公开(公告)号：US07865966B2

公开(公告)日：2011-01-04

申请号：US12210075

申请日：2008-09-12

申请人： Chanmin Su ,  Sergey Belikov

发明人： Chanmin Su ,  Sergey Belikov

IPC分类号： G01Q10/06 ,  G01Q30/04 ,  G01Q30/06

CPC分类号： G01Q30/04 ,  G01Q10/06 ,  Y10S977/85

摘要： A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.

摘要翻译： 操作扫描探针显微镜（SPM）的方法包括扫描样品作为SPM的探针与样品相互作用，并响应于扫描步骤收集样品表面数据。 该方法从样品表面数据识别样品的特征，并基于识别步骤自动执行特征的放大扫描。 该方法用于快速识别和确认感兴趣的特征的位置，例如纳米凹凸，以便于执行特征的定向高分辨率图像。

公开(公告)号：US20090077697A1

公开(公告)日：2009-03-19

申请号：US12210075

申请日：2008-09-12

申请人： Chanmin Su ,  Sergey Belikov

发明人： Chanmin Su ,  Sergey Belikov

IPC分类号： G12B21/02 ,  G01N13/10

CPC分类号： G01Q30/04 ,  G01Q10/06 ,  Y10S977/85

摘要： A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.

摘要翻译： 操作扫描探针显微镜（SPM）的方法包括扫描样品作为SPM的探针与样品相互作用，并响应于扫描步骤收集样品表面数据。 该方法从样品表面数据识别样品的特征，并基于识别步骤自动执行特征的放大扫描。 该方法用于快速识别和确认感兴趣的特征的位置，例如纳米凹凸，以便于执行特征的定向高分辨率图像。

公开(公告)号：US07149343B2

公开(公告)日：2006-12-12

申请号：US10370206

申请日：2003-02-18

申请人： Marian Enachescu ,  Sergey Belikov

发明人： Marian Enachescu ,  Sergey Belikov

IPC分类号： G06K9/00 ,  H04N7/18 ,  G01N21/88

CPC分类号： G01R31/308

摘要： Described are methods and systems for providing improved defect detection and analysis using infrared thermography. Test vectors heat features of a device under test to produce thermal characteristics useful in identifying defects. The test vectors are timed to enhance the thermal contrast between defects and the surrounding features, enabling IR imaging equipment to acquire improved thermographic images. In some embodiments, a combination of AC and DC test vectors maximize power transfer to expedite heating, and therefore testing. Mathematical transformations applied to the improved images further enhance defect detection and analysis. Some defects produce image artifacts, or “defect artifacts,” that obscure the defects, rendering difficult the task of defect location. Some embodiments employ defect-location algorithms that analyze defect artifacts to precisely locate corresponding defects.

公开(公告)号：US07501939B1

公开(公告)日：2009-03-10

申请号：US11201076

申请日：2005-08-10

申请人： Sergey Belikov ,  Sergio A Paulo ,  Osamu Yamada

发明人： Sergey Belikov ,  Sergio A Paulo ,  Osamu Yamada

IPC分类号： B60Q1/00

CPC分类号： G01D11/28 ,  B60K35/00 ,  B60K37/02 ,  B60K2350/1064 ,  B60K2350/2008 ,  B60K2350/203

摘要： The present invention generally includes a display device having a plurality of indicia indicative of a vehicle parameter. The display device includes a plurality of dimmable segments. Each dimmable segment has a lower end point associated with a first value of the vehicle parameter and an upper end point associated with a second value of the vehicle parameter. Each of the dimmable segments has an independently adjustable intensity and adapted to illuminate at least a portion of the indicia. A control module is adapted to receive a signal indicative of an actual value of the vehicle parameter. The control module also adjusts the intensity of at least one of the dimmable segments based on the signal. The intensity being at a first intensity when the actual value is about equal to the first value, the intensity being at a second intensity when the actual value is about equal to the second value, and the intensity being at an intensity between the first intensity and the second intensity when the actual value is between the respective first value and the respective second value.

