公开(公告)号：US6141102A

公开(公告)日：2000-10-31

申请号：US232257

申请日：1999-01-19

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

IPC分类号： G01J3/28 ,  G01J4/00

CPC分类号： G01J4/00 ,  G01J2003/2866

摘要： Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.

摘要翻译： 公开了一种用于在电磁辐射束的正交分量之间输入延迟的三角形延迟器系统。 从侧视图看，三角形元件具有从上部向左和向右突出的第一和第二侧面。 第三面基本上水平地定向并且与第一和第二面连​​续并存在于第一和第二面之下。 在分光椭偏仪/偏振计系统中使用时，输入的电磁辐射束在传播方向上离开，即传播方向基本上未发生变化，并且从其入射方向未脱离，即使延迟器系统围绕光束 电磁辐射。

公开(公告)号：US07450231B2

公开(公告)日：2008-11-11

申请号：US11633138

申请日：2006-12-04

申请人： Blaine D. Johs ,  Steven E. Green ,  Craig M. Herzinger ,  Duane E. Meyer

发明人： Blaine D. Johs ,  Steven E. Green ,  Craig M. Herzinger ,  Duane E. Meyer

IPC分类号： G01J4/00 ,  G02B5/30

CPC分类号： G02B5/3083 ,  G01J1/0407 ,  G01N21/211 ,  G01N2021/213 ,  G02B26/06

摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

摘要翻译： 用于宽光谱范围（例如，190-1700nm）旋转补偿光谱椭偏仪和/或偏振计系统的基本上无色多元素补偿器系统。 多个全内反射进入进入的电磁辐射束的延迟，并且这些元件被定向成使得由延迟元件的位置和/或旋转的变化而导致的净延迟与输入光束角的变化最小化。

公开(公告)号：US6100981A

公开(公告)日：2000-08-08

申请号：US225371

申请日：1999-01-04

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

IPC分类号： G01J3/28 ,  G01J4/00 ,  G02B5/30

CPC分类号： G01J4/00 ,  G02B5/3083 ,  G01J2003/2866

摘要： A retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second triangular shaped elements arranged so that the first triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and downward from an upper point, with a third side which is oriented essentially horizontally and is continuous with, and present below the first and second sides; and so that the second triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and upward from a lower point, with a third side which is oriented essentially horizontally and is continuous with, and present above the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.

摘要翻译： 一种延迟器系统，用于在电磁辐射束的正交分量之间输入延迟，具有第一和第二三角形元件，其布置成使得如在侧视图中看到的第一三角形元件呈现向左突出的第一和第二侧 并且从上点向下和向下，第三侧基本上水平地定向并且与第一和第二侧连续并存在下方; 并且使得从侧视图看出的第二三角形元件呈现出从第一和第二侧面向下突出的第一和第二侧面，其中第三侧面基本上水平地定向并与之连续，并且 目前在第一和第二边。 在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转 电磁辐射束。

公开(公告)号：US6084674A

公开(公告)日：2000-07-04

申请号：US225118

申请日：1999-01-04

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

IPC分类号： G01J3/28 ,  G02B5/30 ,  G01J4/00

CPC分类号： G02B5/3083 ,  G01J2003/2866

摘要： A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient. In use an input beam of electromagnetic radiation is caused to enter the right or left side of the retarder system, is diffracted inside the retarder system, and follows a locus which causes it to essentially totally internally reflect from internal interfaces of both the top and bottom sides, then emerge from the retarder system at the opposite, left or right respectively, side in a direction which is essentially undeviated and undisplaced from the locus of the input beam of electromagnetic radiation, even when the retarder system is caused to rotate about an axis coincident with the locus of the electromagentic beam.

摘要翻译： 公开了一种用于椭偏仪和偏振计的延迟器系统及其方法。 延迟器系统是平行四边形元件，从侧视图看，具有彼此平行的顶侧和底侧。 缓速器系统还具有彼此平行的左右两侧，左右两侧与顶侧和底侧成一定角度。 缓速器系统由折射率大于周围环境的材料制成。 在使用中，导致电磁辐射的输入束进入延迟器系统的右侧或左侧，在延迟器系统内部衍射，并且跟随一个轨迹，使得其基本上完全内部从顶部和底部的内部接口反射 侧面，然后即使当延迟器系统绕轴线旋转时，从相对的左侧或右侧的延迟器系统以从电磁辐射的输入光束的轨迹基本上未变形和未放置的方向出现 与电磁光束的轨迹一致。

公开(公告)号：US06118537A

公开(公告)日：2000-09-12

申请号：US223822

申请日：1999-01-04

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

IPC分类号： G01J3/28 ,  G02B5/30 ,  G01N21/21

CPC分类号： G02B5/3083 ,  G01J2003/2866

摘要： Disclosed are retarder systems, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second Berek-type retarders which each present with first and second essentially parallel sides. The first and second Berek-type retarders are oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation. A system with similarly oriented third and fourth Berek-type retarders, sequentially placed after the first and second Berek-type retarders, is also disclosed.

