公开(公告)号：US10254305B2

公开(公告)日：2019-04-09

申请号：US15724385

申请日：2017-10-04

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki Fukuzawa ,  Michiko Hara ,  Yoshihiko Fuji ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akio Hori ,  Tomohiko Nagata ,  Akiko Yuzawa ,  Akira Kikitsu

IPC: G01P15/105 ,  G01P15/08

Abstract: An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

公开(公告)号：US10206654B2

公开(公告)日：2019-02-19

申请号：US15254377

申请日：2016-09-01

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kei Masunishi ,  Akiko Yuzawa ,  Yoshihiko Fuji ,  Michiko Hara ,  Yoshihiro Higashi ,  Kazuaki Okamoto ,  Kenji Otsu

IPC: A61B8/00 ,  A61B5/021 ,  G06F3/041 ,  G01L9/00 ,  H04R15/00

Abstract: A pressure sensor of an embodiment includes a support portion, a transformable membrane part and a sensor portion. The membrane part includes an end portion supported by the support portion, and a first area and a second area. The first area is positioned between a center of the membrane part and the end portion and has a first rigidity. The second area is positioned between the first area and the end portion, and has a second rigidity lower than the first rigidity. The sensor portion is provided at the first area and includes a first magnetic layer, a second magnetic layer and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. An end-side distance between the first area and the end portion is shorter than a center-side distance between the second area and the center of the membrane part.

公开(公告)号：US10145751B2

公开(公告)日：2018-12-04

申请号：US15248412

申请日：2016-08-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko Fuji ,  Michiko Hara ,  Kei Masunishi ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akiko Yuzawa ,  Akio Hori ,  Tomohiko Nagata ,  Kazuaki Okamoto ,  Kenji Otsu ,  Shotaro Baba

IPC: G01L9/00 ,  G01L9/16 ,  H04R21/02 ,  A61B5/021 ,  H04R1/46 ,  A61B5/00

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

公开(公告)号：US20180299338A1

公开(公告)日：2018-10-18

申请号：US16016125

申请日：2018-06-22

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko FUJI ,  Hideaki Fukuzawa ,  Yoshihiro Higashi ,  Shiori Kaji

IPC: G01L9/16 ,  G01L1/12

Abstract: According to one embodiment, the pressure sensor includes a supporting portion, a film portion, and a strain detecting element. The film portion is supported by the supporting portion. The strain detecting element is disposed on a part of the film portion. The strain detecting element includes a first magnetic layer, a second magnetic layer, and an intermediate layer. A magnetization direction of the first magnetic layer is variable according to a deformation of the film portion. The first magnetic layer has a first facing surface. The second magnetic layer has a second facing surface. The second facing surface faces the first facing surface. The intermediate layer is disposed between the first magnetic layer and the second magnetic layer. An area of the first facing surface is larger than an area of the second facing surface.

公开(公告)号：US09872624B2

公开(公告)日：2018-01-23

申请号：US14471694

申请日：2014-08-28

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Shiori Kaji ,  Akio Hori ,  Tomohiko Nagata ,  Michiko Hara ,  Yoshihiro Higashi ,  Akiko Yuzawa

IPC: G01L9/16 ,  G01L1/12 ,  A61B5/021 ,  G01L9/00 ,  A61B5/00

CPC classification number: A61B5/02141 ,  A61B5/6824 ,  A61B2562/0247 ,  G01L1/125 ,  G01L9/0041 ,  G01L9/16

Abstract: According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.

公开(公告)号：US09488541B2

公开(公告)日：2016-11-08

申请号：US14584476

申请日：2014-12-29

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki Fukuzawa ,  Masatoshi Sakurai ,  Masayuki Kii ,  Yoshihiko Fuji ,  Michiko Hara ,  Yoshihiro Higashi ,  Kenji Otsu ,  Akiko Yuzawa ,  Kazuaki Okamoto

IPC: H04R5/02 ,  G01L9/00 ,  H04R19/04 ,  G01L9/16 ,  H04R19/00

CPC classification number: G01L9/0051 ,  G01L9/16 ,  H04R19/005 ,  H04R19/04

Abstract: According to one embodiment, a pressure sensor includes: a base body; a sensor section; and a processing circuit. The sensor section includes: a transducing thin film; a first strain sensing element; and a second strain sensing element. The transducing thin film has a film surface and is flexible. The processing circuit is configured to output as an output signal at least one of a first signal obtained from the first strain sensing element upon application of external pressure to the transducing thin film and a second signal obtained from the second strain sensing element upon application of the external pressure to the transducing thin film.