摘要翻译： 本发明通常包括具有指示车辆参数的多个标记的显示装置。 显示装置包括多个可调光段。 每个可调光段具有与车辆参数的第一值相关联的下端点和与车辆参数的第二值相关联的上端点。 每个可调光段具有可独立调节的强度并适于照亮标记的至少一部分。 控制模块适于接收指示车辆参数的实际值的信号。 控制模块还基于该信号来调节至少一个可调光段的强度。 当实际值约等于第一值时，强度处于第一强度，当实际值约等于第二值时，强度处于第二强度，强度处于第一强度和第一强度之间的强度 当实际值在相应的第一值和相应的第二值之间时的第二强度。

公开(公告)号：US06188044B1

公开(公告)日：2001-02-13

申请号：US09067142

申请日：1998-04-27

申请人： Yong Jin Lee ,  Mehrdad M. Moslehi ,  Jalil Kamali ,  Sergey Belikov

发明人： Yong Jin Lee ,  Mehrdad M. Moslehi ,  Jalil Kamali ,  Sergey Belikov

IPC分类号： F27B514

CPC分类号： H01L21/67115 ,  C23C16/481

摘要： An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer device 40, which has a first set of energy transfer regions comprised of an emissive and thermally conductive material, and a second set of thermally insulating regions comprised of a reduced emissivity and reduced thermal conductivity material or free space. A multi-zone radiant energy source 30 provides radiative energy to energy transfer device 40, with a process controller 36, preferably a multi-zone controller, altering the amount of energy provided by each heat zone associated with each emissive region of energy transfer device 40. Sensors detect the thermal energy level of each energy transfer region to allow controller 36 to adjust the secondary radiation emitted by each region in real time, resulting in a predetermined and controlled distribution of thermal energy on substrate 20. Energy transfer device 40 can have plural emissive and thermally conductive concentric rings separated from each other by reduced emissivity and reduced thermal conductivity regions such as free space gaps 42. Alternatively, a solid plate 54 having an emissive coating or emissive surface 52 can have reduced emissivity and reduced conductivity isolation regions such as trenches 56 for defining the multi-zone high-emissivity and high thermal conductivity energy transfer regions.

摘要翻译： 一种装置和方法通过用来自能量转移装置40的二次辐射加热衬底来支持诸如半导体芯片之类的微电子器件的热处理，该能量转移装置具有由发射和导热材料组成的第一组能量转移区 以及由减少的发射率和降低的热导率材料或自由空间组成的第二组热绝缘区域。 多区域辐射能源30向能量传递装置40提供辐射能，其中过程控制器36，优选多区域控制器，改变与能量传递装置40的每个发射区域相关联的每个加热区域提供的能量的量 传感器检测每个能量传递区域的热能级别，以允许控制器36实时地调整每个区域发射的次级辐射，从而导致基板20上预定和受控的热能分布。能量传递装置40可以具有多个 发射和导热的同心环通过降低的发射率和降低的热导率区域（例如自由空间间隙42）彼此分离。或者，具有发射涂层或发射表面52的固体板54可以具有降低的发射率和降低的电导率隔离区域，例如 用于定义多区高发射率和高导热性的沟槽56 ergy转移区域。

公开(公告)号：US07551769B2

公开(公告)日：2009-06-23

申请号：US11524927

申请日：2006-09-21

申请人： Marian Enachescu ,  Sergey Belikov

发明人： Marian Enachescu ,  Sergey Belikov

IPC分类号： G06K9/00 ,  H04N7/18 ,  G01N21/88

CPC分类号： G06T7/001 ,  G06T2207/30141 ,  G06T2207/30148 ,  G09G3/006

摘要： Described are methods and systems for providing improved defect detection and analysis using infrared thermography. Test vectors heat features of a device under test to produce thermal characteristics useful in identifying defects. The test vectors are timed to enhance the thermal contrast between defects and the surrounding features, enabling IR imaging equipment to acquire improved thermographic images. In some embodiments, a combination of AC and DC test vectors maximize power transfer to expedite heating, and therefore testing. Mathematical transformations applied to the improved images further enhance defect detection and analysis. Some defects produce image artifacts, or “defect artifacts,” that obscure the defects, rendering difficult the task of defect location. Some embodiments employ defect-location algorithms that analyze defect artifacts to precisely locate corresponding defects.