摘要翻译： 公开了用于在电磁辐射束的正交部件之间输入延迟的延迟器系统，其具有第一和第二Berek型延迟器，每个Berek型延迟器具有第一和第二基本平行的侧面。 第一和第二Berek型延迟器从侧视图中被定向，其中一个Berek型延迟器的第一和第二侧面定向成不同于另一Berek型延迟器的第一和第二侧。 在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转 电磁辐射束。 还公开了具有相似方向的第三和第四Berek型延迟器的系统，其顺序地放置在第一和第二Berek型延迟器之后。

公开(公告)号：US06483586B1

公开(公告)日：2002-11-19

申请号：US09950036

申请日：2001-09-10

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green ,  Jeffrey S. Hale

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green ,  Jeffrey S. Hale

IPC分类号： G01N2121

CPC分类号： G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/211

摘要： Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.

摘要翻译： 公开了一种旋转补偿器样本系统调查系统，其包括电磁辐射源的源，偏振器，用于支撑样本系统的平台，分束分析器和至少两个检测器系统，每个检测器系统被定位成截取不同的 的从分束分析仪出现的至少两个电磁波束。 还公开了一种基于回归的校准方法，其同时提取样品系统PSI和DELTA。

公开(公告)号：US07460230B2

公开(公告)日：2008-12-02

申请号：US11590408

申请日：2006-10-31

申请人： Blaine D. Johs ,  Steven E. Green ,  Craig M. Herzinger ,  Duane E. Meyer

发明人： Blaine D. Johs ,  Steven E. Green ,  Craig M. Herzinger ,  Duane E. Meyer

IPC分类号： G01J4/00 ,  G02B5/30

CPC分类号： G02B27/286

摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

公开(公告)号：US20080100842A1

公开(公告)日：2008-05-01

申请号：US11633138

申请日：2006-12-04

申请人： Blaine D. Johs ,  Steven E. Green ,  Craig M. Herzinger ,  Duane E. Meyer

发明人： Blaine D. Johs ,  Steven E. Green ,  Craig M. Herzinger ,  Duane E. Meyer

IPC分类号： G01J4/00

CPC分类号： G02B5/3083 ,  G01J1/0407 ,  G01N21/211 ,  G01N2021/213 ,  G02B26/06

摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

公开(公告)号：US07075649B1

公开(公告)日：2006-07-11

申请号：US09945962

申请日：2001-09-04

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green ,  Jeffrey S. Hale

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green ,  Jeffrey S. Hale

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N21/274 ,  G01N2021/213

摘要： Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is a calibration procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.

摘要翻译： 公开了光谱椭偏仪和组合光谱反射计/椭偏仪系统。 分光椭偏仪系统部分包括在数据采集期间保持固定在位的偏振器和分析器元件，以及逐步旋转的补偿器电磁束发射装置，其用于使多个顺序离散而不是连续变化的极化状态在 所述电磁辐射束。 进一步公开的是本发明的所述分光椭偏仪系统部分的校准程序，其涉及对于多个椭偏不同的采样系统中的每一个，以顺序的多个离散电磁辐射束极化状态收集光谱数据， 光谱椭偏仪系统的数学模型和数学回归程序的应用。

公开(公告)号：US06795184B1

公开(公告)日：2004-09-21

申请号：US09963573

申请日：2001-09-26

申请人： Craig M. Herzinger ,  Steven E. Green ,  Blaine D. Johs

发明人： Craig M. Herzinger ,  Steven E. Green ,  Blaine D. Johs

IPC分类号： G01J400

CPC分类号： G02B27/286 ,  G01J4/00 ,  G01N21/211

摘要： Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displaced locus, but with an azimuthally rotated polarization state. Application to, and methodology of application to set azimuthal angles of polarization in spectroscopic ellipsometer, polarimeter and the like systems is also disclosed.

摘要翻译： 公开了一种具有奇数个反射元件的序列的奇数反弹图像旋转系统，使得偏振电磁束进入，反射地与奇数个反射元件相互作用并沿着基本上非偏离的非位移 但是具有方位角旋转的偏振状态。 还公开了在分光椭圆偏振仪，偏振计等系统中应用于设置偏振方位角的应用和方法。