Abstract translation: 根据一个实施例，压力传感器包括：基体; 传感器部分; 和处理电路。 传感器部分包括：传感薄膜; 第一应变传感元件; 和第二应变传感元件。 换能薄膜具有膜表面并且是柔性的。 处理电路被配置为当施加外部压力到转换薄膜时从第一应变感测元件获得的第一信号中的至少一个输出作为输出信号，以及在应用第二应变感测元件时从第二应变感测元件获得的第二信号 对转换薄膜的外部压力。

公开(公告)号：US09342179B2

公开(公告)日：2016-05-17

申请号：US14471226

申请日：2014-08-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Tomohiko Nagata ,  Akio Hori ,  Yoshihiro Higashi

IPC: G01L1/12 ,  G06F3/041 ,  G01L9/16 ,  A61B5/021 ,  G01L9/00 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00 ,  A61B5/00

CPC classification number: G06F3/0414 ,  A61B5/02141 ,  A61B5/6824 ,  A61B2562/0247 ,  G01L1/125 ,  G01L9/0041 ,  G01L9/16 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00

Abstract: According to one embodiment, a strain sensing element includes a film unit, and a sensing unit. The film unit has a film surface and is capable of being deformed. The sensing unit includes a first sensing element and a second sensing element. The first sensing element is provided between a part of the film unit and the second sensing element. The first sensing element includes a first magnetic layer having a changeable magnetization with a deformation of the film unit, a second magnetic layer provided apart from the first magnetic layer, and a first spacer layer provided between the first and second magnetic layers. The second sensing element includes a third magnetic layer having a changeable magnetization with the deformation of the film unit, a fourth magnetic layer provided apart from the third magnetic layer, and a second spacer layer provided between the third and fourth magnetic layers.

Abstract translation: 根据一个实施例，应变感测元件包括膜单元和感测单元。 膜单元具有膜表面并且能够变形。 感测单元包括第一感测元件和第二感测元件。 第一感测元件设置在胶片单元的一部分和第二感测元件之间。 第一感测元件包括具有可变磁化强度的第一磁性层，其具有胶片单元的变形，与第一磁性层分开设置的第二磁性层以及设置在第一和第二磁性层之间的第一间隔层。 第二感测元件包括具有可变磁化强度的第三磁性层和膜单元的变形，与第三磁性层分开设置的第四磁性层以及设置在第三和第四磁性层之间的第二间隔层。

公开(公告)号：US20150082917A1

公开(公告)日：2015-03-26

申请号：US14471226

申请日：2014-08-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko FUJI ,  Hideaki Fukuzawa ,  Tomohiko Nagata ,  Akio Hori ,  Yoshihiro Higashi

IPC: G01L1/12 ,  G06F3/041 ,  A61B5/021 ,  H04R1/00 ,  G01L9/00 ,  G01L9/16

CPC classification number: G06F3/0414 ,  A61B5/02141 ,  A61B5/6824 ,  A61B2562/0247 ,  G01L1/125 ,  G01L9/0041 ,  G01L9/16 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00

Abstract: According to one embodiment, a strain sensing element includes a film unit, and a sensing unit. The film unit has a film surface and is capable of being deformed. The sensing unit includes a first sensing element and a second sensing element. The first sensing element is provided between a part of the film unit and the second sensing element. The first sensing element includes a first magnetic layer having a changeable magnetization with a deformation of the film unit, a second magnetic layer provided apart from the first magnetic layer, and a first spacer layer provided between the first and second magnetic layers. The second sensing element includes a third magnetic layer having a changeable magnetization with the deformation of the film unit, a fourth magnetic layer provided apart from the third magnetic layer, and a second spacer layer provided between the third and fourth magnetic layers.

Abstract translation: 根据一个实施例，应变感测元件包括膜单元和感测单元。 膜单元具有膜表面并且能够变形。 感测单元包括第一感测元件和第二感测元件。 第一感测元件设置在胶片单元的一部分和第二感测元件之间。 第一感测元件包括具有可变磁化强度的第一磁性层，其具有胶片单元的变形，与第一磁性层分开设置的第二磁性层以及设置在第一和第二磁性层之间的第一间隔层。 第二感测元件包括具有可变磁化强度的第三磁性层和膜单元的变形，与第三磁性层分开设置的第四磁性层和设置在第三和第四磁性层之间的第二间隔层。

公开(公告)号：US12270866B2

公开(公告)日：2025-04-08

申请号：US18166532

申请日：2023-02-09

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akira Kikitsu ,  Yoshihiro Higashi ,  Satoshi Shirotori

IPC: G01R33/00 ,  G01R33/06

Abstract: According to one embodiment, a magnetic sensor includes an element portion and a conductive layer. The element portion includes a first magnetic element, a second magnetic element, a first conductive member, and a second conductive member. The first magnetic element includes a first end portion and a first other end portion. The second magnetic element includes a second end portion and a second other end portion. The first conductive member includes a first portion and a first other portion. The first portion corresponds to the first end portion. The first other portion corresponds to the first other end portion. The second conductive member includes a second portion and a second other portion. The second portion corresponds to the second end portion. The second other portion corresponds to the second other end portion. The conductive layer includes a first conductive portion and a first other conductive portion.

公开(公告)号：US11992320B2

公开(公告)日：2024-05-28

申请号：US17682998

申请日：2022-02-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiro Higashi ,  Akira Kikitsu ,  Satoshi Shirotori ,  Yoshinari Kurosaki

IPC: G01R33/09 ,  A61B5/245

CPC classification number: A61B5/245 ,  G01R33/093 ,  A61B2562/0223 ,  A61B2562/046

Abstract: According to one embodiment, a sensor includes a first magnetic member, a first counter magnetic member, a first magnetic element, and a first magnetic interconnect. A direction from the first magnetic member to the first counter magnetic member is along a first direction. A first gap is provided between the first magnetic member and the first counter magnetic member. The first magnetic element includes a first magnetic region. A second direction from the first magnetic region to the first gap crosses the first direction. A direction from the first magnetic interconnect to the first magnetic region is along the second direction.