摘要翻译： 描述了使用红外热像仪提供改进的缺陷检测和分析的方法和系统。 测试载体对待测器件的热特征产生用于识别缺陷的热特性。 测试矢量定时以增强缺陷和周围特征之间的热对比度，使IR成像设备能够获得改进的热成像图像。 在一些实施例中，AC和DC测试矢量的组合使功率传递最大化，以加速加热，并因此测试。 应用于改进图像的数学变换进一步增强了缺陷检测和分析。 一些缺陷会产生图像伪像或“缺陷伪像”，这样会掩盖缺陷，使缺陷位置的任务变得困难重重。 一些实施例采用分析缺陷伪像的缺陷位置算法来精确地定位相应的缺陷。

公开(公告)号：US06753272B1

公开(公告)日：2004-06-22

申请号：US09669039

申请日：2000-09-25

申请人： Yong Jin Lee ,  Mehrdad M. Moslehi ,  Jalil Kamali ,  Sergey Belikov

发明人： Yong Jin Lee ,  Mehrdad M. Moslehi ,  Jalil Kamali ,  Sergey Belikov

IPC分类号： H01L21324

CPC分类号： H01L21/67115 ,  C23C16/481

摘要： An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer device 40, which has a first set of energy transfer regions comprised of an emissive and thermally conductive material, and a second set of thermally insulating regions comprised of a reduced emissivity and reduced thermal conductivity material or free space. A multi-zone-radiant energy source 30 provides radiative energy to energy transfer device 40, with a process controller 36, preferably a multi-zone controller, altering the amount of energy provided by each heat zone associated with each emissive region of energy transfer device 40. Sensors detect the thermal energy level of each energy transfer region to allow controller 36 to adjust the secondary radiation emitted by each region in real time, resulting in a predetermined and controlled distribution of thermal energy on substrate 20. Energy transfer device 40 can have plural emissive and thermally conductive concentric rings separated from each other by reduced emissivity and reduced thermal conductivity regions such as free space gaps 42. Alternatively, a solid plate 54 having an emissive coating or emissive surface 52 can have reduced emissivity and reduced conductivity isolation regions such as trenches 56 for defining the multi-zone high-emissivity and high thermal conductivity energy transfer regions.

摘要翻译： 一种装置和方法通过用来自能量转移装置40的二次辐射加热衬底来支持诸如半导体芯片之类的微电子器件的热处理，该能量转移装置具有由发射和导热材料组成的第一组能量转移区 以及由减少的发射率和降低的热导率材料或自由空间组成的第二组热绝缘区域。 多区域辐射能量源30向能量传递装置40提供辐射能，其中过程控制器36，优选地，多区域控制器，改变与能量传递装置的每个发射区域相关联的每个加热区域提供的能量的量 传感器检测每个能量转移区域的热能水平，以允许控制器36实时地调整由每个区域发射的次级辐射，从而导致基板20上预定和受控的热能分布。能量传递装置40可具有 多个发射和导热的同心环通过降低的发射率和降低的热导率区域（例如自由空间间隙42）彼此分离。或者，具有发射涂层或发射表面52的固体板54可以具有降低的发射率和降低的电导率隔离区域， 作为用于限定多区高发射率和高热导率的沟槽56 ergy转移区域。

公开(公告)号：US07538815B1

公开(公告)日：2009-05-26

申请号：US10350130

申请日：2003-01-23

申请人： Sergey Belikov ,  Marian Enachescu

发明人： Sergey Belikov ,  Marian Enachescu

IPC分类号： H04N5/232

CPC分类号： H04N5/23212 ,  G02B7/36

摘要： Described are autofocusing algorithms and system implementations for machine inspection applications. The disclosed algorithms depend neither on the type of image (visual, infrared, spectrometric, scanning, etc.) nor on the type of image detector. Disclosed image filtering techniques, image focus measure functions and adaptive velocity control methods can be used in computer-based inspection systems for many different types of cameras and detectors as well as for a variety of magnification levels. The proposed autofocusing system can utilize the existing imaging hardware of the inspection system and does not require any additional components.

