号和致动器驱动信号的控制器。 探头致动器响应于致动器驱动信号，并且具有至少约50-80kHz的可操作带宽以执行快速力曲线测量。 探针致动器优选地至少部分地位于悬臂上。 此外，正常操作期间的反馈可能被中断，以使用集成执行器执行力曲线测量。

公开(公告)号：US07617719B2

公开(公告)日：2009-11-17

申请号：US11606695

申请日：2006-11-30

申请人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

发明人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

IPC分类号： G01B5/28

CPC分类号： G01Q60/32 ,  G01Q30/04

摘要： A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e.g., pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.

摘要翻译： 提供了一种用于其实践的方法和装置，其使用谐波共振成像将异质样品的至少一个组分与其他组分区分开，并且从差异化获得关于样品的信息。 在优选实施例中，产生具有谐波特性或谐波的组合的图像，产生具有样品组成成分之间的对比度因子的响应。 可以在样品的初步数据采集程序中识别所需的谐波，或者如果样品的组成成分预先已知，则预先确定。 期望的哈密顿可以由用户直接识别或通过例如模式识别自动识别。 然后可以生成和显示组成图，和/或可以获得关于样本的附加信息。

公开(公告)号：US07574903B2

公开(公告)日：2009-08-18

申请号：US11669034

申请日：2007-01-30

申请人： Chanmin Su ,  Robert C. Daniels

发明人： Chanmin Su ,  Robert C. Daniels

IPC分类号： G01B5/28

CPC分类号： G01Q10/06 ,  G01Q60/26 ,  G01Q60/32 ,  G01Q60/34 ,  G01Q60/38

摘要： A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.

摘要翻译： 操作扫描探针显微镜的方法包括使用具有悬臂的探针，并以其扭转共振频率振动探针。 此外，该方法包括通过设置在探针或探针基座上的双重致动器显着提高扭转驱动效率。 第一和第二致动器可以由相应的第一和第二驱动信号驱动，第一和第二驱动信号相位相差180度。 最大化步骤包括改变第一和第二驱动信号的幅度中的至少一个以最大化扭转振荡。 可以通过调整相应的驱动信号的相位来同时，顺序地或独立地激励悬臂探头的扭转和弯曲振荡。 可以使用一对悬臂部件来通过在远端旋转具有相应末端部分的各个臂来形成纳米制造者。

公开(公告)号：US20080276695A1

公开(公告)日：2008-11-13

申请号：US12119382

申请日：2008-05-12

申请人： Craig Prater ,  Chanmin Su

发明人： Craig Prater ,  Chanmin Su

IPC分类号： G01B5/28

CPC分类号： G01Q60/06 ,  G01N29/0681 ,  G01Q60/32

摘要： A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.

摘要翻译： 在样本上的多个位置成像子表面特征的方法和相应的装置包括在第一横向位置将超声波耦合到样本中。 然后该方法用原子力显微镜的尖端测量样品附近的超声波能量的振幅和相位。 接下来，该方法在第二横向位置将超声波耦合到样品中，并且对于第二横向位置重复测量步骤。 总体而言，本系统和方法实现了广泛范围样品的高分辨率子表面映射，包括硅晶片。 值得注意的是，当成像晶片时，背面污染被最小化。