摘要翻译： 描述了机器检测应用的自动对焦算法和系统实现。 所公开的算法既不依赖于图像的类型（视觉，红外，光谱，扫描等）也不依赖于图像检测器的类型。 公开的图像滤波技术，图像聚焦测量功能和自适应速度控制方法可用于许多不同类型的相机和检测器以及各种放大级别的基于计算机的检测系统。 所提出的自动对焦系统可以利用检测系统的现有成像硬件，并且不需要任何附加组件。

公开(公告)号：US20070036420A1

公开(公告)日：2007-02-15

申请号：US11524927

申请日：2006-09-21

申请人： Marian Enachescu ,  Sergey Belikov

发明人： Marian Enachescu ,  Sergey Belikov

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30141 ,  G06T2207/30148 ,  G09G3/006

摘要： Described are methods and systems for providing improved defect detection and analysis using infrared thermography. Test vectors heat features of a device under test to produce thermal characteristics useful in identifying defects. The test vectors are timed to enhance the thermal contrast between defects and the surrounding features, enabling IR imaging equipment to acquire improved thermographic images. In some embodiments, a combination of AC and DC test vectors maximize power transfer to expedite heating, and therefore testing. Mathematical transformations applied to the improved images further enhance defect detection and analysis. Some defects produce image artifacts, or “defect artifacts,” that obscure the defects, rendering difficult the task of defect location. Some embodiments employ defect-location algorithms that analyze defect artifacts to precisely locate corresponding defects.

摘要翻译： 描述了使用红外热像仪提供改进的缺陷检测和分析的方法和系统。 测试载体对待测器件的热特征产生用于识别缺陷的热特性。 测试矢量定时以增强缺陷和周围特征之间的热对比度，使IR成像设备能够获得改进的热成像图像。 在一些实施例中，AC和DC测试矢量的组合使功率传递最大化，以加速加热，并因此测试。 应用于改进图像的数学变换进一步增强了缺陷检测和分析。 一些缺陷会产生图像伪像或“缺陷伪像”，这样会掩盖缺陷，使缺陷位置的任务变得困难重重。 一些实施例采用分析缺陷伪像的缺陷位置算法来精确地定位相应的缺陷。

公开(公告)号：US06840666B2

公开(公告)日：2005-01-11

申请号：US10348940

申请日：2003-01-22

申请人： Marian Enachescu ,  Sergey Belikov

发明人： Marian Enachescu ,  Sergey Belikov

IPC分类号： G01R31/308 ,  G01N25/72 ,  G01R31/02 ,  G01R31/3183

CPC分类号： G01R31/308

摘要： Described are methods and systems for providing improved defect detection and analysis using infrared thermography. Test vectors heat features of a device under test to produce thermal characteristics useful in identifying defects. The test vectors are timed to enhance the thermal contrast between defects and the surrounding features, enabling IR imaging equipment to acquire improved thermographic images. In some embodiments, a combination of AC and DC test vectors maximize power transfer to expedite heating, and therefore testing. Mathematical transformations applied to the improved images further enhance defect detection and analysis. Some defects produce image artifacts, or “defect artifacts,” that obscure the defects, rendering difficult the task of defect location. Some embodiments employ defect-location algorithms that analyze defect artifacts to precisely locate corresponding defects.

摘要翻译： 描述了使用红外热像仪提供改进的缺陷检测和分析的方法和系统。 测试载体对待测器件的热特征产生用于识别缺陷的热特性。 测试矢量定时以增强缺陷和周围特征之间的热对比度，使IR成像设备能够获得改进的热成像图像。 在一些实施例中，AC和DC测试矢量的组合使功率传递最大化，以加速加热，并因此测试。 应用于改进图像的数学变换进一步增强了缺陷检测和分析。 一些缺陷会产生图像伪像或“缺陷伪像”，这样会掩盖缺陷，使缺陷位置的任务变得困难重重。 一些实施例采用分析缺陷伪像的缺陷位置算法来精确地定位相应的缺陷。